NAM; Sang Ki

Patent Applications and Registrations

Patent applications and USPTO patent grants for NAM; Sang Ki.The latest application filed is for "cleaning solution production systems and methods, and plasma reaction tanks".

Company Profile

24.38.52

NAM; Sang Ki - SEONGNAM-SI KR
Nam; Sang Ki - Danville CA
Nam; Sang Ki - San Jose CA US
Nam; Sang Ki - Fremont CA US
Nam; Sang Ki - Contra Costa CA
Nam; Sang-Ki - Jeollanam-do KR
Nam; Sang-Ki - Suncheon-City KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Cleaning Solution Production Systems And Methods, And Plasma Reaction Tanks App 20210351047 - YOO; Beom Jin ; et al.	2021-11-11
Peripheral RF feed and symmetric RF return for symmetric RF delivery Grant 11,127,571 - Nam , et al. September 21, 2	2021-09-21
Cleaning solution production systems and methods, and plasma reaction tanks Grant 11,107,705 - Yoo , et al. August 31, 2	2021-08-31
Plasma processing apparatus and method of manufacturing semiconductor device using the same Grant 10,950,414 - Nam , et al. March 16, 2	2021-03-16
Substrate Processing Apparatus App 20210074558 - NAM; Sang Ki ; et al.	2021-03-11
Hollow Cathode, An Apparatus Including A Hollow Cathode For Manufacturing A Semiconductor Device, And A Method Of Manufacturing A Semiconductor Device Using A Hollow Cathode App 20210057193 - NAM; SANG KI ; et al.	2021-02-25
RF sensing apparatus of plasma processing chamber and plasma processing chamber including same Grant 10,901,007 - Kim , et al. January 26, 2	2021-01-26
Method of manufacturing integrated circuit device Grant 10,795,262 - Park , et al. October 6, 2	2020-10-06
Multi Zone Gas Injection Upper Electrode System App 20200243307 - Bise; Ryan ; et al.	2020-07-30
Peripheral Rf Feed And Symmetric Rf Return For Symmetric Rf Delivery App 20200161097 - Nam; Sang Ki ; et al.	2020-05-21
Multi zone gas injection upper electrode system Grant 10,622,195 - Bise , et al.	2020-04-14
Peripheral RF feed and symmetric RF return for symmetric RF delivery Grant 10,586,686 - Nam , et al.	2020-03-10
Rf Sensing Apparatus Of Plasma Processing Chamber And Plasma Processing Chamber Including Same App 20200072874 - KIM; YOUNG DO ; et al.	2020-03-05
Cleaning Solution Production Systems And Methods, And Plasma Reaction Tanks App 20200035515 - YOO; Beom Jin ; et al.	2020-01-30
Plasma Generator, Cleaning Liquid Processing Apparatus, Semiconductor Device Cleaning Apparatus, Cleaning Liquid Processing Meth App 20200020551 - YOO; Beom Jin ; et al.	2020-01-16
Plasma processing system, electron beam generator, and method of fabricating semiconductor device Grant 10,522,332 - Lee , et al. Dec	2019-12-31
Method Of Manufacturing Integrated Circuit Device App 20190287792 - PARK; Jin ; et al.	2019-09-19
Plasma Processing System, Electron Beam Generator, And Method Of Fabricating Semiconductor Device App 20190279846 - LEE; Yeongkwang ; et al.	2019-09-12
Plasma processing apparatus and method, and method of manufacturing semiconductor device using the same Grant 10,410,874 - Yoo , et al. Sept	2019-09-10
Plasma processing system, electron beam generator, and method of fabricating semiconductor device Grant 10,347,468 - Lee , et al. July 9, 2	2019-07-09
Method Of Forming Nanorod Structure And Method Of Forming Semiconductor Device Using The Same App 20190181020 - JEON; Byeong Hwan ; et al.	2019-06-13
Plasma Processing System, Electron Beam Generator, And Method Of Fabricating Semiconductor Device App 20190122860 - LEE; YEONGKWANG ; et al.	2019-04-25
Plasma Processing Apparatus and Method of Manufacturing Semiconductor Device Using the Same App 20190122866 - Nam; Sang Ki ; et al.	2019-04-25
Hollow Cathode, An Apparatus Including A Hollow Cathode For Manufacturing A Semiconductor Device, And A Method Of Manufacturing A Semiconductor Device Using A Hollow Cathode App 20190122867 - Nam; Sang Ki ; et al.	2019-04-25
Plasma Processing Apparatus, Plasma Processing Method And Method Of Manufacturing Semiconductor Device Using The Same App 20190096636 - NAM; Sang Ki ; et al.	2019-03-28
Plasma Processing Apparatus and Method, and Method of Manufacturing Semiconductor Device Using the Same App 20190035606 - Yoo; Beom Jin ; et al.	2019-01-31
Field guided post exposure bake application for photoresist microbridge defects Grant 10,048,589 - Godet , et al. August 14, 2	2018-08-14
Resist sensitivity and profile improvement via acid anion control during field-guided post exposure bake Grant 9,996,006 - Ouyang , et al. June 12, 2	2018-06-12
Resist Sensitivity And Profile Improvement Via Acid Anion Control During Field-guided Post Exposure Bake App 20180107117 - OUYANG; Christine Y. ; et al.	2018-04-19
Resist sensitivity and profile improvement via acid anion control during field-guided post exposure bake Grant 9,927,709 - Ouyang , et al. March 27, 2	2018-03-27
Field Guided Post Exposure Bake Application For Photoresist Microbridge Defects App 20180046085 - GODET; Ludovic ; et al.	2018-02-15
Laser annealing and electric field Grant 9,864,276 - Ouyang , et al. January 9, 2	2018-01-09
Ion To Neutral Control For Wafer Processing With Dual Plasma Source Reactor App 20180005852 - Dhindsa; Rajinder ; et al.	2018-01-04
Immersion field guided exposure and post-exposure bake process Grant 9,829,790 - Buchberger, Jr. , et al. November 28, 2	2017-11-28
Field guided post exposure bake application for photoresist microbridge defects Grant 9,823,570 - Godet , et al. November 21, 2	2017-11-21
Ion to neutral control for wafer processing with dual plasma source reactor Grant 9,793,126 - Dhindsa , et al. October 17, 2	2017-10-17
Tooling configuration for electric/magnetic field guided acid profile control in a photoresist layer Grant 9,733,579 - Nam , et al. August 15, 2	2017-08-15
Ion To Neutral Control For Wafer Processing With Dual Plasma Source Reactor App 20170213747 - Dhindsa; Rajinder ; et al.	2017-07-27
Atomic Layer Etching System With Remote Plasma Source And Dc Electrode App 20170200587 - GODET; Ludovic ; et al.	2017-07-13
Resist Sensitivity And Profile Improvement Via Acid Anion Control During Field-guided Post Exposure Bake App 20170184976 - OUYANG; Christine Y. ; et al.	2017-06-29
Plasma uniformity control by arrays of unit cell plasmas Grant 9,528,185 - Nam , et al. December 27, 2	2016-12-27
Immersion Field Guided Exposure And Post-exposure Bake Process App 20160357107 - BUCHBERGER, JR.; Douglas A. ; et al.	2016-12-08
Guard aperture to control ion angular distribution in plasma processing Grant 9,514,918 - Nam , et al. December 6, 2	2016-12-06
Material modification by neutral beam source with selected collision angle Grant 9,480,140 - Nam , et al. October 25, 2	2016-10-25
Laser Annealing And Electric Field App 20160299435 - OUYANG; Christine Y. ; et al.	2016-10-13
Field Guided Post Exposure Bake Application For Photoresist Microbridge Defects App 20160291476 - GODET; Ludovic ; et al.	2016-10-06
Heat transfer plate for a showerhead electrode assembly of a capacitively coupled plasma processing apparatus Grant 9,396,910 - Nam , et al. July 19, 2	2016-07-19
System, Method and Apparatus for Generating Pressure Pulses in Small Volume Confined Process Reactor App 20160204007 - Dhindsa; Rajinder ; et al.	2016-07-14
Material Modification By Neutral Beam Source With Selected Collision Angle App 20160148713 - Nam; Sang Ki ; et al.	2016-05-26
System, method and apparatus for generating pressure pulses in small volume confined process reactor Grant 9,330,927 - Dhindsa , et al. May 3, 2	2016-05-03
Tooling Configuration For Electric/magnetic Field Guided Acid Profile Control In A Photoresist Layer App 20160109813 - NAM; Sang Ki ; et al.	2016-04-21
Guard Aperture To Control Ion Angular Distribution In Plasma Processing App 20160093409 - NAM; Sang Ki ; et al.	2016-03-31
Heat Transfer Plate For A Showerhead Electrode Assembly Of A Capacitively Coupled Plasma Processing Apparatus App 20160079041 - NAM; Sang Ki ; et al.	2016-03-17
Plasma Uniformity Control By Arrays Of Unit Cell Plasmas App 20160053376 - NAM; Sang Ki ; et al.	2016-02-25
Dual zone temperature control of upper electrodes Grant 9,263,240 - Marakhtanov , et al. February 16, 2	2016-02-16
Neutral beam source with plasma sheath-shaping neutralization grid Grant 9,253,868 - Nam , et al. February 2, 2	2016-02-02
Showerhead electrode assembly in a capacitively coupled plasma processing apparatus Grant 9,245,718 - Nam , et al. January 26, 2	2016-01-26
Methods and apparatus for correcting for non-uniformity in a plasma processing system Grant 9,230,779 - Nam , et al. January 5, 2	2016-01-05
Showerhead Electrode Assembly In A Capacitively Coupled Plasma Processing Apparatus App 20150194291 - Nam; Sang Ki ; et al.	2015-07-09
Showerhead electrode assembly in a capacitively coupled plasma processing apparatus Grant 9,018,022 - Nam , et al. April 28, 2	2015-04-28
Ion To Neutral Control For Wafer Processing With Dual Plasma Source Reactor App 20150083582 - Dhindsa; Rajinder ; et al.	2015-03-26
System, Method and Apparatus for Generating Pressure Pulses in Small Volume Confined Process Reactor App 20150064920 - Dhindsa; Rajinder ; et al.	2015-03-05
Methods for Selectively Modifying RF Current Paths in a Plasma Processing System App 20150053644 - Nam; Sang Ki ; et al.	2015-02-26
Methods and apparatus for selectively modifying RF current paths in a plasma processing system Grant 8,911,588 - Nam , et al. December 16, 2	2014-12-16
Chuck assembly for plasma processing Grant 8,898,889 - Nam , et al. December 2, 2	2014-12-02
Showerhead Electrode Assembly In A Capacitively Coupled Plasma Processing Apparatus App 20140087488 - Nam; Sang Ki ; et al.	2014-03-27
Methods And Apparatus For Correcting For Non-uniformity In A Plasma Processing System App 20130240145 - Nam; Sang Ki ; et al.	2013-09-19
Methods And Apparatus For Selectively Modulating Azimuthal Non-uniformity In A Plasma Processing System App 20130240147 - Nam; Sang Ki ; et al.	2013-09-19
Methods And Apparatus For Selectively Modifying Rf Current Paths In A Plasma Processing System App 20130240482 - Nam; Sang Ki ; et al.	2013-09-19
Dual Zone Temperature Control Of Upper Electrodes App 20130126476 - Marakhtanov; Alexei ; et al.	2013-05-23
Peripheral Rf Feed And Symmetric Rf Return With Rf Strap Input App 20130127124 - Nam; Sang Ki ; et al.	2013-05-23
Peripheral RF Feed and Symmetric RF Return for Symmetric RF Delivery App 20130128409 - Nam; Sang Ki ; et al.	2013-05-23
Grip for golf club App 20090082128 - Nam; Sang-Ki ; et al.	2009-03-26
Golf Club Grip App 20080102974 - Nam; Sang Ki ; et al.	2008-05-01
Golf club with transparent grip Grant 7,025,690 - Nam April 11, 2	2006-04-11
Golf club with transparent grip App 20050221909 - Nam, Sang-Ki	2005-10-06

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.