Nam; Dong Seok

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nam; Dong Seok.The latest application filed is for "critical dimension measurement system and method of measuring critical dimensions using same".

Company Profile

2.18.19

Nam; Dong Seok - Yongin-si KR
Nam; Dong-Seok - Seoul KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Critical dimension measurement system and method of measuring critical dimensions using same Grant 11,397,380 - Park , et al. July 26, 2	2022-07-26
Critical Dimension Measurement System And Method Of Measuring Critical Dimensions Using Same App 20210055648 - PARK; WON JOO ; et al.	2021-02-25
Critical dimension measurement system and method of measuring critical dimensions using same Grant 10,831,095 - Park , et al. November 10, 2	2020-11-10
Phase shift masks and methods of forming phase shift masks Grant 8,968,970 - Moon , et al. March 3, 2	2015-03-03
Halftone phase shift blank photomasks and halftone phase shift photomasks Grant 8,865,375 - Jang , et al. October 21, 2	2014-10-21
Phase Shift Masks And Methods Of Forming Phase Shift Masks App 20140170534 - MOON; Se-Gun ; et al.	2014-06-19
Electron Beam Exposure Apparatus App 20140145091 - Nam; Dong-Seok	2014-05-29
Reflective extreme ultraviolet mask and method of manufacturing the same Grant 8,568,944 - Kim , et al. October 29, 2	2013-10-29
Method of manufacturing a photomask Grant 8,524,426 - Choi , et al. September 3, 2	2013-09-03
Methods of correcting optical parameters in photomasks Grant 8,435,705 - Han , et al. May 7, 2	2013-05-07
Halftone Phase Shift Blank Photomasks and Halftone Phase Shift Photomasks App 20130101926 - Jang; Il-Yong ; et al.	2013-04-25
Phase shift masks Grant 8,361,679 - Moon , et al. January 29, 2	2013-01-29
Methods of fabricating halftone phase shift blank photomasks and halftone phase shift photomasks Grant 8,329,363 - Jang , et al. December 11, 2	2012-12-11
Reflective Extreme Ultraviolet Mask And Method Of Manufacturing The Same App 20120237860 - KIM; Hoon ; et al.	2012-09-20
Method Of Manufacturing A Photomask App 20120214092 - CHOI; Jin ; et al.	2012-08-23
Method for correcting a position error of lithography apparatus Grant 8,187,778 - Choi , et al. May 29, 2	2012-05-29
Methods of Correcting Optical Parameters in Photomasks App 20110244374 - Han; Haek-seung ; et al.	2011-10-06
Exposure equipment having auxiliary photo mask and exposure method using the same Grant 7,956,983 - Nam June 7, 2	2011-06-07
Methods of Fabricating Halftone Phase Shift Blank Photomasks and Halftone Phase Shift Photomasks App 20110104591 - Jang; Il-Yong ; et al.	2011-05-05
Phase Shift Masks App 20110086296 - Moon; Se-Gun ; et al.	2011-04-14
Method for correcting a position error of lithography apparatus App 20100209831 - Choi; Jin ; et al.	2010-08-19
Method of maintaining mask for semiconductor process App 20090239158 - Woo; Sang-Gyun ; et al.	2009-09-24
Exposure apparatus and method of exposing a semiconductor substrate App 20090059197 - Nam; Dong-seok ; et al.	2009-03-05
Photolithography Apparatus Having Mirror for Correcting Aberrations in Optical Illumination System and Mirror Having Aberration Correcting Part App 20080062397 - Nam; Dong-seok ; et al.	2008-03-13
Exposure equipment having auxiliary photo mask and exposure method using the same App 20070148561 - Nam; Dong-Seok	2007-06-28
Methods of forming patterns using phase change material and methods for removing the same App 20070054493 - Nam; Dong-seok	2007-03-08
Optical system for providing a hexapole illumination and method of forming a photoresist pattern on a substrate using the same Grant 7,139,064 - Nam , et al. November 21, 2	2006-11-21
Template, method of forming the template and method of forming a pattern on a semiconductor device using the template App 20050158637 - Kim, Jin-Ah ; et al.	2005-07-21
Optical system for providing a hexapole illumination and method of forming a photoresist pattern on a substrate using the same App 20050105072 - Nam, Dong-Seok ; et al.	2005-05-19
Semiconductor device having self-aligned contact pads and method for manufacturing the same Grant 6,835,970 - Nam , et al. December 28, 2	2004-12-28
Method of forming fine patterns of semiconductor device Grant 6,723,607 - Nam , et al. April 20, 2	2004-04-20
Method of forming fine patterns of semiconductor device App 20030230234 - Nam, Dong-Seok ; et al.	2003-12-18
Semiconductor device having self-aligned contact pads and method for manufacturing the same App 20030032219 - Nam, Dong-Seok ; et al.	2003-02-13

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