Patent | Date |
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Method and apparatus for cleaning semiconductor wafers Grant 11,342,204 - Nam , et al. May 24, 2 | 2022-05-24 |
Semiconductor Device And Method For Fabricating The Same App 20220102354 - NAM; CHANG-HYEON ;   et al. | 2022-03-31 |
Semiconductor device and method for fabricating the same Grant 11,233,058 - Nam , et al. January 25, 2 | 2022-01-25 |
Semiconductor device and method for fabricating the same Grant 11,164,874 - Nam , et al. November 2, 2 | 2021-11-02 |
Semiconductor structure and method for fabricating the same Grant 11,081,489 - Nam , et al. August 3, 2 | 2021-08-03 |
Semiconductor Structure And Method Of Forming Thereof App 20210217652 - NAM; CHANG-HYEON ;   et al. | 2021-07-15 |
Semiconductor device and method for fabricating the same Grant 11,031,476 - Nam , et al. June 8, 2 | 2021-06-08 |
Semiconductor Structure And Method For Fabricating The Same App 20210143157 - NAM; CHANG-HYEON ;   et al. | 2021-05-13 |
Semiconductor device and method for fabricating the same Grant 10,964,703 - Nam , et al. March 30, 2 | 2021-03-30 |
Semiconductor Device And Method For Fabricating The Same App 20200219984 - NAM; CHANG-HYEON ;   et al. | 2020-07-09 |
Semiconductor Device And Method For Fabricating The Same App 20200219883 - NAM; CHANG-HYEON ;   et al. | 2020-07-09 |
Semiconductor Device And Method For Fabricating The Same App 20200219882 - NAM; CHANG-HYEON ;   et al. | 2020-07-09 |
Apparatus And System For Filtrating Liquid App 20200215466 - CHOI; SANGYONG ;   et al. | 2020-07-09 |
Method And Apparatus For Cleaning Semiconductor Wafers App 20200203193 - NAM; CHANG-HYEON ;   et al. | 2020-06-25 |
Semiconductor Device And Method For Fabricating The Same App 20200203349 - NAM; CHANG-HYEON ;   et al. | 2020-06-25 |
Apparatus And System For Wafer Spin Process App 20200203209 - SHIN; Gil-Sung ;   et al. | 2020-06-25 |
System And Method For Fluid Preparation App 20200197882 - NAM; CHANG-HYEON ;   et al. | 2020-06-25 |
Substrate dryer and a drying method Grant 7,887,636 - Nam , et al. February 15, 2 | 2011-02-15 |
Semiconductor devices having a trench in a side portion of a conducting line pattern and methods of forming the same Grant 7,811,921 - Nam , et al. October 12, 2 | 2010-10-12 |
Semiconductor Devices Having A Trench In A Side Portion Of A Conducting Line Pattern And Methods Of Forming The Same App 20090215257 - Nam; Chang-Hyeon ;   et al. | 2009-08-27 |
Semiconductor devices having a trench in a side portion of a conducting line pattern and methods of forming the same Grant 7,545,046 - Nam , et al. June 9, 2 | 2009-06-09 |
Apparatus for cleaning semiconductor wafers Grant 7,255,115 - Kwon , et al. August 14, 2 | 2007-08-14 |
Apparatus and method for treating edge of substrate Grant 7,166,183 - Nam , et al. January 23, 2 | 2007-01-23 |
Method of and apparatus for heating liquid used in the manufacturing of semiconductor devices, and method of processing substrates with heated liquid App 20060169300 - Ahn; Duk-Min ;   et al. | 2006-08-03 |
Substrate dryer and a drying method App 20060151006 - Nam; Chang-Hyeon ;   et al. | 2006-07-13 |
Semiconductor devices having a trench in a side portion of a conducting line pattern and methods of forming the same App 20060097390 - Nam; Chang-Hyeon ;   et al. | 2006-05-11 |
Cleaning method and cleaning apparatus for performing the same App 20060076034 - Nam; Chang-Hyeon ;   et al. | 2006-04-13 |
Cleaning method and cleaning apparatus for performing the same Grant 6,983,755 - Nam , et al. January 10, 2 | 2006-01-10 |
Apparatus for cleaning semiconductor wafers App 20040000330 - Kwon, Young-Min ;   et al. | 2004-01-01 |
Cleaning method and cleaning apparatus for performing the same App 20030098040 - Nam, Chang-Hyeon ;   et al. | 2003-05-29 |
Apparatus for cleaning wafers App 20030079763 - Nam, Chang-Hyeon | 2003-05-01 |