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Method of etching a metal layer using a mask, a metallization method for a semiconductor device, a method of etching a metal layer, and an etching gas
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Semiconductor memory device having self-aligned contacts and method of fabricating the same
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Method of forming capacitor for semiconductor device
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Semiconductor device having transistor and method of manufacturing the same
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Methods of manufacturing integrated circuit devices having reduced contact resistance between a substrate and a contact pad while maintaining separation of the substrate and the contact pad and integrated circuit devices formed thereby
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Methods of forming capacitor electrodes using fluorine and oxygen
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Semiconductor memory device having multi-layered storage node contact plug and method for fabricating the same
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Methods of forming field effect transistors having recessed channel regions
App 20050266648 - Chung, Sung-hoon ; et al. | 2005-12-01 |
Method of forming capacitor for semiconductor device
App 20050245026 - Kim, Dong-Chan ; et al. | 2005-11-03 |
Methods of fabricating integrated circuit devices providing improved short prevention
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Semiconductor memory device having self-aligned contacts and method of fabricating the same
App 20050167758 - Ahn, Tae-hyuk ; et al. | 2005-08-04 |
Methods of forming capacitor structures including L-shaped cavities and related structures
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Semiconductor memory device having self-aligned contacts and method of fabricating the same
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Methods of fabricating integrated circuit devices providing improved short prevention
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Methods of manufacturing integrated circuit devices having reduced contact resistance between a substrate and a contact pad while maintaining separation of the substrate and the contact pad and integrated circuit devices formed thereby
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Methods of fabricating integrated circuit devices providing improved short prevention
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Semiconductor memory device having multi-layered storage node contact plug and method for fabricating the same
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Method of etching a metal layer using a mask, a metallization method for a semiconductor device, a method of etching a metal layer, and an etching gas
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Methods of manufacturing integrated circuit devices having reduced contact resistance between a substrate and a contact pad while maintaining separation of the substrate and the contact pad
Grant 6,689,654 - Kim , et al. February 10, 2 | 2004-02-10 |
Semiconductor memory device having self-aligned contact and fabricating method thereof
Grant 6,682,975 - Kim , et al. January 27, 2 | 2004-01-27 |
Integrated circuit devices providing improved short prevention
Grant 6,680,511 - Kim , et al. January 20, 2 | 2004-01-20 |
Semiconductor memory device having multilayered storage node contact plug and method for fabricating the same
Grant 6,664,585 - Jin , et al. December 16, 2 | 2003-12-16 |
Semiconductor device having transistor and method of manufacturing the same
App 20030197229 - Jin, Beom-jun ; et al. | 2003-10-23 |
Semiconductor device having transistor
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Methods for forming conductive contact body for integrated circuits using dummy dielectric layer
Grant 6,573,168 - Kim , et al. June 3, 2 | 2003-06-03 |
Semiconductor memory device having self-aligned contact and fabricating method thereof
Grant 6,573,551 - Kim , et al. June 3, 2 | 2003-06-03 |
Semiconductor Device Having Transistor
App 20020175385 - Jin, Beom-Jun ; et al. | 2002-11-28 |
Integrated circuit devices providing improved short prevention and methods of fabricating the same
App 20020096711 - Kim, Hyoung-Joon ; et al. | 2002-07-25 |
Semiconductor memory device having multilayered storage node contact plug and method for fabricating the same
App 20020093035 - Jin, Beom-jun ; et al. | 2002-07-18 |
Methods of manufacturing integrated circuit devices having reduced contact resistance between a substrate and a contact pad while maintaining separation of the substrate and the contact pad and integrated circuit devices formed thereby
App 20020090786 - Kim, Young-Pil ; et al. | 2002-07-11 |
Semiconductor memory device having self-aligned contact and fabricating method thereof
App 20020055222 - Kim, Myeong-Cheol ; et al. | 2002-05-09 |
Method for forming conductive contact of semiconductor device
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Semiconductor memory device having self-aligned contacts and method of fabricating the same
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Semiconductor device having self-aligned contact and fabricating method therefor
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Method of manufacturing self-aligned contact hole
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Methods for forming patterned platinum layers using masking layers including titanium and related structures
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Methods of etching platinum group metal film and forming lower electrode of capacitor
Grant 6,169,009 - Ju , et al. January 2, 2 | 2001-01-02 |
Method for etching Pt film of semiconductor device
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