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Semiconductor device and method of manufacturing semiconductor device Grant 11,264,240 - Iguchi , et al. March 1, 2 | 2022-03-01 |
Semiconductor device and method of manufacturing semiconductor device Grant 11,245,010 - Yoshida , et al. February 8, 2 | 2022-02-08 |
Silicon carbide semiconductor device and method for manufacturing the same Grant 11,069,779 - Iguchi , et al. July 20, 2 | 2021-07-20 |
Semiconductor Device And Method Of Manufacturing Semiconductor Device App 20210111248 - YOSHIDA; Kosuke ;   et al. | 2021-04-15 |
Doping system, doping method and method for manufacturing silicon carbide semiconductor device Grant 10,727,060 - Iguchi , et al. | 2020-07-28 |
Impurity adding apparatus, impurity adding method, and semiconductor element manufacturing method Grant 10,658,183 - Iguchi , et al. | 2020-05-19 |
Semiconductor Device And Method Of Manufacturing Semiconductor Device App 20200066528 - IGUCHI; Kenichi ;   et al. | 2020-02-27 |
Method of manufacturing semiconductor device by removing a bulk layer to expose an epitaxial-growth layer and by removing portions of a supporting-substrate to expose portions of the epitaxial-growth layer Grant 10,559,664 - Iguchi , et al. Feb | 2020-02-11 |
Silicon Carbide Semiconductor Device And Method For Manufacturing The Same App 20190371893 - IGUCHI; Kenichi ;   et al. | 2019-12-05 |
Method of manufacturing semiconductor device Grant 10,453,687 - Iguchi , et al. Oc | 2019-10-22 |
Doping System, Doping Method And Method For Manufacturing Silicon Carbide Semiconductor Device App 20190228971 - IGUCHI; Kenichi ;   et al. | 2019-07-25 |
Semiconductor device and method of manufacturing semiconductor device Grant 10,205,010 - Muramatsu , et al. Feb | 2019-02-12 |
Method Of Manufacturing Semiconductor Device App 20190019679 - IGUCHI; Kenichi ;   et al. | 2019-01-17 |
Method of manufacturing semiconductor device Grant 10,115,587 - Nakazawa , et al. October 30, 2 | 2018-10-30 |
Manufacturing method of semiconductor device having a voltage resistant structure Grant 10,109,501 - Yoshikawa , et al. October 23, 2 | 2018-10-23 |
Semiconductor Device And Method Of Manufacturing Semiconductor Device App 20180269314 - MURAMATSU; Toru ;   et al. | 2018-09-20 |
Semiconductor device and method of producing the same Grant 10,068,998 - Nemoto , et al. September 4, 2 | 2018-09-04 |
Semiconductor device and method of manufacturing semiconductor device Grant 10,026,831 - Muramatsu , et al. July 17, 2 | 2018-07-17 |
Method for forming metal-semiconductor alloy using hydrogen plasma Grant 9,972,499 - Nakazawa , et al. May 15, 2 | 2018-05-15 |
Semiconductor device having schottky junction between substrate and drain electrode Grant 9,905,684 - Nakazawa , et al. February 27, 2 | 2018-02-27 |
Semiconductor device manufacturing method Grant 9,892,919 - Nakazawa , et al. February 13, 2 | 2018-02-13 |
Semiconductor Device And Manufacturing Method Of Semiconductor Device App 20180006125 - YOSHIKAWA; Koh ;   et al. | 2018-01-04 |
Method of manufacturing silicon carbide semiconductor device including forming an electric field control region by a laser doping technology Grant 9,825,145 - Yoshikawa , et al. November 21, 2 | 2017-11-21 |
Semiconductor device having a voltage resistant structure Grant 9,786,749 - Yoshikawa , et al. October 10, 2 | 2017-10-10 |
Semiconductor Device And Method Of Manufacturing Semiconductor Device App 20170278931 - IGUCHI; Kenichi ;   et al. | 2017-09-28 |
Semiconductor Device And Manufacturing Method Of Semiconductor Device App 20170148882 - YOSHIKAWA; Koh ;   et al. | 2017-05-25 |
Method for doping impurities, method for manufacturing semiconductor device Grant 9,659,775 - Ikeda , et al. May 23, 2 | 2017-05-23 |
Impurity introducing method, impurity introducing apparatus, and method of manufacturing semiconductor element Grant 9,659,774 - Nakazawa , et al. May 23, 2 | 2017-05-23 |
Semiconductor Device And Method Of Manufacturing Semiconductor Device App 20170054008 - MURAMATSU; Toru ;   et al. | 2017-02-23 |
Method of manufacturing a semiconductor device Grant 9,564,334 - Iguchi , et al. February 7, 2 | 2017-02-07 |
Method of manufacturing a semiconductor device Grant 9,548,205 - Nakazawa , et al. January 17, 2 | 2017-01-17 |
Method Of Manufacturing Silicon Carbide Semiconductor Device App 20160315169 - YOSHIKAWA; Koh ;   et al. | 2016-10-27 |
Impurity Adding Apparatus, Impurity Adding Method, And Semiconductor Element Manufacturing Method App 20160284547 - IGUCHI; Kenichi ;   et al. | 2016-09-29 |
Method for manufacturing a silicon semiconductor substrate including a diffusion layer prior to forming a semiconductor device thereon Grant 9,450,070 - Teranishi , et al. September 20, 2 | 2016-09-20 |
Method for producing semiconductor device Grant 9,431,270 - Nakazawa , et al. August 30, 2 | 2016-08-30 |
Method For Doping Impurities, Method For Manufacturing Semiconductor Device, And Semiconductor Device App 20160247681 - IKEDA; Akihiro ;   et al. | 2016-08-25 |
Method of manufacturing a semiconductor device Grant 9,418,852 - Nakazawa , et al. August 16, 2 | 2016-08-16 |
Method Of Manufacturing A Semiconductor Device App 20160189968 - NAKAZAWA; Haruo ;   et al. | 2016-06-30 |
Method Of Manufacturing A Semiconductor Device App 20160189969 - IGUCHI; Kenichi ;   et al. | 2016-06-30 |
Method Of Manufacturing Semiconductor Device App 20160189967 - NAKAZAWA; Haruo ;   et al. | 2016-06-30 |
Impurity Introducing Method, Impurity Introducing Apparatus, And Method Of Manufacturing Semiconductor Element App 20160005606 - NAKAZAWA; Haruo ;   et al. | 2016-01-07 |
Semiconductor Device Manufacturing Method App 20150214053 - NAKAZAWA; Haruo ;   et al. | 2015-07-30 |
Semiconductor Device Having Schottky Junction Between Substrate And Drain Electrode App 20150179784 - NAKAZAWA; Haruo ;   et al. | 2015-06-25 |
Semiconductor device Grant 9,018,633 - Wakimoto , et al. April 28, 2 | 2015-04-28 |
Semiconductor device manufacturing method Grant 8,999,768 - Nakazawa , et al. April 7, 2 | 2015-04-07 |
Method of manufacturing semiconductor device by mounting and positioning a semiconductor die using detection marks Grant 8,962,405 - Nakajima , et al. February 24, 2 | 2015-02-24 |
Method For Manufacturing Semiconductor Device App 20150031175 - TERANISHI; Hideaki ;   et al. | 2015-01-29 |
Method For Producing Semiconductor Device App 20140377938 - NAKAZAWA; Haruo ;   et al. | 2014-12-25 |
Semiconductor Device And Manufacturing Method Thereof App 20140327041 - SHIMOYAMA; Kazuo ;   et al. | 2014-11-06 |
Method for manufacturing reverse-blocking semiconductor element Grant 8,853,009 - Nakazawa October 7, 2 | 2014-10-07 |
Reverse block-type insulated gate bipolar transistor manufacturing method Grant 8,809,130 - Nakazawa , et al. August 19, 2 | 2014-08-19 |
Semiconductor device Grant 8,759,870 - Nakazawa , et al. June 24, 2 | 2014-06-24 |
Semiconductor device and manufacturing method thereof Grant 8,697,558 - Nakazawa , et al. April 15, 2 | 2014-04-15 |
Semiconductor device and method of manufacturing the same Grant 8,692,350 - Nakazawa , et al. April 8, 2 | 2014-04-08 |
Semiconductor Device App 20140061672 - WAKIMOTO; Hiroki ;   et al. | 2014-03-06 |
Semiconductor Device Manufacturing Method And Semiconductor Device App 20140001487 - Nakazawa; Haruo ;   et al. | 2014-01-02 |
Reverse Block-type Insulated Gate Bipolar Transistor Manufacturing Method App 20130344663 - NAKAZAWA; Haruo ;   et al. | 2013-12-26 |
Method For Manufacturing Reverse-blocking Semiconductor Element App 20130295729 - Nakazawa; Haruo | 2013-11-07 |
Method Of Manufacturing Semiconductor Device App 20130260540 - Nakazawa; Haruo ;   et al. | 2013-10-03 |
Method Of Manufacturing Semiconductor Device App 20130196457 - NAKAJIMA; Tsunehiro ;   et al. | 2013-08-01 |
Reverse block-type insulated gate bipolar transistor manufacturing method Grant 8,460,975 - Nakazawa , et al. June 11, 2 | 2013-06-11 |
Method for manufacturing semiconductor device Grant 8,420,512 - Nakazawa April 16, 2 | 2013-04-16 |
Method For Manufacturing Semiconductor Device App 20120329257 - NAKAZAWA; Haruo | 2012-12-27 |
Semiconductor Device And Manufacturing Method Thereof App 20120184083 - SHIMOYAMA; Kazuo ;   et al. | 2012-07-19 |
Semiconductor Device And Method Of Manufacturing The Same App 20120098085 - NAKAZAWA; Haruo ;   et al. | 2012-04-26 |
Semiconductor device and manufacturing method of the semiconductor device Grant 8,138,542 - Yoshikawa , et al. March 20, 2 | 2012-03-20 |
Semicondcutor Device And Method Of Producing The Same App 20120064706 - NEMOTO; Michio ;   et al. | 2012-03-15 |
Semiconductor device and manufacturing method thereof Grant 8,119,496 - Shimoyama , et al. February 21, 2 | 2012-02-21 |
Method Of Manufacturing A Semiconductor Device App 20110318910 - NAKAZAWA; Haruo ;   et al. | 2011-12-29 |
Semiconductor device and method of producing the same Grant 8,084,814 - Nemoto , et al. December 27, 2 | 2011-12-27 |
Reverse Block-type Insulated Gate Bipolar Transistor Manufacturing Method App 20110207267 - NAKAZAWA; Haruo ;   et al. | 2011-08-25 |
Semiconductor Device And Manufacturing Method Thereof App 20110081752 - SHIMOYAMA; Kazuo ;   et al. | 2011-04-07 |
Semiconductor Device App 20100264455 - NAKAZAWA; Haruo ;   et al. | 2010-10-21 |
Method of manufacturing semiconductor element Grant 7,807,554 - Nakazawa October 5, 2 | 2010-10-05 |
Semiconductor device and manufacturing method thereof Grant 7,776,672 - Nakazawa , et al. August 17, 2 | 2010-08-17 |
Method For Manufacturing Semiconductor Device App 20100173476 - Nakazawa; Haruo | 2010-07-08 |
Semiconductor device and manufacturing method thereof Grant 7,741,192 - Shimoyama , et al. June 22, 2 | 2010-06-22 |
Semiconductor Device And Manufacturing Method Thereof App 20100093164 - NAKAZAWA; Haruo ;   et al. | 2010-04-15 |
Semiconductor Device And Manufacturing Method Of The Semiconductor Device App 20090206398 - YOSHIKAWA; Koh ;   et al. | 2009-08-20 |
Semiconductor Device And Method Of Producing The Same App 20090184340 - NEMOTO; Michio ;   et al. | 2009-07-23 |
Semiconductor device and manufacturing method of the semiconductor device Grant 7,535,059 - Yoshikawa , et al. May 19, 2 | 2009-05-19 |
Method of manufacturing semiconductor device and semiconductor device formed by the method Grant 7,517,777 - Nemoto , et al. April 14, 2 | 2009-04-14 |
Method of manufacturing semiconductor element App 20080227277 - Nakazawa; Haruo | 2008-09-18 |
Semiconductor Device And Manufacturing Method Of The Semiconductor Device App 20070158740 - Yoshikawa; Koh ;   et al. | 2007-07-12 |
Method Of Manufacturing Semiconductor Device And Semiconductor Device Formed By The Method App 20070048982 - NEMOTO; Michio ;   et al. | 2007-03-01 |
Method of manufacturing semiconductor element Grant 7,135,387 - Nakazawa , et al. November 14, 2 | 2006-11-14 |
Semiconductor device and manufacturing method thereof App 20060249797 - Nakazawa; Haruo ;   et al. | 2006-11-09 |
Semiconductor device and manufacturing method thereof App 20060038206 - Shimoyama; Kazuo ;   et al. | 2006-02-23 |
Method of manufacturing semiconductor element App 20050059263 - Nakazawa, Haruo ;   et al. | 2005-03-17 |