Nakayama; Youichi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nakayama; Youichi.The latest application filed is for "substrate processing apparatus".

Company Profile

0.7.5

Nakayama; Youichi - Nirasaki JP
NAKAYAMA; Youichi - Nirasaki City JP
Nakayama; Youichi - Yamanashi N/A JP
Nakayama; Youichi - Nirasaki-Shi JP
Nakayama; Youichi - Nirasaki Yamanashi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate processing apparatus Grant 9,766,617 - Ogawa , et al. September 19, 2	2017-09-19
Method of lowering temperature of substrate table, computer-readable storage medium, and substrate processing system Grant 9,070,728 - Kobayashi , et al. June 30, 2	2015-06-30
Substrate Processing Apparatus App 20140121814 - OGAWA; Junichi ; et al.	2014-05-01
Target object processing system and method of controlling the same Grant 8,612,038 - Kobayashi , et al. December 17, 2	2013-12-17
Method Of Lowering Temperature Of Substrate Table, Computer-readable Storage Medium, And Substrate Processing System App 20110114298 - KOBAYASHI; Kenichi ; et al.	2011-05-19
Target Object Processing System And Method Of Controlling The Same App 20100292809 - Kobayashi; Kenichi ; et al.	2010-11-18
Capacitive coupling plasma processing apparatus and method Grant 7,692,916 - Matsumoto , et al. April 6, 2	2010-04-06
Substrate processing apparatus, history information recording method, history information recording program, and history information recording system Grant 7,266,418 - Nakayama , et al. September 4, 2	2007-09-04
Capacitive coupling plasma processing apparatus and method App 20070029194 - Matsumoto; Naoki ; et al.	2007-02-08
Substrate processing apparatus, history information recording method, history information recording program, and history information recording system App 20060224265 - Nakayama; Youichi ; et al.	2006-10-05

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