loadpatents
Patent applications and USPTO patent grants for Nakayama; Ichiro.The latest application filed is for "non-plasma dry etching apparatus".
Patent | Date |
---|---|
Plasma processing apparatus and plasma processing method Grant 10,115,565 - Okumura , et al. October 30, 2 | 2018-10-30 |
Roller Grant 9,896,286 - Nakayama , et al. February 20, 2 | 2018-02-20 |
Silicon substrate having textured surface, and process for producing same Grant 9,397,242 - Taniguchi , et al. July 19, 2 | 2016-07-19 |
Polycrystalline-type solar cell panel and process for production thereof Grant 9,105,803 - Nakayama , et al. August 11, 2 | 2015-08-11 |
Paper discharge guide with protruding part for supporting paper at an angle Grant 8,821,053 - Nakayama September 2, 2 | 2014-09-02 |
Plasma processing method Grant 8,802,567 - Okumura , et al. August 12, 2 | 2014-08-12 |
Silicon substrate having textured surface, solar cell having same, and method for producing same Grant 8,772,067 - Nakayama , et al. July 8, 2 | 2014-07-08 |
Non-plasma Dry Etching Apparatus App 20140166206 - YAMAGUCHI; NAOSHI ;   et al. | 2014-06-19 |
Plasma doping method and plasma doping apparatus Grant 8,709,926 - Okumura , et al. April 29, 2 | 2014-04-29 |
Plasma processing apparatus and plasma processing method Grant 8,703,613 - Okumura , et al. April 22, 2 | 2014-04-22 |
Plasma Processing Method App 20140094040 - OKUMURA; Tomohiro ;   et al. | 2014-04-03 |
Plasma doping method with gate shutter Grant 8,652,953 - Okumura , et al. February 18, 2 | 2014-02-18 |
Silicon Substrate Having Textured Surface, And Process For Producing Same App 20140020750 - Taniguchi; Yasushi ;   et al. | 2014-01-23 |
Plasma processing apparatus and method thereof Grant 8,624,340 - Okumura , et al. January 7, 2 | 2014-01-07 |
Plasma Doping Method And Apparatus App 20130323916 - OKUMURA; Tomohiro ;   et al. | 2013-12-05 |
Transportation guide mechanism and recording device having the same Grant 8,550,734 - Nakayama October 8, 2 | 2013-10-08 |
Plasma Processing Apparatus And Plasma Processing Method App 20130230990 - Okumura; Tomohiro ;   et al. | 2013-09-05 |
Silicon Substrate Having Textured Surface, Solar Cell Having Same, And Method For Producing Same App 20130183791 - Nakayama; Ichiro ;   et al. | 2013-07-18 |
Thin-film Solar Cell And Manufacturing Method Thereof App 20130174898 - SAITOH; Mitsuo ;   et al. | 2013-07-11 |
Polycrystalline Silicon Solar Cell Panel And Manufacturing Method Thereof App 20130160849 - YAMANISHI; HITOSHI ;   et al. | 2013-06-27 |
Plasma doping method and apparatus thereof Grant 8,450,819 - Okumura , et al. May 28, 2 | 2013-05-28 |
Polycrystalline-type Solar Cell Panel And Process For Production Thereof App 20130081694 - Nakayama; Ichiro ;   et al. | 2013-04-04 |
Plasma processing method and apparatus Grant 8,404,573 - Okumura , et al. March 26, 2 | 2013-03-26 |
Plasma Processing Method And Apparatus App 20130022759 - OKUMURA; Tomohiro ;   et al. | 2013-01-24 |
Plasma Processing Apparatus And Plasma Processing Method App 20120325777 - Okumura; Tomohiro ;   et al. | 2012-12-27 |
Plasma Doping Method With Gate Shutter App 20120285818 - OKUMURA; Tomohiro ;   et al. | 2012-11-15 |
Paper Discharge Device, Paper Discharge Method, And Printer App 20120288318 - NAKAYAMA; Ichiro | 2012-11-15 |
Plasma processing method and apparatus Grant 8,288,259 - Okumura , et al. October 16, 2 | 2012-10-16 |
Process For Production Of Silicon Powder, Multi-crystal-type Solar Cell Panel, And Process For Production Of The Solar Cell Panel App 20120227808 - Nakayama; Ichiro ;   et al. | 2012-09-13 |
Plasma doping device with gate shutter Grant 8,257,501 - Okumura , et al. September 4, 2 | 2012-09-04 |
Plasma Doping Method And Apparatus App 20120186519 - Okumura; Tomohiro ;   et al. | 2012-07-26 |
Plasma Doping Method And Apparatus Thereof App 20120115317 - OKUMURA; Tomohiro ;   et al. | 2012-05-10 |
Plasma Processing Apparatus And Method Thereof App 20120058649 - OKUMURA; Tomohiro ;   et al. | 2012-03-08 |
Plasma doping method and apparatus Grant 8,129,202 - Okumura , et al. March 6, 2 | 2012-03-06 |
Plasma Processing Method And Apparatus App 20110081787 - OKUMURA; Tomohiro ;   et al. | 2011-04-07 |
Plasma Doping Method and Plasma Doping Apparatus App 20110065267 - Okumura; Tomohiro ;   et al. | 2011-03-17 |
Plasma doping method and plasma doping apparatus Grant 7,863,168 - Okumura , et al. January 4, 2 | 2011-01-04 |
Method and apparatus of fabricating semiconductor device Grant 7,858,479 - Mizuno , et al. December 28, 2 | 2010-12-28 |
Plasma processing method and apparatus Grant 7,858,537 - Okumura , et al. December 28, 2 | 2010-12-28 |
Plasma processing method and plasma processing apparatus Grant 7,858,155 - Okumura , et al. December 28, 2 | 2010-12-28 |
Method for forming impurity-introduced layer, method for cleaning object to be processed apparatus for introducing impurity and method for producing device Grant 7,759,254 - Sasaki , et al. July 20, 2 | 2010-07-20 |
Plasma Doping Method And Apparatus App 20100098837 - OKUMURA; Tomohiro ;   et al. | 2010-04-22 |
Method of impurity introduction, impurity introduction apparatus and semiconductor device produced with use of the method Grant 7,682,954 - Sasaki , et al. March 23, 2 | 2010-03-23 |
Transportation Guide Mechanism And Recording Device Having Same App 20100051665 - NAKAYAMA; Ichiro | 2010-03-04 |
Method of controlling impurity doping and impurity doping apparatus Grant 7,666,770 - Sasaki , et al. February 23, 2 | 2010-02-23 |
Impurity introducing apparatus and impurity introducing method Grant 7,626,184 - Mizuno , et al. December 1, 2 | 2009-12-01 |
Impurity introducing apparatus and impurity introducing method Grant 7,622,725 - Mizuno , et al. November 24, 2 | 2009-11-24 |
Method and apparatus for plasma processing Grant 7,601,619 - Okumura , et al. October 13, 2 | 2009-10-13 |
Plasma Doping Method and Apparatus App 20090233383 - Okumura; Tomohiro ;   et al. | 2009-09-17 |
Method of doping impurities, and electronic element using the same Grant 7,582,492 - Jin , et al. September 1, 2 | 2009-09-01 |
Method of plasma doping Grant 7,575,987 - Okumura , et al. August 18, 2 | 2009-08-18 |
Plasma Doping Method and Apparatus App 20090181526 - Okumura; Tomohiro ;   et al. | 2009-07-16 |
Plasma Doping Method and Plasma Processing Device App 20090176355 - Okumura; Tomohiro ;   et al. | 2009-07-09 |
Method of introducing impurity, device and element Grant 7,547,619 - Sasaki , et al. June 16, 2 | 2009-06-16 |
Impurity Introducing Apparatus and Impurity Introducing Method App 20090140174 - Mizuno; Bunji ;   et al. | 2009-06-04 |
Plasma Processing Apparatus, Plasma Processing Method, Dielectric Window Used Therein, And Manufacturing Method Of Such A Dielectric Window App 20090130335 - Okumura; Tomohiro ;   et al. | 2009-05-21 |
Plasma processing method and apparatus Grant 7,510,667 - Okumura , et al. March 31, 2 | 2009-03-31 |
Method and Apparatus for Plasma Processing App 20090068769 - Okumura; Tomohiro ;   et al. | 2009-03-12 |
Plasma processing method and apparatus Grant 7,465,407 - Saitoh , et al. December 16, 2 | 2008-12-16 |
Method for introducing impurities Grant 7,456,085 - Sasaki , et al. November 25, 2 | 2008-11-25 |
Plasma Processing Method and Plasma Processing Apparatus App 20080258082 - Okumura; Tomohiro ;   et al. | 2008-10-23 |
Impurity Introducing Apparatus And Impurity Introducing Method App 20080210167 - Mizino; Bunji ;   et al. | 2008-09-04 |
Liquid Phase Etching Method And Liquid Phase Etching Apparatus App 20080196834 - Mizuno; Bunji ;   et al. | 2008-08-21 |
Impurity Introducing Apparatus And Impurity Introducing Method App 20080166861 - Mizuno; Bunji ;   et al. | 2008-07-10 |
Method of Impurity Introduction, Impurity Introduction Apparatus and Semiconductor Device Produced with Use of the Method App 20080142931 - Sasaki; Yuichiro ;   et al. | 2008-06-19 |
Method for Introducing Impurities App 20080146009 - Sasaki; Yuichiro ;   et al. | 2008-06-19 |
Liquid phase etching method and liquid phase etching apparatus Grant 7,378,031 - Mizuno , et al. May 27, 2 | 2008-05-27 |
Method of Doping Impurities, and Electronic Element Using the Same App 20080061292 - Jin; Cheng-Guo ;   et al. | 2008-03-13 |
Foot brake lock Grant D561,666 - Nakayama February 12, 2 | 2008-02-12 |
Method for detection of base sequence of interest Grant 7,294,462 - Nasu , et al. November 13, 2 | 2007-11-13 |
Method And Apparatus Of Fabricating Semiconductor Device App 20070212837 - Mizuno; Bunji ;   et al. | 2007-09-13 |
Plasma processing method and apparatus Grant 7,205,250 - Yanagi , et al. April 17, 2 | 2007-04-17 |
Method and apparatus for plasma doping App 20070074813 - Okumura; Tomohiro ;   et al. | 2007-04-05 |
Plasma processing method and apparatus Grant 7,199,064 - Okumura , et al. April 3, 2 | 2007-04-03 |
Method of plasma doping Grant 7,192,854 - Sasaki , et al. March 20, 2 | 2007-03-20 |
Method of controlling impurity doping and impurity doping apparatus App 20070059848 - Sasaki; Yuichiro ;   et al. | 2007-03-15 |
Apparatus for plasma doping App 20070037367 - Okumura; Tomohiro ;   et al. | 2007-02-15 |
Plasma Doping Method and Plasma Doping Apparatus App 20070026649 - Okumura; Tomohiro ;   et al. | 2007-02-01 |
Plasma processing method and apparatus App 20070020958 - Okumura; Tomohiro ;   et al. | 2007-01-25 |
Method and apparatus for plasma processing Grant 7,135,089 - Okumura , et al. November 14, 2 | 2006-11-14 |
Plasma processing method and apparatus App 20060169673 - Okumura; Tomohiro ;   et al. | 2006-08-03 |
Method of introducing impurity, device and element App 20060088989 - Sasaki; Yuichiro ;   et al. | 2006-04-27 |
Method and apparatus for liquid etching App 20060049140 - Mizuno; Bunji ;   et al. | 2006-03-09 |
Method of plasma doping App 20050287776 - Sasaki, Yuichiro ;   et al. | 2005-12-29 |
Method for detection of base sequence of interest App 20050208502 - Nasu, Hisanori ;   et al. | 2005-09-22 |
Plasma processing method and apparatus App 20050170669 - Okumura, Tomohiro ;   et al. | 2005-08-04 |
Method and apparatus for plasma processing App 20050145340 - Okumura, Tomohiro ;   et al. | 2005-07-07 |
Method and apparatus for plasma processing Grant 6,875,307 - Okumura , et al. April 5, 2 | 2005-04-05 |
Plasma processing method and apparatus App 20050037629 - Yanagi, Yoshihiro ;   et al. | 2005-02-17 |
Method of manufacturing semiconductor device by sputter doping Grant 6,784,080 - Mizuno , et al. August 31, 2 | 2004-08-31 |
Plasma doping method and plasma doping apparatus App 20040149219 - Okumura, Tomohiro ;   et al. | 2004-08-05 |
Plasma processing method and apparatus App 20040129220 - Saitoh, Mitsuo ;   et al. | 2004-07-08 |
Matching circuit and plasma processing apparatus Grant 6,707,253 - Sumida , et al. March 16, 2 | 2004-03-16 |
Plasma processing method and apparatus App 20040045669 - Okumura, Tomohiro ;   et al. | 2004-03-11 |
Apparatus for plasma doping App 20040045507 - Okumura, Tomohiro ;   et al. | 2004-03-11 |
Method and apparatus for plasma doping App 20040036038 - Okumura, Tomohiro ;   et al. | 2004-02-26 |
Method of manufacturing semiconductor devices by sputter-doping App 20030166328 - Mizuno, Bunji ;   et al. | 2003-09-04 |
Matching circuit and plasma processing apparatus App 20030136519 - Sumida, Kenji ;   et al. | 2003-07-24 |
Method and apparatus for plasma processing App 20020079058 - Okumura, Tomohiro ;   et al. | 2002-06-27 |
Method and device for plasma treatment Grant 6,177,646 - Okumura , et al. January 23, 2 | 2001-01-23 |
Method for plasma processing Grant 6,093,457 - Okumura , et al. July 25, 2 | 2000-07-25 |
Apparatus and method for applying RF power apparatus and method for generating plasma and apparatus and method for processing with plasma Grant 6,030,667 - Nakagawa , et al. February 29, 2 | 2000-02-29 |
Thin film forming method and apparatus Grant 5,916,820 - Okumura , et al. June 29, 1 | 1999-06-29 |
Plasma processing method and apparatus Grant 5,888,413 - Okumura , et al. March 30, 1 | 1999-03-30 |
Plasma processing apparatus Grant 5,711,850 - Okumura , et al. January 27, 1 | 1998-01-27 |
Water-repellent surface structure and its fabrication method Grant 5,693,236 - Okumura , et al. December 2, 1 | 1997-12-02 |
Vacuum plasma processing apparatus and method Grant 5,609,690 - Watanabe , et al. March 11, 1 | 1997-03-11 |
Plasma processing apparatus Grant 5,558,722 - Okumura , et al. September 24, 1 | 1996-09-24 |
Plasma generating method and apparatus for generating rotating electrons in the plasma Grant 5,436,424 - Nakayama , et al. July 25, 1 | 1995-07-25 |
Plasma generating method and apparatus Grant 5,424,905 - Nomura , et al. June 13, 1 | 1995-06-13 |
Plasma generating apparatus Grant 5,404,079 - Ohkuni , et al. April 4, 1 | 1995-04-04 |
Method and apparatus for generating highly dense uniform plasma by use of a high frequency rotating electric field Grant 5,332,880 - Kubota , et al. July 26, 1 | 1994-07-26 |
Plasma doping process and apparatus therefor Grant 4,937,205 - Nakayama , et al. June 26, 1 | 1990-06-26 |
Plasma doping method Grant 4,912,065 - Mizuno , et al. March 27, 1 | 1990-03-27 |
Method for preparing dispersions containing antibiotic power Grant 4,906,464 - Yamamoto , et al. March 6, 1 | 1990-03-06 |
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