NAKAYA; Michiko
Patent Applications and Registrations
Patent applications and USPTO patent grants for NAKAYA; Michiko.The latest application filed is for "etching method and plasma processing apparatus".
- NAKAYA; Michiko - Miyagi JP
- Nakaya; Michiko - Kurokawa-gun JP
- Nakaya; Michiko - Nirasaki JP
- NAKAYA; Michiko - Toyama-City JP
- Nakaya; Michiko - Yamanashi JP
- NAKAYA; Michiko - Nirasaki-shi JP
- NAKAYA; Michiko - Nirasaki City JP
| Patent | Date |
|---|---|
| Etching Method And Plasma Processing Apparatus App 20220059361 - NAKAYA; Michiko ; et al. | 2022-02-24 |
| Etching Method And Plasma Processing Apparatus App 20220059360 - Gohira; Taku ; et al. | 2022-02-24 |
| Treatment Method App 20210313187 - ITO; Kiyohito ; et al. | 2021-10-07 |
| Plasma Processing Method App 20210265135 - NAKAYA; Michiko ; et al. | 2021-08-26 |
| Substrate processing method and substrate processing apparatus Grant 10,886,138 - Yang , et al. January 5, 2 | 2021-01-05 |
| Processing method and plasma processing apparatus Grant 10,651,044 - Nakaya , et al. | 2020-05-12 |
| Plasma Processing Method And Plasma Processing Apparatus App 20200032395 - NAKAYA; Michiko ; et al. | 2020-01-30 |
| Semiconductor manufacturing method and plasma processing apparatus Grant 10,504,741 - Nakaya , et al. Dec | 2019-12-10 |
| Substrate Processing Method And Substrate Processing Apparatus App 20190355588 - Yang; Timothy Tianshyun ; et al. | 2019-11-21 |
| Processing Method And Plasma Processing Apparatus App 20180247826 - NAKAYA; Michiko ; et al. | 2018-08-30 |
| Semiconductor Manufacturing Method And Plasma Processing Apparatus App 20180247827 - NAKAYA; Michiko ; et al. | 2018-08-30 |
| Film Deposition Method And Plasma Processing Apparatus App 20180247858 - NAKAYA; Michiko ; et al. | 2018-08-30 |
| Abnormality detection system, abnormality detection method, recording medium, and substrate processing apparatus Grant 8,751,196 - Moriya , et al. June 10, 2 | 2014-06-10 |
| Abnormality Detecting Unit And Abnormality Detecting Method App 20130056154 - NAKAYA; Michiko ; et al. | 2013-03-07 |
| Plasma processing method and computer readable storage medium Grant 8,263,499 - Honda , et al. September 11, 2 | 2012-09-11 |
| Plasma processing apparatus Grant 8,251,011 - Yamazawa , et al. August 28, 2 | 2012-08-28 |
| Abnormality Detection System, Abnormality Detection Method, And Recording Medium App 20120109582 - Moriya; Tsuyoshi ; et al. | 2012-05-03 |
| Processing method and plasma etching method Grant 7,902,078 - Nakaya March 8, 2 | 2011-03-08 |
| Plasma Etching Apparatus And Method App 20100144157 - NAKAYA; Michiko ; et al. | 2010-06-10 |
| Plasma Processing Method And Computer Readable Storage Medium App 20090275207 - HONDA; Masanobu ; et al. | 2009-11-05 |
| Plasma processing apparatus Grant 7,527,016 - Yamazawa , et al. May 5, 2 | 2009-05-05 |
| Plasma Processing Apparatus App 20070236148 - Yamazawa; Yohei ; et al. | 2007-10-11 |
| Plasma Etching Apparatus And Method App 20070202701 - Nakaya; Michiko ; et al. | 2007-08-30 |
| Processing Method And Plasma Etching Method App 20070197041 - NAKAYA; Michiko | 2007-08-23 |
| Plasma processing apparatus App 20040035365 - Yamazawa, Yohei ; et al. | 2004-02-26 |
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