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Patent applications and USPTO patent grants for Nakatsukasa; Katsuyoshi.The latest application filed is for "substrate treatment apparatus".
Patent | Date |
---|---|
Substrate processing method and substrate processing device Grant 7,648,580 - Nakatsukasa , et al. January 19, 2 | 2010-01-19 |
Method of processing substrate and substrate processing apparatus Grant 7,437,834 - Nakatsukasa , et al. October 21, 2 | 2008-10-21 |
Substrate Treatment Apparatus App 20080105286 - Kizawa; Hiroshi ;   et al. | 2008-05-08 |
Substrate Treatment Apparatus App 20080035182 - Nakatsukasa; Katsuyoshi ;   et al. | 2008-02-14 |
Method of processing substrate and substrate processing apparatus App 20060201363 - Nakatsukasa; Katsuyoshi ;   et al. | 2006-09-14 |
Substrate processing method and substrate processing device App 20060162745 - Nakatsukasa; Katsuyoshi ;   et al. | 2006-07-27 |
Substrate processing unit Grant 6,637,445 - Ogasawara , et al. October 28, 2 | 2003-10-28 |
Substrate processing unit App 20020108642 - Ogasawara, Kazuhisa ;   et al. | 2002-08-15 |
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