Nakata; Toshihiko

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nakata; Toshihiko.The latest application filed is for "scanning probe microscope and sample observation method using same".

Company Profile

2.125.97

Nakata; Toshihiko - Tokyo JP
Nakata; Toshihiko - Hiratsuka N/A JP
Nakata; Toshihiko - Hiraduka JP
Nakata; Toshihiko - Yokohama N/A JP
Nakata; Toshihiko - Hiraduka-shi JP
NAKATA; Toshihiko - Yokahama JP
Nakata; Toshihiko - Hiratsuka-shi JP
Nakata; Toshihiko - Hiratasuka JP
Nakata; Toshihiko - Yokoyama JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Scanning probe microscope and sample observation method using same Grant 9,417,262 - Nakata , et al. August 16, 2	2016-08-16
Optical inspection method and optical inspection apparatus Grant 9,267,898 - Nakahira , et al. February 23, 2	2016-02-23
Scanning Probe Microscope And Sample Observation Method Using Same App 20150377922 - NAKATA; Toshihiko ; et al.	2015-12-31
Optical filtering device, defect inspection method and apparatus therefor Grant 9,182,592 - Ueno , et al. November 10, 2	2015-11-10
Internal defect inspection method and apparatus for the same Grant 9,134,279 - Nakata , et al. September 15, 2	2015-09-15
Scanning Probe Miscroscope App 20150177276 - Tachizaki; Takehiro ; et al.	2015-06-25
Scanning probe microscope and measurement method using same Grant 9,063,168 - Tachizaki , et al. June 23, 2	2015-06-23
Defect inspection method and apparatus therefor Grant 8,885,037 - Taniguchi , et al. November 11, 2	2014-11-11
Polarizing different phases of interfered light used in a method and apparatus for measuring displacement of a specimen Grant 8,860,946 - Nakata , et al. October 14, 2	2014-10-14
Scanning Probe Microscope App 20140298548 - BABA; Shuichi ; et al.	2014-10-02
Scanning probe microscope Grant 8,844,061 - Baba , et al. September 23, 2	2014-09-23
Method of defect inspection and device of defect inspection Grant 8,804,112 - Shibata , et al. August 12, 2	2014-08-12
Thermally assisted magnetic recording head inspection method and apparatus Grant 8,787,134 - Zhang , et al. July 22, 2	2014-07-22
Optical Filtering Device, Defect Inspection Method and Apparatus Therefor App 20140160471 - Ueno; Taketo ; et al.	2014-06-12
Scanning Probe Microscope and Measurement Method Using Same App 20140165237 - Tachizaki; Takehiro ; et al.	2014-06-12
Pattern inspection device of substrate surface and pattern inspection method of the same Grant 8,736,830 - Watanabe , et al. May 27, 2	2014-05-27
Cantilever of scanning probe microscope and method for manufacturing the same, method for inspecting thermal assist type magnetic head device and its apparatus Grant 8,713,710 - Zhang , et al. April 29, 2	2014-04-29
Scanning probe microscope and sample observing method using the same Grant 8,695,110 - Nakata , et al. April 8, 2	2014-04-08
Method and device for inspecting for defects Grant 8,670,116 - Nakao , et al. March 11, 2	2014-03-11
Method and apparatus for measuring displacement of a sample using a wire grid polarizer to generate interference light Grant 8,659,761 - Nakata , et al. February 25, 2	2014-02-25
Scanning probe microscope and surface shape measuring method using same Grant 8,656,509 - Watanabe , et al. February 18, 2	2014-02-18
Defect inspection device and defect inspection method Grant 8,634,069 - Nakano , et al. January 21, 2	2014-01-21
Scanning probe microscope and method of observing sample using the same Grant 8,635,710 - Nakata , et al. January 21, 2	2014-01-21
Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope Grant 8,629,985 - Nakata , et al. January 14, 2	2014-01-14
Optical Inspection Method And Optical Inspection Apparatus App 20130329227 - Nakahira; Kenji ; et al.	2013-12-12
Thermally Assisted Magnetic Recording Head Inspection Method And Apparatus App 20130265863 - Zhang; Kaifeng ; et al.	2013-10-10
Method and equipment for detecting pattern defect Grant 8,553,214 - Shishido , et al. October 8, 2	2013-10-08
Scanning Probe Microscope and Surface Shape Measuring Method Using Same App 20130212749 - Watanabe; Masahiro ; et al.	2013-08-15
Defects inspecting apparatus and defects inspecting method Grant 8,508,727 - Uto , et al. August 13, 2	2013-08-13
Scanning Probe Microscope App 20130205454 - BABA; Shuichi ; et al.	2013-08-08
Thermally assisted magnetic recording head inspection method and apparatus Grant 8,483,035 - Zhang , et al. July 9, 2	2013-07-09
Internal Defect Inspection Method And Apparatus For The Same App 20130160552 - Nakata; Toshihiko ; et al.	2013-06-27
Method And Device For Inspecting For Defects App 20130155400 - Nakao; Toshiyuki ; et al.	2013-06-20
Method and apparatus for detecting defects Grant 8,462,330 - Nakano , et al. June 11, 2	2013-06-11
Scanning Probe Microscope And Sample Observing Method Using The Same App 20130145507 - NAKATA; Toshihiko ; et al.	2013-06-06
Apparatus and method for inspecting pattern Grant 8,451,439 - Uto , et al. May 28, 2	2013-05-28
Cantilever of Scanning Probe Microscope and Method for Manufacturing the Same, Method for Inspecting Thermal Assist Type Magnetic Head Device and its Apparatus App 20130097739 - Zhang; Kaifeng ; et al.	2013-04-18
Scanning probe microscope and method of observing sample using the same Grant 8,407,811 - Nakata , et al. March 26, 2	2013-03-26
Method of inspecting a DNA chip and apparatus thereof Grant 8,361,784 - Oshida , et al. January 29, 2	2013-01-29
Scanning probe microscope and a measuring method using the same Grant 8,353,060 - Watanabe , et al. January 8, 2	2013-01-08
Scanning probe microscope Grant 8,342,008 - Baba , et al. January 1, 2	2013-01-01
Displacement Measurement Method and Apparatus Thereof, Stage Apparatus, and Probe Microscope App 20120327429 - Nakata; Toshihiko ; et al.	2012-12-27
Thermally Assisted Magnetic Recording Head Inspection Method and Apparatus App 20120307605 - Zhang; Kaifeng ; et al.	2012-12-06
Defects Inspecting Apparatus And Defects Inspecting Method App 20120262709 - Uto; Sachio ; et al.	2012-10-18
Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope Grant 8,284,406 - Nakata , et al. October 9, 2	2012-10-09
Scanning probe microscope and sample observing method using the same Grant 8,272,068 - Nakata , et al. September 18, 2	2012-09-18
Scanning Probe Microscope and Method of Observing Sample Using the Same App 20120204297 - NAKATA; Toshihiko ; et al.	2012-08-09
Method And Apparatus For Detecting Defects App 20120194809 - Nakano; Hiroyuki ; et al.	2012-08-02
Defects inspecting apparatus and defects inspecting method Grant 8,228,495 - Uto , et al. July 24, 2	2012-07-24
Apparatus And Method For Inspecting Pattern App 20120176602 - UTO; Sachio ; et al.	2012-07-12
Scanning probe microscope and method of observing sample using the same Grant 8,181,268 - Nakata , et al. May 15, 2	2012-05-15
Defect Inspection Method and Defect Inspection Apparatus App 20120092656 - Nakao; Toshiyuki ; et al.	2012-04-19
Defect Inspection Method And Apparatus Therefor App 20120092484 - Taniguchi; Atsushi ; et al.	2012-04-19
Method Of Defect Inspection And Device Of Defect Inspection App 20120092657 - Shibata; Yukihiro ; et al.	2012-04-19
Apparatus and method for inspecting pattern Grant 8,149,395 - Uto , et al. April 3, 2	2012-04-03
Method And Apparatus For Measuring Displacement Of A Sample To Be Inspected Using An Interference Light App 20120062903 - Nakata; Toshihiko ; et al.	2012-03-15
Method and apparatus for detecting defects Grant 8,107,065 - Nakano , et al. January 31, 2	2012-01-31
Defect Inspection Method And Defect Inspection Apparatus App 20120019816 - Shibata; Yukihiro ; et al.	2012-01-26
Pattern Inspection Device Of Substrate Surface And Pattern Inspection Method Of The Same App 20120013890 - Watanabe; Masahiro ; et al.	2012-01-19
Defects Inspecting Apparatus And Defects Inspecting Method App 20110310382 - UTO; Sachio ; et al.	2011-12-22
Method and apparatus for measuring displacement of a sample to be inspected using an interference light Grant 8,064,066 - Nakata , et al. November 22, 2	2011-11-22
Flat Surface Inspection Apparatus App 20110242524 - SHIMIZU; YUKI ; et al.	2011-10-06
Defects inspecting apparatus and defects inspecting method Grant 8,013,989 - Uto , et al. September 6, 2	2011-09-06
Scanning probe microscope Grant 8,011,230 - Watanabe , et al. September 6, 2	2011-09-06
Apparatus And Method For Inspecting Pattern App 20110170092 - UTO; Sachio ; et al.	2011-07-14
Scanning probe microscope Grant 7,966,867 - Watanabe , et al. June 28, 2	2011-06-28
Defect Inspection Device And Defect Inspection Method App 20110149275 - Nakano; Hiroyuki ; et al.	2011-06-23
Apparatus and method for inspecting pattern Grant 7,911,601 - Uto , et al. March 22, 2	2011-03-22
A Scanning Probe Microscope And A Measuring Method Using The Same App 20110055982 - WATANABE; Masahiro ; et al.	2011-03-03
Method And Equipment For Detecting Pattern Defect App 20110001972 - Shishido; Hiroaki ; et al.	2011-01-06
Scanning Probe Microscope and Method of Observing Sample Using the Same App 20100325761 - Nakata; Toshihiko ; et al.	2010-12-23
Method of manufacturing display device Grant 7,834,353 - Hongo , et al. November 16, 2	2010-11-16
Method And Apparatus For Detecting Defects App 20100271628 - NAKANO; Hiroyuki ; et al.	2010-10-28
Defects Inspecting Apparatus And Defects Inspecting Method App 20100259751 - UTO; Sachio ; et al.	2010-10-14
Method and equipment for detecting pattern defect Grant 7,791,725 - Shishido , et al. September 7, 2	2010-09-07
Scanning Probe Microscope And Method Of Observing Sample Using The Same App 20100218287 - NAKATA; Toshihiko ; et al.	2010-08-26
Defects inspecting apparatus and defects inspecting method Grant 7,768,634 - Uto , et al. August 3, 2	2010-08-03
Method and apparatus for detecting defects Grant 7,751,037 - Nakano , et al. July 6, 2	2010-07-06
Scanning probe microscope and sample observation method using the same Grant 7,716,970 - Watanabe , et al. May 18, 2	2010-05-18
Scanning Probe Microscope And Sample Observing Method Using The Same App 20100064396 - Nakata; Toshihiko ; et al.	2010-03-11
Method And Apparatus For Measuring Displacement Of A Sample App 20100039652 - Nakata; Toshihiko ; et al.	2010-02-18
Scanning probe microscope Grant 7,631,548 - Baba , et al. December 15, 2	2009-12-15
Method and apparatus for measuring displacement of a sample Grant 7,612,889 - Nakata , et al. November 3, 2	2009-11-03
Method And Apparatus For Detecting Defects App 20090213366 - Nakano; Hiroyuki ; et al.	2009-08-27
Displacement Measurement Method and Apparatus Thereof, Stage Apparatus, and Probe Microscope App 20090210971 - Nakata; Toshihiko ; et al.	2009-08-20
Scanning probe microscope and sample observing method using this and semiconductor device production method Grant 7,562,564 - Baba , et al. July 21, 2	2009-07-21
Scanning Probe Microscope App 20090158828 - BABA; Shuichi ; et al.	2009-06-25
Method and apparatus for detecting defects Grant 7,528,942 - Nakano , et al. May 5, 2	2009-05-05
Three-dimensional shape measuring unit, processing unit, and semiconductor device manufacturing method Grant 7,511,828 - Watanabe , et al. March 31, 2	2009-03-31
Method And Equipment For Detecting Pattern Defect App 20090073443 - Shishido; Hiroaki ; et al.	2009-03-19
Method and its apparatus for measuring displacement of a specimen App 20090073457 - Nakata; Toshihiko ; et al.	2009-03-19
Apparatus And Method For Inspecting Pattern App 20090066943 - UTO; Sachio ; et al.	2009-03-12
Defects Inspecting Apparatus And Defects Inspecting Method App 20090033924 - Uto; Sachio ; et al.	2009-02-05
Method and equipment for detecting pattern defect Grant 7,456,963 - Shishido , et al. November 25, 2	2008-11-25
Apparatus and method for inspecting pattern Grant 7,446,866 - Uto , et al. November 4, 2	2008-11-04
Scanning Probe Microscope App 20080257024 - WATANABE; Masahiro ; et al.	2008-10-23
Scanning probe microscope and sample observation method using the same and device manufacturing method App 20080223117 - Watanabe; Masahiro ; et al.	2008-09-18
Scanning Probe Microscope App 20080223122 - Watanabe; Masahiro ; et al.	2008-09-18
Defect detector and defect detecting method Grant 7,417,721 - Uto , et al. August 26, 2	2008-08-26
Method Of Manufacturing Display Device App 20080121894 - HONGO; Mikio ; et al.	2008-05-29
Circuit board production method and its apparatus Grant 7,355,143 - Nakano , et al. April 8, 2	2008-04-08
Method And Apparatus For Detecting Defects App 20080068593 - NAKANO; HIROYUKI ; et al.	2008-03-20
Scanning Microscope With Shape Correction Means App 20080047334 - Baba; Shuichi ; et al.	2008-02-28
Method of manufacturing display device Grant 7,326,623 - Hongo , et al. February 5, 2	2008-02-05
Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope Grant 7,323,684 - Watanabe , et al. January 29, 2	2008-01-29
Ultraviolet laser-generating device and defect inspection apparatus and method therefor Grant 7,305,015 - Uto , et al. December 4, 2	2007-12-04
Scanning Probe Microscope App 20070266780 - BABA; SHUICHI ; et al.	2007-11-22
Three-Dimensional Shape Measuring Unit, Processing Unit, and Semiconductor Device Manufacturing Method App 20070253001 - Watanabe; Masahiro ; et al.	2007-11-01
Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device Grant 7,271,908 - Noguchi , et al. September 18, 2	2007-09-18
Defect inspection method and apparatus therefor Grant 7,251,024 - Maeda , et al. July 31, 2	2007-07-31
Method of inspecting a DNA chip and apparatus thereof App 20070154938 - Oshida; Yoshitada ; et al.	2007-07-05
Method and apparatus for inspecting pattern defects Grant 7,218,389 - Uto , et al. May 15, 2	2007-05-15
Method of inspecting a DNA chip Grant 7,217,573 - Oshida , et al. May 15, 2	2007-05-15
Method and equipment for detecting pattern defect App 20070052955 - Shishido; Hiroaki ; et al.	2007-03-08
Apparatus for fabricating a display device App 20070041410 - Hongo; Mikio ; et al.	2007-02-22
Method and apparatus for plasma processing Grant 7,175,875 - Nakano , et al. February 13, 2	2007-02-13
Method and apparatus for detecting defects App 20060290923 - Nakano; Hiroyuki ; et al.	2006-12-28
Apparatus and method for inspecting pattern App 20060256328 - Uto; Sachio ; et al.	2006-11-16
Method and equipment for detecting pattern defect Grant 7,132,669 - Shishido , et al. November 7, 2	2006-11-07
Display device, process of fabricating same, and apparatus for fabricating same Grant 7,129,124 - Hongo , et al. October 31, 2	2006-10-31
Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope App 20060219900 - Watanabe; Masahiro ; et al.	2006-10-05
Method and apparatus for measuring displacement of a sample App 20060215171 - Nakata; Toshihiko ; et al.	2006-09-28
Apparatus and method for inspecting pattern Grant 7,081,953 - Uto , et al. July 25, 2	2006-07-25
Scanning probe microscope and specimen observation method Grant 7,067,806 - Watanabe , et al. June 27, 2	2006-06-27
Defect detector and defect detecting method App 20060124874 - Uto; Sachio ; et al.	2006-06-15
Scanning probe microscope and sample observing method using this and semiconductor device production method App 20060113469 - Baba; Shuichi ; et al.	2006-06-01
Method of manufacturing display device App 20060003478 - Hongo; Mikio ; et al.	2006-01-05
Method and equipment for detecting pattern defect App 20050253081 - Shishido, Hiroaki ; et al.	2005-11-17
Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device App 20050206898 - Noguchi, Minori ; et al.	2005-09-22
Method and apparatus for detecting pattern defects Grant 6,943,876 - Yoshida , et al. September 13, 2	2005-09-13
Laser annealing apparatus, TFT device and annealing method of the same Grant 6,943,086 - Hongo , et al. September 13, 2	2005-09-13
Method and equipment for detecting pattern defect Grant 6,921,905 - Shishido , et al. July 26, 2	2005-07-26
Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope App 20050151077 - Watanabe, Masahiro ; et al.	2005-07-14
Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device Grant 6,897,956 - Noguchi , et al. May 24, 2	2005-05-24
Defect inspection method and apparatus therefor App 20050083519 - Maeda, Shunji ; et al.	2005-04-21
Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope Grant 6,877,365 - Watanabe , et al. April 12, 2	2005-04-12
Apparatus and method for inspecting pattern App 20050062961 - Uto, Sachio ; et al.	2005-03-24
Method and equipment for detecting pattern defect App 20050045830 - Shishido, Hiroaki ; et al.	2005-03-03
Method of detecting particles and a processing apparatus using the same App 20050016953 - Arai, Takeshi ; et al.	2005-01-27
Apparatus and method for inspecting pattern Grant 6,831,737 - Uto , et al. December 14, 2	2004-12-14
Method for measuring dimensions and alignment of thin film magnetic head and apparatus therefor Grant 6,831,277 - Nakata , et al. December 14, 2	2004-12-14
Ultraviolet laser-generating device and defect inspection apparatus and method therefor App 20040240493 - Uto, Sachio ; et al.	2004-12-02
Apparatus enabling particle detection utilizing wide view lens Grant 6,825,437 - Nakano , et al. November 30, 2	2004-11-30
Defect inspection method and apparatus therefor Grant 6,819,416 - Maeda , et al. November 16, 2	2004-11-16
Method and equipment for detecting pattern defect Grant 6,800,859 - Shishido , et al. October 5, 2	2004-10-05
Method of processing a semiconductor device Grant 6,778,272 - Nakano , et al. August 17, 2	2004-08-17
Ultraviolet laser-generating device and defect inspection apparatus and method therefor Grant 6,765,201 - Uto , et al. July 20, 2	2004-07-20
Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope App 20040089059 - Watanabe, Masahiro ; et al.	2004-05-13
Method and apparatus for inspecting defects of a specimen Grant 6,721,047 - Shimoda , et al. April 13, 2	2004-04-13
Method and its apparatus for detecting floating particles in a plasma processing chamber and an apparatus for processing a semiconductor device Grant 6,712,928 - Nakano , et al. March 30, 2	2004-03-30
Display device, process of fabricating same, and apparatus for fabricating same App 20040041158 - Hongo, Mikio ; et al.	2004-03-04
Process and apparatus for manufacturing semiconductor device Grant 6,667,806 - Yoshitake , et al. December 23, 2	2003-12-23
Method and apparatus for detecting pattern defects App 20030227617 - Yoshida, Minoru ; et al.	2003-12-11
Method and apparatus for inspecting pattern defects App 20030210391 - Uto, Sachio ; et al.	2003-11-13
Manufacturing method for thin film magnetic heads Grant 6,631,547 - Yoshida , et al. October 14, 2	2003-10-14
Method and apparatus for inspecting defects in a patterned specimen Grant 6,621,571 - Maeda , et al. September 16, 2	2003-09-16
Floating particle inspection method and its apparatus and a semiconductor device processing apparatus Grant 6,613,588 - Nakano , et al. September 2, 2	2003-09-02
Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device App 20030160960 - Noguchi, Minori ; et al.	2003-08-28
Method and apparatus for plasma processing App 20030157242 - Nakano, Hiroyuki ; et al.	2003-08-21
Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses Grant 6,576,559 - Nakata , et al. June 10, 2	2003-06-10
Defect inspection method and apparatus therefor App 20030095251 - Maeda, Shunji ; et al.	2003-05-22
Defect inspection method and apparatus therefor Grant 6,556,290 - Maeda , et al. April 29, 2	2003-04-29
Laser annealing apparatus, TFT device and annealing method of the same App 20030068836 - Hongo, Mikio ; et al.	2003-04-10
Semiconductor device processing method and plasma processing method and its apparatus App 20030054655 - Nakano, Hiroyuki ; et al.	2003-03-20
Apparatus and method for inspecting pattern App 20030020904 - Uto, Sachio ; et al.	2003-01-30
Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses App 20020094685 - Nakata, Toshihiko ; et al.	2002-07-18
Process and apparatus for manufacturing semiconductor device App 20020048020 - Yoshitake, Yasuhiro ; et al.	2002-04-25
Method and apparatus for inspecting defects of a specimen App 20020036769 - Shimoda, Atsushi ; et al.	2002-03-28
Manufacturing method for thin film magnetic heads, inspecting method for thin film magnetic heads and an apparatus therefor App 20020029459 - Yoshida, Minoru ; et al.	2002-03-14
Defect inspection method and apparatus therefor App 20020030807 - Maeda, Shunji ; et al.	2002-03-14
Method and its apparatus for detecting floating particles in a plasma processing chamber and an apparatus for processing a semiconductor device App 20020016068 - Nakano, Hiroyuki ; et al.	2002-02-07
Floating particle inspection method and its apparatus and a semiconductor device processing apparatus App 20020006731 - Nakano, Hiroyuki ; et al.	2002-01-17
Ultraviolet laser-generating device and defect inspection apparatus and method therefor App 20010025924 - Uto, Sachio ; et al.	2001-10-04
Method of processing a semiconductor device App 20010016430 - Nakano, Hiroyuki ; et al.	2001-08-23
Method and device for detecting end point of plasma treatment, method and device for manufacturing semiconductor device, and semiconductor device Grant 5,989,928 - Nakata , et al. November 23, 1	1999-11-23
Method and apparatus for detecting photoacoustic signal to detect surface and subsurface information of the specimen Grant 5,781,294 - Nakata , et al. July 14, 1	1998-07-14
Method for making specimen and apparatus thereof Grant 5,656,811 - Itoh , et al. August 12, 1	1997-08-12
Method and apparatus for detecting photoacoustic signal Grant 5,479,259 - Nakata , et al. December 26, 1	1995-12-26
Method and apparatus for detecting photoacoustic signal Grant 5,377,006 - Nakata December 27, 1	1994-12-27
Method and apparatus for processing a minute portion of a specimen Grant 5,333,495 - Yamaguchi , et al. August 2, 1	1994-08-02
Method and apparatus for processing a minute portion of a specimen Grant 5,214,282 - Yamaguchi , et al. May 25, 1	1993-05-25
Method and apparatus for detecting photoacoustic signal Grant 5,136,172 - Nakata , et al. August 4, 1	1992-08-04
Photocoustic signal detecting device Grant 5,083,869 - Nakata , et al. January 28, 1	1992-01-28
Method and apparatus for detecting photoacoustic signal and method for detecting internal defect of semiconductor device Grant 5,062,715 - Nakata , et al. November 5, 1	1991-11-05
Method for detecting foreign matter and device for realizing same Grant 5,046,847 - Nakata , et al. September 10, 1	1991-09-10
Reduction projection type aligner Grant 4,795,261 - Nakata , et al. January 3, 1	1989-01-03
Substrate surface deflecting device Grant 4,788,577 - Akiyama , et al. November 29, 1	1988-11-29
Pattern position detecting method and apparatus for detecting the position of an alignment direction of a wafer target pattern Grant 4,777,374 - Nakata , et al. October 11, 1	1988-10-11
Alignment method and apparatus for reduction projection type aligner Grant 4,725,737 - Nakata , et al. February 16, 1	1988-02-16
Semiconductor exposure apparatus and alignment method therefor Grant 4,701,050 - Oshida , et al. October 20, 1	1987-10-20
Exposure apparatus and method of aligning exposure mask with workpiece Grant 4,668,089 - Oshida , et al. May 26, 1	1987-05-26

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