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Manufacturing method for semiconductor device Grant 7,785,984 - Yamada , et al. August 31, 2 | 2010-08-31 |
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Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus Grant 7,312,018 - Ito , et al. December 25, 2 | 2007-12-25 |
Method of forming insulating film, method of manufacturing semiconductor device and their controlling computer program App 20070128865 - Sato; Hiroshi ;   et al. | 2007-06-07 |
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Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus Grant 6,800,569 - Ito , et al. October 5, 2 | 2004-10-05 |
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Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus App 20030211756 - Ito, Shinichi ;   et al. | 2003-11-13 |
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Method of forming low dielectric constant insulating layer and method of manufacturing semiconductor device App 20030143847 - Miyajima, Hideshi ;   et al. | 2003-07-31 |
Method of forming coating film, method of manufacturing semiconductor device and coating solution App 20030139063 - Yamada, Nobuhide ;   et al. | 2003-07-24 |
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Gas circulating-processing apparatus App 20020134429 - Kubota, Hiroshi ;   et al. | 2002-09-26 |
Polishing method and polisher used in the method Grant 6,419,557 - Nojo , et al. July 16, 2 | 2002-07-16 |
Method of forming insulating film and process for producing semiconductor device App 20020086169 - Nakata, Rempei ;   et al. | 2002-07-04 |
Method of manufacturing semiconductor device App 20020081863 - Shimada, Miyoko ;   et al. | 2002-06-27 |
Semiconductor device and method of manufacturing the same App 20020050647 - Ikegami, Hiroshi ;   et al. | 2002-05-02 |
Method For Manufacturing Semiconductor Device Having Low Dielectric Constant Insulating Film, Wafer Processing Equipment And Wafer Storing Box Used In This Method App 20020037655 - Hasunuma, Masahiko ;   et al. | 2002-03-28 |
Polishing method and polisher used in the method App 20010034191 - Nojo, Haruki ;   et al. | 2001-10-25 |
Polishing method and polisher used in the method Grant 6,224,464 - Nojo , et al. May 1, 2 | 2001-05-01 |
Semiconductor device polishing apparatus having improved polishing liquid supplying apparatus, and polishing liquid supplying method Grant 6,059,920 - Nojo , et al. May 9, 2 | 2000-05-09 |
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Method of manufacturing semiconductor device using a hagolen plasma treatment step Grant 5,620,925 - Nakata , et al. April 15, 1 | 1997-04-15 |
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Method for forming a metal electrical connector to a surface of a semiconductor device adjacent a sidewall of insulation material with metal creep-up extending up that sidewall, and related device Grant 5,071,789 - Nakata December 10, 1 | 1991-12-10 |