Nakashima; Norman
Patent Applications and Registrations
Patent applications and USPTO patent grants for Nakashima; Norman.The latest application filed is for "modular-component system for gas delivery".
- Nakashima; Norman - Lake Oswego OR
- Nakashima; Norman - Sunnyvale CA US
| Patent | Date |
|---|---|
| Modular-component System For Gas Delivery App 20220199431 - Stumpf; John Folden ; et al. | 2022-06-23 |
| Gas delivery apparatus and method for atomic layer deposition Grant 8,668,776 - Chen , et al. March 11, 2 | 2014-03-11 |
| Chemical delivery apparatus for CVD or ALD Grant 7,832,432 - Nakashima , et al. November 16, 2 | 2010-11-16 |
| Gas Delivery Apparatus And Method For Atomic Layer Deposition App 20100247767 - CHEN; LING ; et al. | 2010-09-30 |
| Gas delivery apparatus for atomic layer deposition Grant 7,780,788 - Chen , et al. August 24, 2 | 2010-08-24 |
| Gas delivery apparatus for atomic layer deposition Grant 7,780,785 - Chen , et al. August 24, 2 | 2010-08-24 |
| Chemical delivery apparatus for CVD or ALD Grant 7,748,400 - Nakashima , et al. July 6, 2 | 2010-07-06 |
| Gas delivery apparatus for atomic layer deposition Grant 7,699,023 - Chen , et al. April 20, 2 | 2010-04-20 |
| Chemical Delivery Apparatus For Cvd Or Ald App 20100006167 - Nakashima; Norman ; et al. | 2010-01-14 |
| Chemical Delivery Apparatus For Cvd Or Ald App 20090314370 - Nakashima; Norman ; et al. | 2009-12-24 |
| Chemical delivery apparatus for CVD or ALD Grant 7,568,495 - Nakashima , et al. August 4, 2 | 2009-08-04 |
| Chemical delivery apparatus for CVD or ALD Grant 7,562,672 - Nakashima , et al. July 21, 2 | 2009-07-21 |
| Gas Delivery Apparatus For Atomic Layer Deposition App 20080041313 - CHEN; LING ; et al. | 2008-02-21 |
| Chemical Delivery Apparatus For Cvd Or Ald App 20080041311 - Nakashima; Norman ; et al. | 2008-02-21 |
| Atomic Layer Deposition Process App 20080038463 - Chen; Ling ; et al. | 2008-02-14 |
| Chemical delivery apparatus for CVD or ALD App 20070235085 - Nakashima; Norman ; et al. | 2007-10-11 |
| Integration Process Of Tungsten Atomic Layer Deposition For Metallization Application App 20070099415 - Chen; Ling ; et al. | 2007-05-03 |
| Gas delivery apparatus and method for atomic layer deposition App 20050173068 - Chen, Ling ; et al. | 2005-08-11 |
| Gas delivery apparatus and method for atomic layer deposition Grant 6,916,398 - Chen , et al. July 12, 2 | 2005-07-12 |
| Gas delivery apparatus for atomic layer deposition App 20030121608 - Chen, Ling ; et al. | 2003-07-03 |
| Integration of ALD tantalum nitride and alpha-phase tantalum for copper metallization application App 20030124262 - Chen, Ling ; et al. | 2003-07-03 |
| Gas delivery apparatus and method for atomic layer deposition App 20030079686 - Chen, Ling ; et al. | 2003-05-01 |
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