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Radiation-sensitive Resin Composition, Method Of Forming Resist Pattern, Polymer, And Compound App 20220299873 - NEMOTO; Ryuichi ;   et al. | 2022-09-22 |
Radiation-sensitive Resin Composition And Resist Pattern-forming Method App 20220260908 - KANEKO; Tetsurou ;   et al. | 2022-08-18 |
Fluorine-containing Polymer, Purification Method, And Radiation-sensitive Resin Composition App 20220137508 - NAKAGAWA; Hiroki ;   et al. | 2022-05-05 |
Radiation-sensitive Resin Composition And Resist Pattern-forming Method App 20210389671 - KANEKO; Tetsurou ;   et al. | 2021-12-16 |
Resin Composition And Method Of Forming Resist Pattern App 20210388197 - SAKURAI; Tomohiko ;   et al. | 2021-12-16 |
Radiation-sensitive Resin Composition And Method For Forming Resist Pattern App 20210364918 - Nishikori; Katsuaki ;   et al. | 2021-11-25 |
Resin composition and method of forming resist pattern Grant 11,130,856 - Sakurai , et al. September 28, 2 | 2021-09-28 |
Fluorine-containing Polymer, Purification Method, And Radiation-sensitive Resin Composition App 20210278764 - NAKAGAWA; Hiroki ;   et al. | 2021-09-09 |
Fluorine-containing polymer, purification method, and radiation-sensitive resin composition Grant 11,036,133 - Nakagawa , et al. June 15, 2 | 2021-06-15 |
Fluorine-containing Polymer, Purification Method, And Radiation-sensitive Resin Composition App 20200124961 - NAKAGAWA; Hiroki ;   et al. | 2020-04-23 |
Fluorine-containing polymer, purification method, and radiation-sensitive resin composition Grant 10,620,534 - Nakagawa , et al. | 2020-04-14 |
Resist pattern-forming method Grant 10,564,546 - Sakurai , et al. Feb | 2020-02-18 |
Fluorine-containing Polymer, Purification Method, And Radiation-sensitive Resin Composition App 20190278175 - NAKAGAWA; Hiroki ;   et al. | 2019-09-12 |
Resin Composition And Method Of Forming Resist Pattern App 20190249000 - SAKURAI; Tomohiko ;   et al. | 2019-08-15 |
Fluorine-containing Polymer, Purification Method, And Radiation-sensitive Resin Composition App 20190025695 - NAKAGAWA; Hiroki ;   et al. | 2019-01-24 |
Fluorine-containing polymer, purification method, and radiation-sensitive resin composition Grant 10,082,733 - Nakagawa , et al. September 25, 2 | 2018-09-25 |
Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound Grant 10,048,586 - Asano , et al. August 14, 2 | 2018-08-14 |
Resist Pattern-forming Method App 20170329228 - SAKURAI; Tomohiko ;   et al. | 2017-11-16 |
Fluorine-containing Polymer, Purification Method, And Radiation-sensitive Resin Composition App 20170199453 - NAKAGAWA; Hiroki ;   et al. | 2017-07-13 |
Cap opening tool set and cap opener Grant 9,688,523 - Kamakura , et al. June 27, 2 | 2017-06-27 |
Radiation-sensitive resin composition, polymer and method for forming a resist pattern Grant 9,598,520 - Kiridoshi , et al. March 21, 2 | 2017-03-21 |
Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound Grant 9,513,548 - Asano , et al. December 6, 2 | 2016-12-06 |
Fluorine-containing polymer, purification method, and radiation-sensitive resin composition Grant 9,500,950 - Nakagawa , et al. November 22, 2 | 2016-11-22 |
Radiation-sensitive Resin Composition, Method For Forming Resist Pattern, Polymer And Polymerizable Compound App 20160179003 - ASANO; Yuusuke ;   et al. | 2016-06-23 |
Fluorine-containing Polymer, Purification Method, And Radiation-sensitive Resin Composition App 20160062237 - NAKAGAWA; Hiroki ;   et al. | 2016-03-03 |
Photoresist composition and resist pattern-forming method Grant 9,268,219 - Miyata , et al. February 23, 2 | 2016-02-23 |
Fluorine-containing polymer, purification method, and radiation-sensitive resin composition Grant 9,213,236 - Nakagawa , et al. December 15, 2 | 2015-12-15 |
Composition for forming resist underlayer film and pattern-forming method Grant 9,116,427 - Kurita , et al. August 25, 2 | 2015-08-25 |
Resist pattern-forming method, resist pattern-forming radiation-sensitive resin composition, and resist film Grant 9,046,765 - Nakashima , et al. June 2, 2 | 2015-06-02 |
Composition for formation of upper layer film, and method for formation of photoresist pattern Grant 8,895,229 - Nishimura , et al. November 25, 2 | 2014-11-25 |
Radiation-sensitive resin composition Grant 8,895,223 - Sato , et al. November 25, 2 | 2014-11-25 |
Cap Opening Tool Set and Cap Opener App 20140224071 - Kamakura; Takayuki ;   et al. | 2014-08-14 |
Radiation-sensitive Resin Composition, Method For Forming Resist Pattern, Polymer And Polymerizable Compound App 20140212813 - ASANO; Yuusuke ;   et al. | 2014-07-31 |
Fluorine-containing Polymer, Purification Method, And Radiation-sensitive Resin Composition App 20140162190 - NAKAGAWA; Hiroki ;   et al. | 2014-06-12 |
Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound Grant 8,728,706 - Asano , et al. May 20, 2 | 2014-05-20 |
Fluorine-containing polymer, purification method, and radiation-sensitive resin composition Grant 8,697,343 - Nakagawa , et al. April 15, 2 | 2014-04-15 |
Resist Pattern-forming Method, Resist Pattern-forming Radiation-sensitive Resin Composition, And Resist Film App 20140023968 - NAKASHIMA; Hiromitsu ;   et al. | 2014-01-23 |
Radiation-sensitive resin composition, method for forming resist pattern and polymer Grant 8,609,318 - Nakahara , et al. December 17, 2 | 2013-12-17 |
Radiation-sensitive resin composition, polymer and compound Grant 8,609,321 - Nakashima , et al. December 17, 2 | 2013-12-17 |
Radiation-sensitive resin composition and resist film formed using the same Grant 8,609,319 - Kimura , et al. December 17, 2 | 2013-12-17 |
Lactone copolymer and radiation-sensitive resin composition Grant 8,597,867 - Nakashima , et al. December 3, 2 | 2013-12-03 |
Composition For Forming Resist Underlayer Film And Pattern-forming Method App 20130233825 - KURITA; Shunsuke ;   et al. | 2013-09-12 |
Radiation-sensitive Resin Composition And Pattern-forming Method App 20130216948 - KASAHARA; Kazuki ;   et al. | 2013-08-22 |
Upper layer film forming composition and method of forming photoresist pattern Grant 8,507,189 - Kouno , et al. August 13, 2 | 2013-08-13 |
Radiation-sensitive Resin Composition, Polymer And Compound App 20130189621 - NAKASHIMA; Hiromitsu ;   et al. | 2013-07-25 |
Upper layer-forming composition and photoresist patterning method Grant 8,435,718 - Nakamura , et al. May 7, 2 | 2013-05-07 |
Photoresist Composition And Resist Pattern-forming Method App 20130089817 - MIYATA; Hiromu ;   et al. | 2013-04-11 |
Radiation-sensitive Resin Composition, Method For Forming Resist Pattern, Polymer And Compound App 20130022912 - SATO; Mitsuo ;   et al. | 2013-01-24 |
Radiation-sensitive Resin Composition, Polymer And Method For Forming A Resist Pattern App 20120295197 - KIRIDOSHI; Yuko ;   et al. | 2012-11-22 |
Radiation-sensitive resin composition and compound Grant 8,273,521 - Sato , et al. September 25, 2 | 2012-09-25 |
Radiation-sensitive Resin Composition, Method For Forming Resist Pattern, Polymer And Polymerizable Compound App 20120237875 - ASANO; Yuusuke ;   et al. | 2012-09-20 |
Radiation-sensitive Resin Composition App 20120219903 - SATO; Mitsuo ;   et al. | 2012-08-30 |
Polymer and positive-tone radiation-sensitive resin composition Grant 8,182,977 - Ikeda , et al. May 22, 2 | 2012-05-22 |
Radiation-sensitive Resin Composition And Resist Film Formed Using The Same App 20120082935 - Kimura; Toru ;   et al. | 2012-04-05 |
Radiation-sensitive Resin Composition, Method For Forming Resist Pattern And Polymer App 20120034560 - NAKAHARA; Kazuo ;   et al. | 2012-02-09 |
Upper Layer-forming Composition And Photoresist Patterning Method App 20120028198 - NAKAMURA; Atsushi ;   et al. | 2012-02-02 |
Upper layer-forming composition and photoresist patterning method Grant 8,076,053 - Nakamura , et al. December 13, 2 | 2011-12-13 |
Radiation-sensitive Resin Composition And Polymer App 20110223537 - Ebata; Takuma ;   et al. | 2011-09-15 |
Radiation-sensitive Resin Composition And Compound App 20110027718 - SATO; Mitsuo ;   et al. | 2011-02-03 |
Polymer And Positive-tone Radiation-sensitive Resin Composition App 20100239981 - IKEDA; Norihiko ;   et al. | 2010-09-23 |
Upper Layer Film Forming Composition And Method Of Forming Photoresist Pattern App 20100040974 - Kouno; Daita ;   et al. | 2010-02-18 |
Composition For Formation Of Upper Layer Film, And Method For Formation Of Photoresist Pattern App 20100021852 - Nishimura; Yukio ;   et al. | 2010-01-28 |
Upper Layer-forming Composition And Photoresist Patterning Method App 20100003615 - Nakamura; Atsushi ;   et al. | 2010-01-07 |
Fluorine-containing Polymer, Purification Method, And Radiation-sensitive Resin Composition App 20090202945 - Nakagawa; Hiroki ;   et al. | 2009-08-13 |
Lactone copolymer and radiation-sensitive resin composition App 20090053649 - Nakashima; Hiromitsu ;   et al. | 2009-02-26 |
Radiation sensitive resin composition App 20070042292 - Yoneda; Eiji ;   et al. | 2007-02-22 |