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Patent applications and USPTO patent grants for NAKAO; Hidetoshi.The latest application filed is for "substrate processing apparatus and substrate processing method".
Patent | Date |
---|---|
Substrate Processing Apparatus And Substrate Processing Method App 20220037167 - YABUTA; Takashi ;   et al. | 2022-02-03 |
Substrate processing apparatus Grant 9,768,039 - Aiura , et al. September 19, 2 | 2017-09-19 |
Substrate Processing Apparatus App 20140137902 - Aiura; Kazuhiro ;   et al. | 2014-05-22 |
Substrate drying processing apparatus, method, and program recording medium Grant 7,581,335 - Tanaka , et al. September 1, 2 | 2009-09-01 |
Drying apparatus, drying method, substrate processing apparatus, substrate processing method, and program recording medium App 20070113423 - Tanaka; Hiroshi ;   et al. | 2007-05-24 |
Vitamin E derivatives Grant 6,387,882 - Ogata , et al. May 14, 2 | 2002-05-14 |
Hydroquinone derivatives Grant 6,358,515 - Ogata , et al. March 19, 2 | 2002-03-19 |
Hydroquinone Derivatives App 20010008893 - OGATA, KAZUMI ;   et al. | 2001-07-19 |
Piperazine derivative Grant 5,981,530 - Ogata , et al. November 9, 1 | 1999-11-09 |
Quinolonecarboxylic acid derivatives Grant 5,753,658 - Ogata , et al. May 19, 1 | 1998-05-19 |
Tocopherol derivatives Grant 5,606,080 - Ogata , et al. February 25, 1 | 1997-02-25 |
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