Patent | Date |
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Charged Particle Beam Apparatus App 20220199356 - NAKANO; Tomonori ;   et al. | 2022-06-23 |
Multipole Lens, Aberration Corrector Using Same, And Charged Particle Beam Device App 20210249218 - NAKANO; Tomonori ;   et al. | 2021-08-12 |
Aberration corrector and electron microscope Grant 11,069,505 - Nakano July 20, 2 | 2021-07-20 |
Multipole lens, aberration corrector using the same, and charged particle beam apparatus Grant 11,004,650 - Nakano May 11, 2 | 2021-05-11 |
Multipole Lens, Aberration Corrector Using The Same, And Charged Particle Beam Apparatus App 20200373117 - NAKANO; Tomonori | 2020-11-26 |
Aberration Corrector And Electron Microscope App 20200152414 - NAKANO; Tomonori | 2020-05-14 |
Aberration correction method, aberration correction system, and charged particle beam apparatus Grant 10,446,361 - Cheng , et al. Oc | 2019-10-15 |
Aberration Correction Method, Aberration Correction System, And Charged Particle Beam Apparatus App 20180190469 - CHENG; Zhaohui ;   et al. | 2018-07-05 |
Charged particle beam device and arithmetic device Grant 9,530,614 - Urano , et al. December 27, 2 | 2016-12-27 |
KVM switch and computer readable medium Grant 9,378,703 - Nakano June 28, 2 | 2016-06-28 |
Multipole and charged particle radiation apparatus using the same Grant 9,343,260 - Urano , et al. May 17, 2 | 2016-05-17 |
Aberration corrector and charged particle beam apparatus using the same Grant 9,287,084 - Cheng , et al. March 15, 2 | 2016-03-15 |
Aberration Corrector And Charged Particle Beam Apparatus Using The Same App 20150248944 - Cheng; Zhaohui ;   et al. | 2015-09-03 |
Multipole measurement apparatus Grant 8,987,680 - Nakano , et al. March 24, 2 | 2015-03-24 |
Charged Particle Beam Device And Arithmetic Device App 20150060654 - Urano; Kotoko ;   et al. | 2015-03-05 |
Multipole Measurement Apparatus App 20140217304 - Nakano; Tomonori ;   et al. | 2014-08-07 |
Scanning charged particle beam device and method for correcting chromatic spherical combination aberration Grant 8,772,732 - Nakano , et al. July 8, 2 | 2014-07-08 |
Multipole And Charged Particle Radiation Apparatus Using The Same App 20130320227 - Urano; Kotoko ;   et al. | 2013-12-05 |
Charged particle beam apparatus and geometrical aberration measurement method therefor Grant 8,581,190 - Nakano , et al. November 12, 2 | 2013-11-12 |
Charged particle beam apparatus including aberration corrector Grant 8,558,171 - Hirose , et al. October 15, 2 | 2013-10-15 |
Method and apparatus of tilted illumination observation Grant 8,436,899 - Kawasaki , et al. May 7, 2 | 2013-05-07 |
Charged Particle Beam Device Provided With Automatic Aberration Correction Method App 20130068949 - Urano; Kotoko ;   et al. | 2013-03-21 |
Charged particle radiation device provided with aberration corrector Grant 8,258,475 - Hirose , et al. September 4, 2 | 2012-09-04 |
Scanning Charged Particle Beam Device And Method For Correcting Chromatic Spherical Combination Aberration App 20120199739 - Nakano; Tomonori ;   et al. | 2012-08-09 |
Charged Particle Beam Apparatus Including Aberration Corrector App 20120153146 - HIROSE; Kotoko ;   et al. | 2012-06-21 |
Charged particle beam apparatus Grant 8,168,951 - Kawasaki , et al. May 1, 2 | 2012-05-01 |
Charged particle beam apparatus including aberration corrector Grant 8,129,680 - Hirose , et al. March 6, 2 | 2012-03-06 |
Charged Particle Radiation Device Provided With Aberration Corrector App 20110272578 - Hirose; Kotoko ;   et al. | 2011-11-10 |
Charged Particle Beam Instrument Comprising An Aberration Corrector App 20110210248 - HIROSE; Kotoko ;   et al. | 2011-09-01 |
Charged Particle Beam Apparatus And Geometrical Aberration Measurement Method Therefore App 20110139980 - Nakano; Tomonori ;   et al. | 2011-06-16 |
Method for estimation of probe shape in charged particle beam instruments Grant 7,915,582 - Hirose , et al. March 29, 2 | 2011-03-29 |
Aberration corrector and charged particle beam apparatus using the same Grant 7,834,326 - Kawasaki , et al. November 16, 2 | 2010-11-16 |
Method For Estimation Of Probe Shape In Charged Particle Beam Instruments App 20100264309 - HIROSE; Kotoko ;   et al. | 2010-10-21 |
KVM switch and computer readable medium App 20100194676 - Nakano; Tomonori | 2010-08-05 |
Charged particle beam apparatus Grant 7,718,976 - Kawasaki , et al. May 18, 2 | 2010-05-18 |
Charged particle beam apparatus, aberration correction value calculation unit therefor, and aberration correction program therefor Grant 7,714,286 - Nakano , et al. May 11, 2 | 2010-05-11 |
Method and Apparatus of Tilted Illumination Observation App 20100033560 - Kawasaki; Takeshi ;   et al. | 2010-02-11 |
Charged particle optical apparatus with aberration corrector Grant 7,619,218 - Nakano , et al. November 17, 2 | 2009-11-17 |
Charged Particle Beam Apparatus Including Aberration Corrector App 20090212228 - HIROSE; Kotoko ;   et al. | 2009-08-27 |
Charged Particle Beam Apparatus App 20090184243 - KAWASAKI; Takeshi ;   et al. | 2009-07-23 |
Charged particle beam column Grant 7,531,799 - Kawasaki , et al. May 12, 2 | 2009-05-12 |
Charged particle beam apparatus Grant 7,521,675 - Kawasaki , et al. April 21, 2 | 2009-04-21 |
Charged particle beam device Grant 7,504,624 - Kawasaki , et al. March 17, 2 | 2009-03-17 |
Aberration Corrector And Charged Particle Beam Apparatus Using The Same App 20090039281 - KAWASAKI; Takeshi ;   et al. | 2009-02-12 |
Charged Particle Beam Apparatus, Aberration Correction Value Calculation Unit Therefor, And Aberration Correction Program Therefor App 20090008550 - Nakano; Tomonori ;   et al. | 2009-01-08 |
Charged Particle Beam Apparatus App 20080067378 - Kawasaki; Takeshi ;   et al. | 2008-03-20 |
Charged particle beam column App 20070221860 - Kawasaki; Takeshi ;   et al. | 2007-09-27 |
Charged particle optical apparatus with aberration corrector App 20070181806 - Nakano; Tomonori ;   et al. | 2007-08-09 |
Charged particle beam column Grant 7,223,983 - Kawasaki , et al. May 29, 2 | 2007-05-29 |
Charged particle beam device App 20060255269 - Kawasaki; Takeshi ;   et al. | 2006-11-16 |
Charged particle beam apparatus App 20060175548 - Kawasaki; Takeshi ;   et al. | 2006-08-10 |
Charged particle beam column App 20060033037 - Kawasaki; Takeshi ;   et al. | 2006-02-16 |
Power controller and compressor for refrigeration system Grant 6,704,202 - Hamaoka , et al. March 9, 2 | 2004-03-09 |