| Patent | Date |
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Method Of Treating A Substrate
App 20220216059 - Liu; Zecheng ; et al. | 2022-07-07 |
Methods for forming doped silicon oxide thin films
Grant 11,302,527 - Takamure , et al. April 12, 2 | 2022-04-12 |
Method And System For Forming Patterned Structures Using Multiple Patterning Process
App 20220068639 - Inoue; Naoki ; et al. | 2022-03-03 |
Reactor System Comprising A Tuning Circuit
App 20210348273 - Nakano; Ryu ; et al. | 2021-11-11 |
Method For Forming Barrier Layer And Method For Manufacturing Semiconductor Device
App 20210313178 - Nakano; Ryu | 2021-10-07 |
Method For Depositing Silicon Oxide Film Having Improved Quality By Peald Using Bis(diethylamino)silane
App 20210057214 - Kengoyama; Yuko ; et al. | 2021-02-25 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20200388487 - Takamure; Noboru ; et al. | 2020-12-10 |
Methods for forming doped silicon oxide thin films
Grant 10,784,105 - Takamure , et al. Sept | 2020-09-22 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20200185218 - Takamure; Noboru ; et al. | 2020-06-11 |
Methods for forming doped silicon oxide thin films
Grant 10,510,530 - Takamure , et al. Dec | 2019-12-17 |
Substrate Processing Method And Apparatus
App 20190259611 - Nakano; Akinori ; et al. | 2019-08-22 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20190172708 - Takamure; Noboru ; et al. | 2019-06-06 |
Methods for forming doped silicon oxide thin films
Grant 10,147,600 - Takamure , et al. De | 2018-12-04 |
Method for protecting layer by forming hydrocarbon-based extremely thin film
Grant 10,043,661 - Kato , et al. August 7, 2 | 2018-08-07 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20180211834 - Takamure; Noboru ; et al. | 2018-07-26 |
Methods for forming doped silicon oxide thin films
Grant 9,875,893 - Takamure , et al. January 23, 2 | 2018-01-23 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20170338111 - Takamure; Noboru ; et al. | 2017-11-23 |
Film forming apparatus, and method of manufacturing semiconductor device
Grant 9,673,092 - Nakano , et al. June 6, 2 | 2017-06-06 |
Method for stabilizing reaction chamber pressure
Grant 9,663,857 - Nakano , et al. May 30, 2 | 2017-05-30 |
Methods for forming doped silicon oxide thin films
Grant 9,564,314 - Takamure , et al. February 7, 2 | 2017-02-07 |
Method For Protecting Layer By Forming Hydrocarbon-based Extemely Thin Film
App 20170018420 - Kato; Richika ; et al. | 2017-01-19 |
Low-oxidation plasma-assisted process
Grant 9,464,352 - Nakano , et al. October 11, 2 | 2016-10-11 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20160196970 - Takamure; Noboru ; et al. | 2016-07-07 |
Methods for forming doped silicon oxide thin films
Grant 9,368,352 - Takamure , et al. June 14, 2 | 2016-06-14 |
Method for trimming carbon-containing film at reduced trimming rate
Grant 9,343,308 - Isii , et al. May 17, 2 | 2016-05-17 |
Method for forming oxide film by plasma-assisted processing
Grant 9,284,642 - Nakano , et al. March 15, 2 | 2016-03-15 |
Low-Oxidation Plasma-Assisted Process
App 20150315704 - Nakano; Ryu ; et al. | 2015-11-05 |
Method for Stabilizing Reaction Chamber Pressure
App 20150284848 - Nakano; Ryu ; et al. | 2015-10-08 |
Methods for forming doped silicon oxide thin films
Grant 9,153,441 - Takamure , et al. October 6, 2 | 2015-10-06 |
Film Forming Apparatus, And Method Of Manufacturing Semiconductor Device
App 20150252479 - NAKANO; Ryu ; et al. | 2015-09-10 |
Method for controlling in-plane uniformity of substrate processed by plasma-assisted process
Grant 9,123,510 - Nakano , et al. September 1, 2 | 2015-09-01 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20150147875 - Takamure; Noboru ; et al. | 2015-05-28 |
Method For Trimming Carbon-Containing Film At Reduced Trimming Rate
App 20150118846 - Isii; Yoshihiro ; et al. | 2015-04-30 |
Method for Forming Oxide Film by Plasma-Assisted Processing
App 20150079311 - Nakano; Ryu ; et al. | 2015-03-19 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20150017794 - Takamure; Noboru ; et al. | 2015-01-15 |
Method For Controlling In-Plane Uniformity Of Substrate Processed By Plasma-Assisted Process
App 20140367359 - Nakano; Ryu ; et al. | 2014-12-18 |
Method for stabilizing plasma ignition
Grant 8,742,668 - Nakano , et al. June 3, 2 | 2014-06-03 |
Methods for forming doped silicon oxide thin films
Grant 8,679,958 - Takamure , et al. March 25, 2 | 2014-03-25 |
Method for Stabilizing Plasma Ignition
App 20140062304 - Nakano; Ryu ; et al. | 2014-03-06 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20130115763 - Takamure; Noboru ; et al. | 2013-05-09 |
Footing reduction using etch-selective layer
Grant 8,298,951 - Nakano October 30, 2 | 2012-10-30 |
Footing Reduction Using Etch-Selective Layer
App 20120264305 - Nakano; Ryu | 2012-10-18 |
Purge step-controlled sequence of processing semiconductor wafers
Grant 7,972,961 - Sugiyama , et al. July 5, 2 | 2011-07-05 |
Method of forming organosilicon oxide film and multilayer resist structure
Grant 7,829,159 - Nakano November 9, 2 | 2010-11-09 |
Plasma processing apparatus with insulated gas inlet pore
Grant 7,712,435 - Yoshizaki , et al. May 11, 2 | 2010-05-11 |
Purge Step-controlled Sequence Of Processing Semiconductor Wafers
App 20100093181 - Sugiyama; Toru ; et al. | 2010-04-15 |
Shower Plate Electrode For Plasma Cvd Reactor
App 20090155488 - Nakano; Ryu ; et al. | 2009-06-18 |
Plasma Cvd Apparatus Equipped With Plasma Blocking Insulation Plate
App 20070266945 - Shuto; Mitsutoshi ; et al. | 2007-11-22 |
Method of forming organosilicon oxide film and multilayer resist structure
App 20070141273 - Nakano; Ryu | 2007-06-21 |
Plasma processing apparatus with insulated gas inlet pore
App 20060137610 - Yoshizaki; Yu ; et al. | 2006-06-29 |
Method of forming fluorine-doped low-dielectric-constant insulating film
Grant 7,037,855 - Tsuji , et al. May 2, 2 | 2006-05-02 |
Method Of Forming Fluorine-doped Low-dielectric-constant Insulating Film
App 20060046519 - Tsuji; Naoto ; et al. | 2006-03-02 |
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