Patent | Date |
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Sputtering apparatus and sputtering method Grant 11,384,423 - Nakano July 12, 2 | 2022-07-12 |
Sputtering apparatus Grant 11,286,554 - Nakano , et al. March 29, 2 | 2022-03-29 |
Sputtering Apparatus and Sputtering Method App 20210292886 - Nakano; Katsuaki | 2021-09-23 |
Sputtering Apparatus App 20210140033 - Nakano; Katsuaki ;   et al. | 2021-05-13 |
Method of forming internal stress control film Grant 10,975,465 - Nakano , et al. April 13, 2 | 2021-04-13 |
Cathode device and sputtering apparatus Grant 10,934,616 - Tashiro , et al. March 2, 2 | 2021-03-02 |
Cathode Device And Sputtering Apparatus App 20200377992 - TASHIRO; Yukihito ;   et al. | 2020-12-03 |
Method Of Forming Internal Stress Control Film App 20190071767 - NAKANO; Katsuaki ;   et al. | 2019-03-07 |
Substrate Processing Method And Substrate Processing Device App 20180204729 - SONODA; Kazuhiro ;   et al. | 2018-07-19 |
Curvilinear motion rolling guide unit Grant 9,897,141 - Kuwabara , et al. February 20, 2 | 2018-02-20 |
Method of, and apparatus for, forming hard mask Grant 9,779,958 - Nakano October 3, 2 | 2017-10-03 |
Curvilinear Motion Rolling Guide Unit App 20170130771 - KUWABARA; Hideki ;   et al. | 2017-05-11 |
Vehicular lighting instrument semiconductor light source light source unit and vehicular lighting instrument Grant 9,557,026 - Nakano , et al. January 31, 2 | 2017-01-31 |
Light source unit of semiconductor-type light source of vehicle lighting device and vehicle lighting device Grant 9,512,996 - Hayashi , et al. December 6, 2 | 2016-12-06 |
Driving circuit of semiconductor-type light source for vehicle lighting device and a vehicle lighting device Grant 9,265,100 - Nakano , et al. February 16, 2 | 2016-02-16 |
Method Of, And Apparatus For, Forming Hard Mask App 20150228496 - Nakano; Katsuaki | 2015-08-13 |
Hard Mask And Method Of Manufacturing The Same App 20150107769 - Nakano; Katsuaki | 2015-04-23 |
Vehicular Lighting Instrument Semiconductor Light Source Light Source Unit And Vehicular Lighting Instrument App 20150016136 - Nakano; Katsuaki ;   et al. | 2015-01-15 |
Light source unit for a semiconductor-type light source of vehicle lighting device and a vehicle lighting device Grant 8,358,073 - Hayashi , et al. January 22, 2 | 2013-01-22 |
Surface-treated ceramic member, method for producing the same and vacuum processing apparatus Grant 8,231,967 - Nakano , et al. July 31, 2 | 2012-07-31 |
Light Source Unit Of Semiconductor-type Light Source Of Vehicle Lighting Device And Vehicle Lighting Device App 20120075880 - HAYASHI; Masateru ;   et al. | 2012-03-29 |
Light Source Unit Of Semiconductor-type Light Source Of Vehicle Lighting Device And Vehicle Lighting Device App 20120026747 - HAYASHI; Masateru ;   et al. | 2012-02-02 |
Light Source Unit Of Semiconductor-type Light Source Of Vehicle Lighting Device And Vehicle Lighting Device App 20120007505 - HAYASHI; Masateru ;   et al. | 2012-01-12 |
Driving Circuit Of Semiconductor-type Light Source For Vehicle Lighting Device And A Vehicle Lighting Device App 20110181186 - NAKANO; Katsuaki ;   et al. | 2011-07-28 |
Light Source Unit For A Semiconductor-type Light Source Of Vehicle Lighting Device And A Vehicle Lighting Device App 20110175529 - HAYASHI; Masateru ;   et al. | 2011-07-21 |
Surface-treated Ceramic Member, Method For Producing The Same And Vacuum Processing Apparatus App 20110151237 - NAKANO; Katsuaki ;   et al. | 2011-06-23 |
Mehtod Of Manufacturing Electrostatic Chuck Mechanism App 20100287768 - FUJII; Yoshinori ;   et al. | 2010-11-18 |