Patent | Date |
---|
Substrate Cleaning Device And Method Of Cleaning Substrate App 20220203411 - Oikawa; Fumitoshi ;   et al. | 2022-06-30 |
Substrate cleaning apparatus and substrate cleaning method Grant 11,311,918 - Nakano April 26, 2 | 2022-04-26 |
Substrate Cleaning Devices, Substrate Processing Apparatus, Substrate Cleaning Method, And Nozzle App 20220016651 - Oikawa; Fumitoshi ;   et al. | 2022-01-20 |
Storage container of scrubbing member and package of same Grant 11,180,303 - Nakano , et al. November 23, 2 | 2021-11-23 |
Storage container of scrubbing member and package of same Grant 11,142,386 - Nakano , et al. October 12, 2 | 2021-10-12 |
Apparatus for cleaning substrate and substrate cleaning method Grant 11,094,548 - Kajita , et al. August 17, 2 | 2021-08-17 |
Storage Container Of Scrubbing Member And Package Of Same App 20210163208 - Nakano; Hisajiro ;   et al. | 2021-06-03 |
Substrate washing device Grant 10,991,602 - Fukaya , et al. April 27, 2 | 2021-04-27 |
Substrate Cleaning Apparatus And Substrate Cleaning Method App 20210023592 - NAKANO; Hisajiro | 2021-01-28 |
Cover For Swing Member Of Substrate Processing Apparatus, Swing Member Of Substrate Processing Apparatus, And Substrate Processing Apparatus App 20200402820 - KITAGAWA; Yoshitaka ;   et al. | 2020-12-24 |
Substrate Cleaning Apparatus, Substrate Processing Apparatus, And Method Of Cleaning Substrate App 20200335363 - Nakano; Hisajiro ;   et al. | 2020-10-22 |
Substrate cleaning apparatus, substrate processing apparatus, and method of cleaning substrate Grant 10,741,423 - Nakano , et al. A | 2020-08-11 |
Method Of Cleaning A Substrate App 20200176281 - MAEDA; Koji ;   et al. | 2020-06-04 |
Substrate cleaning apparatus and substrate processing apparatus X Grant 10,361,101 - Kitagawa , et al. | 2019-07-23 |
Substrate Cleaning Device And Substrate Cleaning Method App 20190164769 - KAJITA; Shinji ;   et al. | 2019-05-30 |
Substrate Cleaning Apparatus, Substrate Processing Apparatus, And Method Of Cleaning Substrate App 20180337072 - NAKANO; Hisajiro ;   et al. | 2018-11-22 |
Substrate cleaning apparatus and polishing apparatus Grant 10,096,492 - Maeda , et al. October 9, 2 | 2018-10-09 |
Substrate Cleaning Apparatus And Substrate Processing Apparatus X App 20180090347 - KITAGAWA; Yoshitaka ;   et al. | 2018-03-29 |
Substrate Washing Device App 20170323809 - FUKAYA; Koichi ;   et al. | 2017-11-09 |
Substrate processing apparatus Grant 9,472,441 - Ogawa , et al. October 18, 2 | 2016-10-18 |
Substrate Cleaning Apparatus And Polishing Apparatus App 20140190633 - Maeda; Koji ;   et al. | 2014-07-10 |
Substrate Cleaning Apparatus And Polishing Apparatus App 20140190530 - Maeda; Koji ;   et al. | 2014-07-10 |
Substrate Processing Apparatus App 20130320636 - Ogawa; Takahiro ;   et al. | 2013-12-05 |
Liquid Scattering Prevention Cup, Substrate Processing Apparatus Provided With The Cup, And Substrate Polishing Apparatus App 20130167947 - NAKANO; Hisajiro ;   et al. | 2013-07-04 |