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Group Iii Nitride Composite Substrate And Method For Manufacturing The Same, And Method For Manufacturing Group Iii Nitride Semi App 20200176305 - ISHIBASHI; Keiji ;   et al. | 2020-06-04 |
Group III nitride composite substrate and method for manufacturing the same, and method for manufacturing group III nitride semiconductor device Grant 10,600,676 - Ishibashi , et al. | 2020-03-24 |
Group Iii Nitride Composite Substrate And Method For Manufacturing The Same, And Method For Manufacturing Group Iii Nitride Semiconductor Device App 20180166325 - ISHIBASHI; Keiji ;   et al. | 2018-06-14 |
Group III nitride composite substrate and method for manufacturing the same, and method for manufacturing group III nitride semiconductor device Grant 9,917,004 - Ishibashi , et al. March 13, 2 | 2018-03-13 |
Group III nitride composite substrate and method for manufacturing the same, laminated group III nitride composite substrate, and group III nitride semiconductor device and method for manufacturing the same Grant 9,312,340 - Kiyama , et al. April 12, 2 | 2016-04-12 |
Group Iii Nitride Composite Substrate And Method For Manufacturing The Same, Laminated Group Iii Nitride Composite Substrate, And Group Iii Nitride Semiconductor Device And Method For Manufacturing The Same App 20150349063 - KIYAMA; Makoto ;   et al. | 2015-12-03 |
Group III nitride composite substrate and method for manufacturing the same, laminated group III nitride composite substrate, and group III nitride semiconductor device and method for manufacturing the same Grant 9,136,337 - Ishibashi , et al. September 15, 2 | 2015-09-15 |
Group Iii Nitride Composite Substrate And Method For Manufacturing The Same, And Method For Manufacturing Group Iii Nitride Semiconductor Device App 20150194442 - Ishibashi; Keiji ;   et al. | 2015-07-09 |
Group Iii Nitride Composite Substrate And Method For Manufacturing The Same, Laminated Group Iii Nitride Composite Substrate, And Group Iii Nitride Semiconductor Device And Method For Manufacturing The Same App 20140103353 - ISHIBASHI; Keiji ;   et al. | 2014-04-17 |
Semiconductor laser device and manufacturing method thereof Grant 8,605,769 - Yoshimoto , et al. December 10, 2 | 2013-12-10 |
Method of manufacturing GaN substrate, method of manufacturing epitaxialwafer, method of manufacturing semiconductor device and epitaxialwafer Grant 8,471,264 - Nakanishi , et al. June 25, 2 | 2013-06-25 |
Group III nitride semiconductor element and epitaxial wafer Grant 8,391,327 - Yoshizumi , et al. March 5, 2 | 2013-03-05 |
Group Iii Nitride Semiconductor Light-emitting Device App 20120305933 - NAKAHATA; Seiji ;   et al. | 2012-12-06 |
Surface-emitting laser element, fabrication method thereof, surface-emitting laser array, and fabrication method thereof Grant 8,274,088 - Matsubara , et al. September 25, 2 | 2012-09-25 |
GaN substrate and light-emitting device Grant 8,253,162 - Fujiwara , et al. August 28, 2 | 2012-08-28 |
Compound semiconductor substrate, semiconductor device, and processes for producing them Grant 8,242,498 - Ishibashi , et al. August 14, 2 | 2012-08-14 |
Method for forming quantum well structure and method for manufacturing semiconductor light emitting element Grant 8,173,458 - Enya , et al. May 8, 2 | 2012-05-08 |
Group Iii Nitride Semiconductor Element And Epitaxial Wafer App 20120104433 - YOSHIZUMI; Yusuke ;   et al. | 2012-05-03 |
Method of Manufacturing Nitride Semiconductor Substrate App 20120034763 - Osada; Hideki ;   et al. | 2012-02-09 |
Group III nitride semiconductor element and epitaxial wafer Grant 8,107,507 - Yoshizumi , et al. January 31, 2 | 2012-01-31 |
Processing Method And Fabrication Method Of Semiconductor Device App 20110236175 - Shibata; Kaoru ;   et al. | 2011-09-29 |
METHOD OF MANUFACTURING GaN SUBSTRATE, METHOD OF MANUFACTURING EPITAXIALWAFER, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND EPITAXIALWAFER App 20110163325 - NAKANISHI; Fumitake ;   et al. | 2011-07-07 |
GaN SUBSTRATE AND LIGHT-EMITTING DEVICE App 20110108852 - FUJIWARA; Shinsuke ;   et al. | 2011-05-12 |
Method of manufacturing GaN substrate, method of manufacturing epitaxialwafer, method of manufacturing semiconductor device and epitaxialwafer Grant 7,932,114 - Nakanishi , et al. April 26, 2 | 2011-04-26 |
Compound Semiconductor Substrate, Semiconductor Device, and Processes for Producing Them App 20110084363 - ISHIBASHI; Keiji ;   et al. | 2011-04-14 |
Group Iii Nitride Semiconductor Element And Epitaxial Wafer App 20110079790 - YOSHIZUMI; Yusuke ;   et al. | 2011-04-07 |
Group III nitride semiconductor element and epitaxial wafer Grant 7,873,088 - Yoshizumi , et al. January 18, 2 | 2011-01-18 |
Compound semiconductor substrate, semiconductor device, and processes for producing them Grant 7,863,609 - Ishibashi , et al. January 4, 2 | 2011-01-04 |
Group Iii Nitride Semiconductor Element And Epitaxial Wafer App 20100260224 - YOSHIZUMI; Yusuke ;   et al. | 2010-10-14 |
Compound Semiconductor Substrate, Semiconductor Device, And Processes For Producing Them App 20100224963 - Ishibashi; Keiji ;   et al. | 2010-09-09 |
Surface-emitting Laser Element, Fabrication Method Thereof, Surface-emitting Laser Array, And Fabrication Method Thereof App 20100172390 - Matsubara; Hideki ;   et al. | 2010-07-08 |
Semiconductor Wafer and Semiconductor Wafer Inspection Method App 20100013058 - Shibata; Kaoru ;   et al. | 2010-01-21 |
Method For Forming Quantum Well Structure And Method For Manufacturing Semiconductor Light Emitting Element App 20090258452 - ENYA; Yohei ;   et al. | 2009-10-15 |
METHOD OF MANUFACTURING GaN SUBSTRATE, METHOD OF MANUFACTURING EPITAXIALWAFER, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND EPITAXIALWAFER App 20090093077 - NAKANISHI; Fumitake ;   et al. | 2009-04-09 |
Semiconductor Laser Device and Manufacturing Method Thereof App 20070280318 - Yoshimoto; Susumu ;   et al. | 2007-12-06 |