loadpatents
Patent applications and USPTO patent grants for Nakamura; Kenro.The latest application filed is for "semiconductor device and method of manufacturing the same semiconductor device".
Patent | Date |
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Semiconductor device and method of manufacturing the same semiconductor device Grant 9,865,502 - Nakamura January 9, 2 | 2018-01-09 |
Semiconductor device and manufacturing method thereof Grant 9,673,147 - Nakamura , et al. June 6, 2 | 2017-06-06 |
Semiconductor Device And Method Of Manufacturing The Same Semiconductor Device App 20160268163 - NAKAMURA; Kenro | 2016-09-15 |
Semiconductor Device And Manufacturing Method Thereof App 20160141247 - NAKAMURA; Kenro ;   et al. | 2016-05-19 |
Semiconductor device and manufacturing method thereof Grant 9,287,225 - Nakamura , et al. March 15, 2 | 2016-03-15 |
Temporarily Bonding Support Substrate And Semiconductor Device Manufacturing Method App 20160064265 - NAKAMURA; Kenro | 2016-03-03 |
Semiconductor device manufacturing method and manufacturing apparatus Grant 9,123,717 - Nakamura , et al. September 1, 2 | 2015-09-01 |
Semiconductor Device And Manufacturing Method Thereof App 20150028493 - NAKAMURA; Kenro ;   et al. | 2015-01-29 |
Semiconductor Device Manufacturing Method And Manufacturing Apparatus App 20140242779 - NAKAMURA; Kenro ;   et al. | 2014-08-28 |
Polishing Device And Polishing Method App 20110081832 - Nakamura; Kenro ;   et al. | 2011-04-07 |
Substrate processing apparatus App 20080188167 - Ishii; You ;   et al. | 2008-08-07 |
Substrate processing apparatus Grant 7,367,873 - Ishii , et al. May 6, 2 | 2008-05-06 |
Polishing method and polishing liquid Grant 7,354,861 - Nakamura , et al. April 8, 2 | 2008-04-08 |
Method for manufacturing semiconductor device and polishing apparatus Grant 7,351,131 - Nakamura , et al. April 1, 2 | 2008-04-01 |
Substrate processing apparatus Grant 7,066,787 - Nakanishi , et al. June 27, 2 | 2006-06-27 |
Reactive detection chip and spotter suitable for manufacturing the chip App 20050254998 - Nakamura, Kenro ;   et al. | 2005-11-17 |
Method for manufacturing semiconductor device and polishing apparatus App 20050250423 - Nakamura, Kenro ;   et al. | 2005-11-10 |
Method for manufacturing semiconductor device and polishing apparatus Grant 6,933,234 - Nakamura , et al. August 23, 2 | 2005-08-23 |
Substrate processing apparatus App 20040185751 - Nakanishi, Masayuki ;   et al. | 2004-09-23 |
Substrate processing apparatus App 20040106363 - Ishii, You ;   et al. | 2004-06-03 |
Polishing pad, polishing apparatus and polishing method Grant 6,620,336 - Nakamura September 16, 2 | 2003-09-16 |
Method for manufacturing semiconductor device and polishing apparatus App 20030139049 - Nakamura, Kenro ;   et al. | 2003-07-24 |
Method of manufacturing semiconductor device Grant 6,429,134 - Kubota , et al. August 6, 2 | 2002-08-06 |
Polishing pad, polishing apparatus and polishing method App 20010024878 - Nakamura, Kenro | 2001-09-27 |
Polishing method Grant 6,239,032 - Nakamura , et al. May 29, 2 | 2001-05-29 |
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