Patent | Date |
---|
Plasma processing apparatus and plasma processing method Grant 11,437,289 - Fukuchi , et al. September 6, 2 | 2022-09-06 |
Plasma processing apparatus and operational method thereof Grant 11,424,110 - Togami , et al. August 23, 2 | 2022-08-23 |
Plasma Processing Method App 20220262606 - Hirota; Kosa ;   et al. | 2022-08-18 |
Plasma processing method Grant 11,355,324 - Hirota , et al. June 7, 2 | 2022-06-07 |
Data processing method, data processing apparatus and processing apparatus Grant 11,308,182 - Watanabe , et al. April 19, 2 | 2022-04-19 |
Plasma Processing Apparatus And Plasma Processing Method App 20220102226 - Fukuchi; Kousuke ;   et al. | 2022-03-31 |
Vacuum Processing Apparatus And Vacuum Processing Method App 20210407776 - Yoshida; Yusuke ;   et al. | 2021-12-30 |
Plasma Processing Method And Wavelength Selection Method Used In Plasma Processing App 20210249317 - Kawaguchi; Yohei ;   et al. | 2021-08-12 |
Plasma processing apparatus and plasma processing method Grant 10,872,774 - Xu , et al. December 22, 2 | 2020-12-22 |
Data Processing Method, Data Processing Apparatus And Processing Apparatus App 20200380066 - Watanabe; Seiichi ;   et al. | 2020-12-03 |
Data processing method, data processing apparatus and processing apparatus Grant 10,783,220 - Watanabe , et al. Sept | 2020-09-22 |
Plasma Processing Method App 20200294777 - HIROTA; Kosa ;   et al. | 2020-09-17 |
Plasma Processing Apparatus, Data Processing Apparatus And Data Processing Method App 20200203133 - WATANABE; Seiichi ;   et al. | 2020-06-25 |
Plasma processing apparatus, data processing apparatus and data processing method Grant 10,615,010 - Watanabe , et al. | 2020-04-07 |
Plasma Processing Apparatus And Plasma Processing Method App 20200035445 - XU; Hao ;   et al. | 2020-01-30 |
Plasma processing apparatus Grant 10,262,840 - Kagoshima , et al. | 2019-04-16 |
Data Processing Method, Data Processing Apparatus And Processing Apparatus App 20180341625 - Watanabe; Seiichi ;   et al. | 2018-11-29 |
Data processing method, data processing apparatus and processing apparatus Grant 10,073,818 - Watanabe , et al. September 11, 2 | 2018-09-11 |
Plasma processing apparatus and plasma processing method Grant 10,020,233 - Nakamoto , et al. July 10, 2 | 2018-07-10 |
Plasma processing apparatus and operating method of plasma processing apparatus Grant 9,934,946 - Kawaguchi , et al. April 3, 2 | 2018-04-03 |
Plasma processing apparatus Grant 9,865,439 - Nakamoto , et al. January 9, 2 | 2018-01-09 |
Plasma Processing Apparatus And Operational Method Thereof App 20170372878 - TOGAMI; Masahito ;   et al. | 2017-12-28 |
Plasma Processing Apparatus And Plasma Processing Method App 20170358504 - USUI; Tatehito ;   et al. | 2017-12-14 |
Plasma processing apparatus and plasma processing method Grant 9,805,940 - Fukuchi , et al. October 31, 2 | 2017-10-31 |
Plasma processing apparatus and operational method thereof Grant 9,767,997 - Togami , et al. September 19, 2 | 2017-09-19 |
Plasma processing apparatus and plasma processing method Grant 9,741,629 - Usui , et al. August 22, 2 | 2017-08-22 |
Plasma Processing Apparatus And Operating Method Of Plasma Processing Apparatus App 20170178874 - KAWAGUCHI; Yohei ;   et al. | 2017-06-22 |
Plasma Processing Apparatus And Plasma Processing Method App 20160351405 - FUKUCHI; Kousuke ;   et al. | 2016-12-01 |
Plasma Processing Apparatus, Data Processing Apparatus And Data Processing Method App 20160336154 - WATANABE; Seiichi ;   et al. | 2016-11-17 |
Plasma Processing Apparatus And Plasma Processing Method App 20160284610 - USUI; Tatehito ;   et al. | 2016-09-29 |
Plasma Processing Apparatus App 20160211186 - NAKAMOTO; Shigeru ;   et al. | 2016-07-21 |
Plasma processing apparatus and plasma processing method Grant 9,190,336 - Fukuchi , et al. November 17, 2 | 2015-11-17 |
Data Processing Method, Data Processing Apparatus And Processing Apparatus App 20150154145 - WATANABE; Seiichi ;   et al. | 2015-06-04 |
Plasma processing apparatus Grant 8,992,721 - Kagoshima , et al. March 31, 2 | 2015-03-31 |
Plasma Processing Apparatus App 20150041060 - Hirota; Kousa ;   et al. | 2015-02-12 |
Plasma Processing Apparatus And Plasma Processing Method App 20150024521 - Fukuchi; Kousuke ;   et al. | 2015-01-22 |
Plasma Processing Apparatus And Operational Method Thereof App 20150021294 - Togami; Masahito ;   et al. | 2015-01-22 |
Plasma Processing Apparatus And Plasma Processing Method App 20140295583 - NAKAMOTO; Shigeru ;   et al. | 2014-10-02 |
Plasma Processing Apparatus App 20140277626 - KAGOSHIMA; Akira ;   et al. | 2014-09-18 |
Plasma processing apparatus and plasma processing method Grant 8,784,677 - Shiraishi , et al. July 22, 2 | 2014-07-22 |
Plasma Processing Apparatus And Plasma Processing Method App 20120018094 - SHIRAISHI; Daisuke ;   et al. | 2012-01-26 |
Plasma Processing Apparatus App 20110083808 - KAGOSHIMA; Akira ;   et al. | 2011-04-14 |
Plasma Processing Apparatus App 20080216956 - NAKAMOTO; SHIGERU ;   et al. | 2008-09-11 |
Semiconductor Production Apparatus App 20070178610 - Usui; Tatehito ;   et al. | 2007-08-02 |
Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system Grant 7,047,093 - Nakamoto , et al. May 16, 2 | 2006-05-16 |
Semiconductor production apparatus App 20050194095 - Usui, Tatehito ;   et al. | 2005-09-08 |
Methods of operating vacuum processing equipment and methods of processing wafers Grant 6,920,369 - Ueno , et al. July 19, 2 | 2005-07-19 |
Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system Grant 6,901,306 - Nakamoto , et al. May 31, 2 | 2005-05-31 |
Methods of operating vacuum processing equipment and methods of processing wafers App 20050010320 - Ueno, Tooru ;   et al. | 2005-01-13 |
Methods of operating vacuum processing equipment and methods of processing wafers Grant 6,795,745 - Ueno , et al. September 21, 2 | 2004-09-21 |
Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system App 20040078946 - Nakamoto, Shigeru ;   et al. | 2004-04-29 |
Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system App 20030163217 - Nakamoto, Shigeru ;   et al. | 2003-08-28 |
Etching end point judging method, etching end point judging device, and insulating film etching method using these methods Grant 6,596,551 - Usui , et al. July 22, 2 | 2003-07-22 |
Etching end point judging device App 20030036282 - Usui, Tatehito ;   et al. | 2003-02-20 |