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Semiconductor Device And Method Of Manufacturing The Same App 20220199603 - IIJIMA; Jun ;   et al. | 2022-06-23 |
Semiconductor device and method of manufacturing the same Grant 11,302,684 - Iijima , et al. April 12, 2 | 2022-04-12 |
Semiconductor memory device and semiconductor device manufacturing method Grant 11,088,162 - Fujii , et al. August 10, 2 | 2021-08-10 |
Semiconductor Device App 20210091112 - NAKAJIMA; Yumi ;   et al. | 2021-03-25 |
Semiconductor Memory Device App 20210082946 - NAKAJIMA; Yumi | 2021-03-18 |
Reflection type exposure mask and pattern forming method Grant 10,877,375 - Nakajima December 29, 2 | 2020-12-29 |
Semiconductor Device And Method Of Manufacturing The Same App 20200176434 - IIJIMA; Jun ;   et al. | 2020-06-04 |
Semiconductor device and method of manufacturing the same Grant 10,600,771 - Iijima , et al. | 2020-03-24 |
Semiconductor Memory Device And Semiconductor Device Manufacturing Method App 20200075622 - FUJII; Kotaro ;   et al. | 2020-03-05 |
Semiconductor Device And Method Of Manufacturing The Same App 20190287955 - IIJIMA; Jun ;   et al. | 2019-09-19 |
Reflection Type Exposure Mask And Pattern Forming Method App 20190079387 - NAKAJIMA; Yumi | 2019-03-14 |
Method of manufacturing semiconductor device Grant 9,418,887 - Nakajima August 16, 2 | 2016-08-16 |
Semiconductor manufacturing apparatus and device manufacturing method using substrate distortion correction Grant 9,209,052 - Nakajima , et al. December 8, 2 | 2015-12-08 |
Pattern forming method using block copolymers Grant 9,153,456 - Nakajima , et al. October 6, 2 | 2015-10-06 |
Method Of Manufacturing Semiconductor Device App 20150279727 - NAKAJIMA; Yumi | 2015-10-01 |
Pattern Forming Method App 20140377956 - NAKAJIMA; Yumi ;   et al. | 2014-12-25 |
Semiconductor Manufacturing Apparatus And Manufacturing Method Of Semiconductor Device App 20140227807 - NAKAJIMA; Yumi ;   et al. | 2014-08-14 |
Cleaning reticle, method for cleaning reticle stage, and method for manufacturing semiconductor device Grant 8,728,711 - Nakajima , et al. May 20, 2 | 2014-05-20 |
Method for generating mask pattern data and method for manufacturing mask Grant 8,187,773 - Nakajima , et al. May 29, 2 | 2012-05-29 |
Nanoimprint Template And Pattern Transcription Apparatus App 20120068372 - Mimotogi; Akiko ;   et al. | 2012-03-22 |
Reflective Mask, Manufacturing Method For Reflective Mask, And Manufacturing Method For Semiconductor Device App 20120040293 - Inanami; Ryoichi ;   et al. | 2012-02-16 |
Reflective mask and manufacturing method for reflective mask Grant 8,071,263 - Inanami , et al. December 6, 2 | 2011-12-06 |
Cleaning Reticle, Method For Cleaning Reticle Stage, And Method For Manufacturing Semiconductor Device App 20110159440 - NAKAJIMA; Yumi ;   et al. | 2011-06-30 |
Exposure Dose Monitoring Method And Method Of Manufacturing Exposure Dose Monitoring Mask App 20110151357 - NAKAJIMA; Yumi ;   et al. | 2011-06-23 |
Exposure Device And Exposure Method App 20100055584 - SATO; Takashi ;   et al. | 2010-03-04 |
Reflective Mask, Manufacturing Method For Reflective Mask, And Manufacturing Method For Semiconductor Device App 20100021826 - INANAMI; Ryoichi ;   et al. | 2010-01-28 |
Method For Generating Mask Pattern Data And Method For Manufacturing Mask App 20100003608 - Nakajima; Yumi ;   et al. | 2010-01-07 |
Microfabrication Apparatus And Device Manufacturing Method App 20090095711 - Koshiba; Takeshi ;   et al. | 2009-04-16 |