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Input Accepting Device, Input Accepting Method, And Non-transitory Storage Medium App 20220308689 - KOZONO; Yuki ;   et al. | 2022-09-29 |
Operation Input Device, Operation Input Method, And Non-transitory Computer-readable Medium Storing Operation Input Program App 20220308732 - KOZONO; Yuki ;   et al. | 2022-09-29 |
Vehicle-mounted Device Operation System App 20220310093 - KOZONO; Yuki ;   et al. | 2022-09-29 |
Vehicle-mounted device operation system Grant 11,393,469 - Kozono , et al. July 19, 2 | 2022-07-19 |
Display Control Device, Display Control Method And Display Control Program App 20220083201 - KOZONO; Yuki ;   et al. | 2022-03-17 |
Vehicle Input Device, Vehicle Input Method, And Non-transitory Storage Medium Stored With Vehicle Input Program App 20210138903 - KOZONO; Yuki ;   et al. | 2021-05-13 |
Vehicle-mounted Device Operation System App 20200202855 - KOZONO; Yuki ;   et al. | 2020-06-25 |
Plasma stabilization method and plasma apparatus Grant 9,824,863 - Nishida , et al. November 21, 2 | 2017-11-21 |
Plasma Stabilization Method And Plasma Apparatus App 20140174663 - Nishida; Takumasa ;   et al. | 2014-06-26 |
Plasma stabilization method and plasma apparatus Grant 8,691,048 - Nishida , et al. April 8, 2 | 2014-04-08 |
Plasma Stabilization Method And Plasma Apparatus App 20120247680 - Nishida; Takumasa ;   et al. | 2012-10-04 |
Plasma stabilization method and plasma apparatus Grant 8,216,421 - Nishida , et al. July 10, 2 | 2012-07-10 |
Plasma stabilization method and plasma apparatus App 20080173403 - Nishida; Takumasa ;   et al. | 2008-07-24 |
Plasma stabilization method and plasma apparatus Grant 7,320,941 - Nishida , et al. January 22, 2 | 2008-01-22 |
Methods for cleaning a substrate Grant 7,288,156 - Isago , et al. October 30, 2 | 2007-10-30 |
Methods for cleaning a substrate App 20060112974 - Isago; Yoichi ;   et al. | 2006-06-01 |
Apparatus for cleaning a substrate Grant 7,004,181 - Isago , et al. February 28, 2 | 2006-02-28 |
Electrostatic chuck and its manufacturing method Grant 6,992,876 - Nakajima , et al. January 31, 2 | 2006-01-31 |
Plasma stabilization method and plasma apparatus App 20040003897 - Nishida, Takumasa ;   et al. | 2004-01-08 |
Water supply apparatus and method thereof App 20030217762 - Kobayashi, Naoaki ;   et al. | 2003-11-27 |
Method for controlling chamber inner wall surface of an inductively coupled plasma etching apparatus App 20030111442 - Nakajima, Shu | 2003-06-19 |
Inductively coupled plasma etching apparatus Grant 6,531,030 - Nakajima March 11, 2 | 2003-03-11 |
Water supplying apparatus and water supplying method App 20030041881 - Isago, Yoichi ;   et al. | 2003-03-06 |
Ceramic electrostatic chuck assembly and method of making Grant 6,483,690 - Nakajima , et al. November 19, 2 | 2002-11-19 |
Methods for actively controlling RF peak-to-peak voltage in an inductively coupled plasma etching system App 20020139480 - Nakajima, Shu | 2002-10-03 |
Electrostatic chuck and method for manufacturing the same Grant 6,452,775 - Nakajima September 17, 2 | 2002-09-17 |
Apparatus and methods for actively controlling RF peak-to-peak voltage in an inductively coupled plasma etching system Grant 6,422,173 - Nakajima | 2002-07-23 |
Xenon enhanced plasma etch Grant 4,786,359 - Stark , et al. November 22, 1 | 1988-11-22 |