Nakajima; Shigeru
Patent Applications and Registrations
Patent applications and USPTO patent grants for Nakajima; Shigeru.The latest application filed is for "film forming method, film forming system, and film forming apparatus".
Company Profile
12.73.67
- Nakajima; Shigeru - Yamanashi JP
- Nakajima; Shigeru - Zama Kanagawa JP
- Nakajima; Shigeru - Fukui JP
- Nakajima; Shigeru - Nirasaki JP
- NAKAJIMA; Shigeru - Nirasaki-shi Yamanashi
- Nakajima; Shigeru - Kanagawa JP
- Nakajima; Shigeru - Zama JP
- NAKAJIMA; Shigeru - Nirasaki City JP
- Nakajima; Shigeru - Tokyo JP
- Nakajima; Shigeru - Oshu City JP
- Nakajima; Shigeru - Kai JP
- Nakajima; Shigeru - Anjo JP
- Nakajima; Shigeru - Aichi JP
- Nakajima; Shigeru - Anjo-shi JP
- Nakajima; Shigeru - Tokyo-To JP
- Nakajima; Shigeru - Kai-shi JP
- Nakajima, Shigeru - Yokohama-shi JP
- Nakajima; Shigeru - Chigasaki JP
- Nakajima; Shigeru - Aichi-pref JP
- Nakajima; Shigeru - Hachioji JP
- Nakajima; Shigeru - Yokohama JP
- Nakajima; Shigeru - Hochioji JP
- Nakajima; Shigeru - Fuchu JP
- Nakajima; Shigeru - Okayama JP
Patent Activity
| Patent | Date |
|---|---|
| Film deposition apparatus for fine pattern forming Grant 11,404,272 - Hasebe , et al. August 2, 2 | 2022-08-02 |
| Film deposition apparatus for fine pattern forming Grant 11,404,271 - Hasebe , et al. August 2, 2 | 2022-08-02 |
| Semiconductor device which detects occurrence of an abnormality during operation based on a comparison of an input specifying a PWM signal and an estimated input obtained from an inverse operation Grant 11,327,829 - Nakajima May 10, 2 | 2022-05-10 |
| Decorative sheet Grant 11,254,246 - Nakajima , et al. February 22, 2 | 2022-02-22 |
| Film forming apparatus and film forming method Grant 11,047,044 - Takezawa , et al. June 29, 2 | 2021-06-29 |
| Film Forming Method, Film Forming System, And Film Forming Apparatus App 20210115560 - YAMAGUCHI; Katsumasa ; et al. | 2021-04-22 |
| Decorative Sheet, Embossing Method And Embossing Die App 20210001592 - Nakajima; Shigeru | 2021-01-07 |
| Decorative Sheet, Embossing Method And Embossing Die App 20200406529 - Nakajima; Shigeru | 2020-12-31 |
| Mask pattern forming method, fine pattern forming method, and film deposition apparatus Grant 10,879,066 - Hasebe , et al. December 29, 2 | 2020-12-29 |
| Embossing Apparatus App 20200316846 - Nakajima; Shigeru | 2020-10-08 |
| Embossing Die, Embossing Apparatus And Embossing Method App 20200282631 - Nakajima; Shigeru ; et al. | 2020-09-10 |
| Semiconductor Device App 20200285536 - NAKAJIMA; Shigeru | 2020-09-10 |
| Decorative Sheet App 20200282884 - Nakajima; Shigeru ; et al. | 2020-09-10 |
| Bolt fastening method for lower link Grant 10,690,048 - Touse , et al. | 2020-06-23 |
| Motor control device Grant 10,630,221 - Aizawa , et al. | 2020-04-21 |
| Metal Contamination Prevention Method and Apparatus, and Substrate Processing Method Using the Same and Apparatus Therefor App 20200040463 - TAKEZAWA; Yoshihiro ; et al. | 2020-02-06 |
| Mask Pattern Forming Method, Fine Pattern Forming Method, And Film Deposition Apparatus App 20190115204 - HASEBE; Kazuhide ; et al. | 2019-04-18 |
| Mask Pattern Forming Method, Fine Pattern Forming Method, And Film Deposition Apparatus App 20190096658 - HASEBE; Kazuhide ; et al. | 2019-03-28 |
| Lubrication structure and lubrication method for upper pin in piston crank mechanism of internal combustion engine Grant 10,221,734 - Watanabe , et al. | 2019-03-05 |
| Mask Pattern Forming Method, Fine Pattern Forming Method, And Film Deposition Apparatus App 20190041756 - HASEBE; Kazuhide ; et al. | 2019-02-07 |
| Mask pattern forming method, fine pattern forming method, and film deposition apparatus Grant 10,191,378 - Hasebe , et al. Ja | 2019-01-29 |
| Mask pattern forming method, fine pattern forming method, and film deposition apparatus Grant 10,176,992 - Hasebe , et al. J | 2019-01-08 |
| Mask pattern forming method, fine pattern forming method, and film deposition apparatus Grant 10,141,187 - Hasebe , et al. Nov | 2018-11-27 |
| Bolt Fastening Method For Lower Link App 20180252156 - TOUSE; Mitsuo ; et al. | 2018-09-06 |
| Film Forming Apparatus And Film Forming Method App 20180179630 - TAKEZAWA; Yoshihiro ; et al. | 2018-06-28 |
| Substrate Processing Apparatus, Substrate Processing Method, And Substrate Processing System App 20180182652 - SESHIMO; Yuji ; et al. | 2018-06-28 |
| Lubrication Structure And Lubrication Method For Upper Pin In Piston Crank Mechanism Of Internal Combustion Engine App 20180171839 - WATANABE; Daisuke ; et al. | 2018-06-21 |
| Boron Film, Boron Film Forming Method, Hard Mask, And Hard Mask Manufacturing Method App 20180090311 - MIYAHARA; Takahiro ; et al. | 2018-03-29 |
| Motor Control Device App 20180034400 - AIZAWA; Toshimitsu ; et al. | 2018-02-01 |
| Mask Pattern Forming Method, Fine Pattern Forming Method, And Film Deposition Apparatus App 20180019113 - HASEBE; Kazuhide ; et al. | 2018-01-18 |
| Thin film forming method Grant 9,777,366 - Kakimoto , et al. October 3, 2 | 2017-10-03 |
| Method of controlling gas supply apparatus and substrate processing system Grant 9,758,867 - Nakajima , et al. September 12, 2 | 2017-09-12 |
| Mask Pattern Forming Method, Fine Pattern Forming Method, And Film Deposition Apparatus App 20170162381 - HASEBE; Kazuhide ; et al. | 2017-06-08 |
| Film forming method and film forming apparatus Grant 9,466,478 - Shimizu , et al. October 11, 2 | 2016-10-11 |
| Heat treatment method Grant 9,422,624 - Nakajima , et al. August 23, 2 | 2016-08-23 |
| Thin film forming method and film forming apparatus Grant 9,145,604 - Kakimoto , et al. September 29, 2 | 2015-09-29 |
| Thin Film Forming Method App 20150270126 - KAKIMOTO; Akinobu ; et al. | 2015-09-24 |
| Method of Forming Titanium Carbonitride Film and Film Formation Apparatus Therefor App 20150259792 - NAKAJIMA; Shigeru ; et al. | 2015-09-17 |
| Vertical Heat Treatment Apparatus, Heat Treatment Method And Storage Medium App 20150211113 - NAKAJIMA; Shigeru ; et al. | 2015-07-30 |
| Method Of Forming A Germanium Thin Film App 20140331928 - KAKIMOTO; Akinobu ; et al. | 2014-11-13 |
| Method Of Controlling Gas Supply Apparatus And Substrate Processing System App 20140290577 - NAKAJIMA; Shigeru ; et al. | 2014-10-02 |
| Film Forming Method And Film Forming Apparatus App 20140295677 - Shimizu; Akira ; et al. | 2014-10-02 |
| Method of forming a germanium thin film Grant 8,815,714 - Kakimoto , et al. August 26, 2 | 2014-08-26 |
| Method Of Forming A Germanium Thin Film App 20130230975 - KAKIMOTO; Akinobu ; et al. | 2013-09-05 |
| Mask Pattern Forming Method, Fine Pattern Forming Method, And Film Deposition Apparatus App 20130213301 - HASEBE; Kazuhide ; et al. | 2013-08-22 |
| Mask pattern forming method, fine pattern forming method, and film deposition apparatus Grant 8,426,117 - Hasebe , et al. April 23, 2 | 2013-04-23 |
| Thin Film Forming Method And Film Forming Apparatus App 20130084693 - KAKIMOTO; Akinobu ; et al. | 2013-04-04 |
| Micro pattern forming method Grant 8,383,522 - Nakajima , et al. February 26, 2 | 2013-02-26 |
| Film formation method for forming silicon-containing insulating film Grant 8,357,619 - Hasebe , et al. January 22, 2 | 2013-01-22 |
| Film formation apparatus and method for using same Grant 8,349,401 - Sato , et al. January 8, 2 | 2013-01-08 |
| Hydrophilic polyolefin sintered body Grant 8,318,824 - Matsuoka , et al. November 27, 2 | 2012-11-27 |
| Patterning method Grant 8,168,375 - Nakajima , et al. May 1, 2 | 2012-05-01 |
| Film formation method and apparatus for semiconductor process Grant 8,168,270 - Hasebe , et al. May 1, 2 | 2012-05-01 |
| Hydrophilic Polyolefin Sintered Body App 20120095121 - Matsuoka; Naoki ; et al. | 2012-04-19 |
| Oxidation method providing parallel gas flow over substrates in a semiconductor process Grant 8,124,181 - Hasebe , et al. February 28, 2 | 2012-02-28 |
| Micro Pattern Forming Method App 20110237082 - Nakajima; Shigeru ; et al. | 2011-09-29 |
| Method of modifying insulating film Grant 8,021,987 - Sugawara , et al. September 20, 2 | 2011-09-20 |
| Patterning method Grant 7,989,354 - Nakajima , et al. August 2, 2 | 2011-08-02 |
| Film Formation Method For Forming Silicon-containing Insulating Film App 20110151679 - HASEBE; Kazuhide ; et al. | 2011-06-23 |
| Film formation method and apparatus for forming silicon-containing insulating film Grant 7,923,378 - Hasebe , et al. April 12, 2 | 2011-04-12 |
| Mask Pattern Forming Method And Semiconductor Device Manufacturing Method App 20110065280 - Nakajima; Shigeru ; et al. | 2011-03-17 |
| Film formation method and apparatus for forming silicon oxide film Grant 7,906,168 - Hasebe , et al. March 15, 2 | 2011-03-15 |
| Oxidation Method And Apparatus For Semiconductor Process App 20100319619 - FUJITA; Takehiko ; et al. | 2010-12-23 |
| Oxidation method and apparatus for semiconductor process Grant 7,795,158 - Fujita , et al. September 14, 2 | 2010-09-14 |
| Film Formation Apparatus And Method For Using Same App 20100189927 - SATO; Jun ; et al. | 2010-07-29 |
| Patterning method utilizing SiBN and photolithography Grant 7,754,622 - Chou , et al. July 13, 2 | 2010-07-13 |
| Patterning Method App 20100130015 - Nakajima; Shigeru ; et al. | 2010-05-27 |
| Patterning Method App 20100112796 - Chou; Pao-Hwa ; et al. | 2010-05-06 |
| Patterning Method App 20100112496 - Nakajima; Shigeru ; et al. | 2010-05-06 |
| Method Of Modifying Insulating Film App 20100105215 - SUGAWARA; Takuya ; et al. | 2010-04-29 |
| Mask Pattern Forming Method, Fine Pattern Forming Method, And Film Deposition Apparatus App 20100081094 - HASEBE; KAZUHIDE ; et al. | 2010-04-01 |
| Method of modifying insulating film Grant 7,655,574 - Sugawara , et al. February 2, 2 | 2010-02-02 |
| Method for forming underlying insulation film Grant 7,622,402 - Sugawara , et al. November 24, 2 | 2009-11-24 |
| Film formation apparatus and method of using the same Grant 7,615,163 - Tamura , et al. November 10, 2 | 2009-11-10 |
| Film Formation method and apparatus for forming silicon-containing insulating film App 20090203227 - Hasebe; Kazuhide ; et al. | 2009-08-13 |
| Valve timing control apparatus Grant 7,565,889 - Iwata , et al. July 28, 2 | 2009-07-28 |
| Valve Timing Control Apparatus App 20080163838 - Iwata; Taiyu ; et al. | 2008-07-10 |
| Film formation method and apparatus for semiconductor process App 20080107824 - Hasebe; Kazuhide ; et al. | 2008-05-08 |
| Film formation apparatus and method of using the same Grant 7,368,384 - Endo , et al. May 6, 2 | 2008-05-06 |
| Oxidation apparatus and method for semiconductor process App 20080095678 - Hasebe; Kazuhide ; et al. | 2008-04-24 |
| Film formation method and apparatus for forming silicon oxide film App 20080081104 - Hasebe; Kazuhide ; et al. | 2008-04-03 |
| Oxidation method and apparatus for semiconductor process App 20080057199 - Fujita; Takehiko ; et al. | 2008-03-06 |
| Material for Processed Food for Weight Reduction Diets and Weight Reduction Dietary Processed Food Using Thereof App 20070269490 - Nakajima; Shigeru ; et al. | 2007-11-22 |
| Variable valve timing control device Grant 7,165,521 - Nakajima January 23, 2 | 2007-01-23 |
| Method of forming film and film forming apparatus App 20060216953 - Nakajima; Shigeru ; et al. | 2006-09-28 |
| Variable valve timing control device App 20060207537 - Nakajima; Shigeru ; et al. | 2006-09-21 |
| Method of modifying insulating film App 20060199398 - Sugawara; Takuya ; et al. | 2006-09-07 |
| Method of manufacturing semiconductor device, film-forming apparatus, and storage medium Grant 7,084,023 - Nakajima , et al. August 1, 2 | 2006-08-01 |
| Film formation apparatus and method of using the same App 20060137709 - Tamura; Akitake ; et al. | 2006-06-29 |
| Film forming method for depositing a plurality of high-k dielectric films Grant 7,041,546 - Morozumi , et al. May 9, 2 | 2006-05-09 |
| Valve timing control device Grant 7,013,856 - Nakajima March 21, 2 | 2006-03-21 |
| Valve opening-closing timing control device Grant 7,007,918 - Kawai , et al. March 7, 2 | 2006-03-07 |
| Valve timing control device Grant 6,981,477 - Uozaki , et al. January 3, 2 | 2006-01-03 |
| Method for forming underlying insulation film App 20050255711 - Sugawara, Takuya ; et al. | 2005-11-17 |
| Film formation apparatus and method of using the same App 20050245099 - Endo, Atsushi ; et al. | 2005-11-03 |
| Valve Timing Control Device App 20050183682 - Uozaki, Mitsuru ; et al. | 2005-08-25 |
| Variable valve timing control device Grant 6,920,853 - Nakajima , et al. July 26, 2 | 2005-07-26 |
| Method of manufacturing semiconductor device, film-forming apparatus, and storage medium App 20050142716 - Nakajima, Shigeru ; et al. | 2005-06-30 |
| Valve opening-closing timing control device App 20050087713 - Kawai, Yoshiyuki ; et al. | 2005-04-28 |
| Sliding mechanism and variable valve timing mechanism for internal combustion engine Grant 6,843,215 - Hiratsuka , et al. January 18, 2 | 2005-01-18 |
| Valve timing control device App 20040221825 - Nakajima, Shigeru | 2004-11-11 |
| Capacitor structure and film forming method and apparatus App 20040195653 - Morozumi, Yuichiro ; et al. | 2004-10-07 |
| Variable valve timing control device App 20040182342 - Nakajima, Shigeru | 2004-09-23 |
| Valve timing control device Grant 6,782,854 - Nakamura , et al. August 31, 2 | 2004-08-31 |
| Valve timing control device App 20040074458 - Nakamura, Motoo ; et al. | 2004-04-22 |
| Variable valve timing control device App 20030221646 - Nakajima, Shigeru ; et al. | 2003-12-04 |
| Sliding mechanism and variable valve timing mechanism for internal combustion engine App 20030019449 - Hiratsuka, Ichiro ; et al. | 2003-01-30 |
| Valve control system for electromagnetic valve Grant 6,497,205 - Kumaki , et al. December 24, 2 | 2002-12-24 |
| Method for manufacturing compound semiconductor device App 20020055213 - Sugino, Takashi ; et al. | 2002-05-09 |
| Control system of electromagnetically operated valve App 20020011224 - Kumaki, Hiroshi ; et al. | 2002-01-31 |
| Semiconductor device App 20020000570 - Nakajima, Shigeru ; et al. | 2002-01-03 |
| Valve control system for electromagnetic valve App 20010054399 - Kumaki, Hiroshi ; et al. | 2001-12-27 |
| Apparatus and method for controlling electromagnetically operable engine valve assembly App 20010047780 - Komatsu, Seigo ; et al. | 2001-12-06 |
| Semiconductor device Grant 6,229,165 - Sakai , et al. May 8, 2 | 2001-05-08 |
| Switching valve Grant 5,878,782 - Nakajima March 9, 1 | 1999-03-09 |
| Electroendoscope apparatus Grant 5,627,583 - Nakamura , et al. May 6, 1 | 1997-05-06 |
| Dissimilar endoscopes usable with a common control unit Grant 5,614,943 - Nakamura , et al. March 25, 1 | 1997-03-25 |
| Cover-type endoscope apparatus Grant 5,545,121 - Yabe , et al. August 13, 1 | 1996-08-13 |
| Field effect transistor and method of manufacturing the same Grant 5,493,136 - Matsuzaki , et al. February 20, 1 | 1996-02-20 |
| Cover type endoscope apparatus Grant 5,458,133 - Yabe , et al. October 17, 1 | 1995-10-17 |
| Semiconductor device Grant 5,446,296 - Nakajima August 29, 1 | 1995-08-29 |
| Endoscope system Grant 5,398,056 - Yabe , et al. March 14, 1 | 1995-03-14 |
| Endoscope system Grant 5,315,383 - Yabe , et al. May 24, 1 | 1994-05-24 |
| Image pickup apparatus having connector capable of separately shielding grouped electrical connections Grant 4,974,075 - Nakajima November 27, 1 | 1990-11-27 |
| Endoscope apparatus having a chair with a switch Grant 4,854,301 - Nakajima August 8, 1 | 1989-08-08 |
| Electronic endoscope apparatus Grant 4,845,555 - Yabe , et al. July 4, 1 | 1989-07-04 |
| Water-alcohol separating membrane and method for separation of water and alcohol by the use thereof Grant 4,820,418 - Hirotsu , et al. April 11, 1 | 1989-04-11 |
| Endoscope Grant 4,800,869 - Nakajima January 31, 1 | 1989-01-31 |
| Vertical MOSFET and method of manufacturing the same Grant 4,786,953 - Morie , et al. November 22, 1 | 1988-11-22 |
| Dynamic ram cell with trench surrounded switching element Grant 4,786,954 - Morie , et al. November 22, 1 | 1988-11-22 |
| Endoscope Grant 4,773,395 - Suzuki , et al. September 27, 1 | 1988-09-27 |
| Endoscope device Grant 4,759,346 - Nakajima July 26, 1 | 1988-07-26 |
| Endoscope systems Grant 4,748,970 - Nakajima June 7, 1 | 1988-06-07 |
| Semiconductor memory device with trench surrounding each memory cell Grant 4,672,410 - Miura , et al. June 9, 1 | 1987-06-09 |
| Method of manufacturing semiconductor device with MIS capacitor Grant 4,645,564 - Morie , et al. February 24, 1 | 1987-02-24 |
| Method for effective combined use of gels having different activities Grant 4,486,311 - Nakajima , et al. December 4, 1 | 1984-12-04 |
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