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Mask pattern verification method Grant 10,606,165 - Toriu , et al. | 2020-03-31 |
Semiconductor device having a wiring line with an end portion having rounded side surfaces and manufacturing method thereof Grant 10,483,202 - Aburada , et al. Nov | 2019-11-19 |
Mask Pattern Verification Method App 20190243232 - TORIU; Yayori ;   et al. | 2019-08-08 |
Method of wiring layout, semiconductor device, program for supporting design of wiring layout, and method for manufacturing semiconductor device Grant 9,977,855 - Kodama , et al. May 22, 2 | 2018-05-22 |
Method of wiring layout, semiconductor device, program for supporting design of wiring layout, and method for manufacturing semiconductor device Grant 9,953,126 - Kodama , et al. April 24, 2 | 2018-04-24 |
Semiconductor device having contacts in drawing area and the contacts connected to word lines extending from element formation area Grant 9,917,049 - Nakajima , et al. March 13, 2 | 2018-03-13 |
Semiconductor device and method of manufacturing the semiconductor device Grant 9,786,556 - Wang , et al. October 10, 2 | 2017-10-10 |
Semiconductor Device And Manufacturing Method Thereof App 20170243818 - ABURADA; Ryota ;   et al. | 2017-08-24 |
Semiconductor Device And Method Of Manufacturing The Semiconductor Device App 20170133267 - Wang; Weiting ;   et al. | 2017-05-11 |
Semiconductor device and method of manufacturing the semiconductor device Grant 9,646,982 - Wang , et al. May 9, 2 | 2017-05-09 |
Pattern data generation method, pattern verification method, and optical image calculation method Grant 9,576,100 - Miyoshi , et al. February 21, 2 | 2017-02-21 |
Semiconductor Device And Method Of Manufacturing The Same App 20160343658 - NAKAJIMA; Fumiharu ;   et al. | 2016-11-24 |
Semiconductor Device And Method Of Manufacturing The Semiconductor Device App 20160071859 - WANG; Weiting ;   et al. | 2016-03-10 |
Semiconductor Device And Method Of Manufacturing The Same App 20160013097 - NAKAJIMA; Fumiharu ;   et al. | 2016-01-14 |
Method of manufacturing semiconductor device using sidewall films for pitch multiplication in forming interconnects Grant 9,177,854 - Nakajima , et al. November 3, 2 | 2015-11-03 |
Pattern Data Generation Method, Pattern Verification Method, And Optical Image Calculation Method App 20150113485 - MIYOSHI; Seiro ;   et al. | 2015-04-23 |
Pattern data generation method, pattern verification method, and optical image calculation method Grant 8,984,454 - Miyoshi , et al. March 17, 2 | 2015-03-17 |
Design Method Of Wiring Layout, Semiconductor Device, Program For Supporting Design Of Wiring Layout, And Method For Manufacturing Semiconductor Device App 20150021782 - KODAMA; Chikaaki ;   et al. | 2015-01-22 |
Design Method Of Wiring Layout, Semiconductor Device, Program For Supporting Design Of Wiring Layout, And Method For Manufacturing Semiconductor Device App 20140183702 - KODAMA; Chikaaki ;   et al. | 2014-07-03 |
Design Method Of Wiring Layout, Semiconductor Device, Program For Supporting Design Of Wiring Layout, And Method For Manufacturing Semiconductor Device App 20140131879 - KODAMA; Chikaaki ;   et al. | 2014-05-15 |
Pattern Data Generation Method, Pattern Verification Method, And Optical Image Calculation Method App 20140059502 - MIYOSHI; Seiro ;   et al. | 2014-02-27 |
Semiconductor Device And Method Of Manufacturing The Same App 20140017887 - NAKAJIMA; Fumiharu ;   et al. | 2014-01-16 |
Pattern layout in semiconductor device Grant 08618665 - | 2013-12-31 |
Method of manufacturing semiconductor device and computer readable medium for storing pattern size setting program Grant 8,617,999 - Mashita , et al. December 31, 2 | 2013-12-31 |
Pattern layout in semiconductor device Grant 8,618,665 - Shikata , et al. December 31, 2 | 2013-12-31 |
Mask pattern generating method and computer program product Grant 8,609,303 - Kodama , et al. December 17, 2 | 2013-12-17 |
Design Method Of Wiring Layout, Semiconductor Device, Program For Supporting Design Of Wiring Layout, And Method For Manufacturing Semiconductor Device App 20130168827 - Kodama; Chikaaki ;   et al. | 2013-07-04 |
Pattern correcting method, mask forming method, and method of manufacturing semiconductor device Grant 8,443,310 - Kajiwara , et al. May 14, 2 | 2013-05-14 |
Design Data Optimization Method, Storage Medium Including Program For Design Data Optimization Method And Photomask Manufacturing Method App 20130111416 - NAKAGAWA; Shinichi ;   et al. | 2013-05-02 |
Pattern generation method, computer-readable recording medium, and semiconductor device manufacturing method Grant 8,347,241 - Nakajima , et al. January 1, 2 | 2013-01-01 |
Pattern dimension calculation method and computer program product Grant 8,336,005 - Taguchi , et al. December 18, 2 | 2012-12-18 |
Mask Inspection Method, Mask Production Method, Semiconductor Device Production Method, And Mask Inspection Device App 20120311511 - TAGUCHI; Takafumi ;   et al. | 2012-12-06 |
Pattern Correcting Method, Mask Forming Method, And Method Of Manufacturing Semiconductor Device App 20120246601 - KAJIWARA; Masanari ;   et al. | 2012-09-27 |
Semiconductor Device And Method Of Manufacturing The Same App 20120241834 - Nakajima; Fumiharu ;   et al. | 2012-09-27 |
Pattern generating method, method of manufacturing semiconductor device, and recording medium Grant 8,266,552 - Taguchi , et al. September 11, 2 | 2012-09-11 |
Method Of Manufacturing Semiconductor Device And Computer Readable Medium For Storing Pattern Size Setting Program App 20120184109 - MASHITA; Hiromitsu ;   et al. | 2012-07-19 |
Mask Pattern Generating Method, Manufacturing Method Of Semiconductor Device, And Computer Program Product App 20120183906 - KODAMA; Chikaaki ;   et al. | 2012-07-19 |
Pattern Layout In Semiconductor Device App 20120106282 - Shikata; Go ;   et al. | 2012-05-03 |
Method for manufacturing semiconductor device and computer readable medium for storing pattern size setting program Grant 8,143,171 - Mashita , et al. March 27, 2 | 2012-03-27 |
Pattern Dimension Calculation Method And Computer Program Product App 20110307845 - TAGUCHI; Takafumi ;   et al. | 2011-12-15 |
Mask Pattern Determining Method, Mask Manufacturing Method, And Device Manufacturing Method App 20110065030 - KOTANI; Toshiya ;   et al. | 2011-03-17 |
Pattern Determining Method App 20110047518 - Aiba; Issui ;   et al. | 2011-02-24 |
Semiconductor Device Including An Improved Lithographic Margin App 20100314771 - HOSOMURA; Yoshikazu ;   et al. | 2010-12-16 |
Pattern Generating Method, Method Of Manufacturing Semiconductor Device, And Computer Program Product App 20100241261 - TAGUCHI; Takafumi ;   et al. | 2010-09-23 |
Mask Verification Method, Method Of Manufacturing Semiconductor Device, And Computer Readable Medium App 20100168895 - MASHITA; Hiromitsu ;   et al. | 2010-07-01 |
Method for manufacturing semiconductor device Grant 7,713,833 - Mashita , et al. May 11, 2 | 2010-05-11 |
Method For Manufacturing Semiconductor Device App 20100081265 - Mashita; Hiromitsu ;   et al. | 2010-04-01 |
Pattern Predicting Method, Recording Media And Method Of Fabricating Semiconductor Device App 20100035168 - NAKAJIMA; Fumiharu ;   et al. | 2010-02-11 |
Design Layout Data Creating Method, Computer Program Product, And Method Of Manufacturing Semiconductor Device App 20100003819 - TAGUCHI; Takafumi ;   et al. | 2010-01-07 |
Method For Manufacturing Semiconductor Device And Computer Readable Medium For Storing Pattern Size Setting Program App 20090258503 - Mashita; Hiromitsu ;   et al. | 2009-10-15 |
Pattern Generation Method, Computer-readable Recording Medium, And Semiconductor Device Manufacturing Method App 20090186424 - Nakajima; Fumiharu ;   et al. | 2009-07-23 |
Multivalent ion generating source and charged particle beam apparatus using such ion generating source Grant 7,544,952 - Sakurai , et al. June 9, 2 | 2009-06-09 |
Source Of Generating Multicharged Ions And Charged Particle Beam Apparatus Using Such Ion Generating Source App 20080087842 - Sakurai; Makoto ;   et al. | 2008-04-17 |