Patent | Date |
---|
Nonvolatile Semiconductor Storage Device And Read Voltage Correction Method App 20220254426 - NAKAI; Shunsuke ;   et al. | 2022-08-11 |
Communication Device App 20220166448 - NAKAI; Shunsuke | 2022-05-26 |
Processing end point detection method, polishing method, and polishing apparatus Grant 10,207,390 - Shimizu , et al. Feb | 2019-02-19 |
Processing End Point Detection Method, Polishing Method, And Polishing Apparatus App 20140004773 - SHIMIZU; Noburu ;   et al. | 2014-01-02 |
Processing end point detection method, polishing method, and polishing apparatus Grant 8,554,356 - Shimizu , et al. October 8, 2 | 2013-10-08 |
Polishing state monitoring method Grant 8,342,907 - Kobayashi , et al. January 1, 2 | 2013-01-01 |
Polishing State Monitoring Apparatus And Polishing Apparatus And Method App 20100075576 - KOBAYASHI; Yoichi ;   et al. | 2010-03-25 |
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus Grant 7,675,634 - Kimba , et al. March 9, 2 | 2010-03-09 |
Processing end point detection method, polishing method,and polishing apparatus App 20100015889 - Shimizu; Noburu ;   et al. | 2010-01-21 |
Polishing state monitoring apparatus and polishing apparatus Grant 7,645,181 - Kobayashi , et al. January 12, 2 | 2010-01-12 |
Substrate polishing apparatus Grant 7,585,204 - Kobayashi , et al. September 8, 2 | 2009-09-08 |
Substrate Polishing Apparatus App 20090191790 - KOBAYASHI; Yoichi ;   et al. | 2009-07-30 |
Substrate polishing apparatus Grant 7,547,242 - Hirokawa , et al. June 16, 2 | 2009-06-16 |
Substrate polishing apparatus Grant 7,510,460 - Kobayashi , et al. March 31, 2 | 2009-03-31 |
Substrate polishing apparatus Grant 7,507,144 - Hirokawa , et al. March 24, 2 | 2009-03-24 |
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus App 20090051939 - Kimba; Toshifumi ;   et al. | 2009-02-26 |
Polishing state monitoring apparatus and polishing apparatus and method App 20090011680 - Kobayashi; Yoichi ;   et al. | 2009-01-08 |
Polishing state monitoring method Grant 7,438,627 - Kobayashi , et al. October 21, 2 | 2008-10-21 |
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus Grant 7,428,064 - Kimba , et al. September 23, 2 | 2008-09-23 |
Polishing state monitoring apparatus and polishing apparatus and method App 20070254557 - Kobayashi; Yoichi ;   et al. | 2007-11-01 |
Substrate polishing apparatus App 20070254565 - Kobayashi; Yoichi ;   et al. | 2007-11-01 |
Polishing state monitoring apparatus and polishing apparatus and method Grant 7,252,575 - Kobayashi , et al. August 7, 2 | 2007-08-07 |
Substrate polishing apparatus App 20070173177 - Hirokawa; Kazuto ;   et al. | 2007-07-26 |
Substrate polishing apparatus Grant 7,241,202 - Kobayashi , et al. July 10, 2 | 2007-07-10 |
Substrate polishing apparatus Grant 7,214,122 - Hirokawa , et al. May 8, 2 | 2007-05-08 |
Substrate polishing apparatus App 20070042679 - Hirokawa; Kazuto ;   et al. | 2007-02-22 |
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus App 20060209308 - Kimba; Toshifumi ;   et al. | 2006-09-21 |
Substrate polishing apparatus Grant 7,101,257 - Hirokawa , et al. September 5, 2 | 2006-09-05 |
Polishing state monitoring apparatus and polishing apparatus and method App 20060166606 - Kobayashi; Yoichi ;   et al. | 2006-07-27 |
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus Grant 7,072,050 - Kimba , et al. July 4, 2 | 2006-07-04 |
Substrate polishing apparatus App 20060105679 - Hirokawa; Kazuto ;   et al. | 2006-05-18 |
Substrate polishing apparatus App 20050239372 - Kobayashi, Yoichi ;   et al. | 2005-10-27 |
Substrate polishing apparatus Grant 6,942,543 - Kobayashi , et al. September 13, 2 | 2005-09-13 |
Substrate polishing apparatus App 20040242121 - Hirokawa, Kazuto ;   et al. | 2004-12-02 |
Substrate polishing apparatus App 20040235393 - Hirokawa, Kazuto ;   et al. | 2004-11-25 |
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus App 20040223166 - Kimba, Toshifumi ;   et al. | 2004-11-11 |
Substrate polishing apparatus App 20040219865 - Kobayashi, Yoichi ;   et al. | 2004-11-04 |
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus Grant 6,785,010 - Kimba , et al. August 31, 2 | 2004-08-31 |
Substrate polishing apparatus Grant 6,758,723 - Kobayashi , et al. July 6, 2 | 2004-07-06 |
Method and apparatus for measuring film thickness Grant 6,657,737 - Kimba , et al. December 2, 2 | 2003-12-02 |
Substrate polishing apparatus App 20030124957 - Kobayashi, Yoichi ;   et al. | 2003-07-03 |
Method and apparatus for measuring film thickness App 20010052987 - Kimba, Toshifumi ;   et al. | 2001-12-20 |
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus App 20010005265 - Kimba, Toshifumi ;   et al. | 2001-06-28 |