Patent | Date |
---|
Thin-film structural body, method for manufacturing thin-film structural body, and semiconductor device Grant 10,361,324 - Tanaka , et al. | 2019-07-23 |
Thin-film Structural Body, Method For Manufacturing Thin-film Structural Body, And Semiconductor Device App 20170338358 - TANAKA; HIDEKAZU ;   et al. | 2017-11-23 |
Sheet-type vibrator and acoustic apparatus Grant 8,148,879 - Andoh , et al. April 3, 2 | 2012-04-03 |
Sheet-type Vibrator And Acoustic Apparatus App 20110062829 - Andoh; Masamichi ;   et al. | 2011-03-17 |
Transparent conductive film and method for manufacturing the same Grant 7,867,636 - Nakagawara , et al. January 11, 2 | 2011-01-11 |
Transparent Conductive Film And Method For Manufacturing The Same App 20080050595 - NAKAGAWARA; Osamu ;   et al. | 2008-02-28 |
Piezoelectric thin-film resonator and process for producing same Grant 7,276,836 - Umeda , et al. October 2, 2 | 2007-10-02 |
Surface acoustic wave device Grant 7,218,039 - Hada , et al. May 15, 2 | 2007-05-15 |
Method for manufacturing surface acoustic wave device Grant 7,213,322 - Nakagawara , et al. May 8, 2 | 2007-05-08 |
Method for manufacturing a surface acoustic wave device with a piezoelectric substrate Grant 7,146,695 - Nakagawara , et al. December 12, 2 | 2006-12-12 |
Surface acoustic wave device Grant 7,141,909 - Hada , et al. November 28, 2 | 2006-11-28 |
Surface acoustic wave device App 20060158069 - Hada; Takuo ;   et al. | 2006-07-20 |
Piezoelectric thin-film resonator and process for producing same App 20060119230 - Umeda; Keiichi ;   et al. | 2006-06-08 |
Surface acoustic wave device and manufacturing method therefor App 20050057121 - Nakagawara, Osamu ;   et al. | 2005-03-17 |
Surface acoustic wave device App 20040256950 - Hada, Takuo ;   et al. | 2004-12-23 |
Surface acoustic wave device and manufacturing method therefor Grant 6,822,371 - Nakagawara , et al. November 23, 2 | 2004-11-23 |
Method for manufacturing surface acoustic wave device App 20040200054 - Nakagawara, Osamu ;   et al. | 2004-10-14 |
Surface acoustic wave device with improved electrode Grant 6,630,767 - Inoue , et al. October 7, 2 | 2003-10-07 |
Surface acoustic wave device and manufacturing method therefor App 20030132684 - Nakagawara, Osamu ;   et al. | 2003-07-17 |
Surface acoustic wave device and method of manufacturing the same App 20020008437 - Inoue, Kazuhiro ;   et al. | 2002-01-24 |
Method of manufacturing an electronic part having an air-bridge interconnection Grant 6,060,381 - Nakagawara , et al. May 9, 2 | 2000-05-09 |