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Patent applications and USPTO patent grants for NAKAGAWA; Yoshitomo.The latest application filed is for "focused ion beam processing apparatus".
Patent | Date |
---|---|
Focused Ion Beam Processing Apparatus App 20210296080 - OBA; Hiroshi ;   et al. | 2021-09-23 |
Mask Defect Repair Apparatus And Mask Defect Repair Method App 20200310246 - NAKAGAWA; Yoshitomo ;   et al. | 2020-10-01 |
Heat transfer system for an inductively coupled plasma device Grant 9,820,370 - Nakagawa , et al. November 14, 2 | 2017-11-14 |
Stabilized ICP emission spectrometer and method of using Grant 9,726,611 - Nakagawa August 8, 2 | 2017-08-08 |
Inductively Coupled Plasma Generating Device and Inductively Coupled Plasma Analysis Device App 20160270201 - Nakagawa; Yoshitomo ;   et al. | 2016-09-15 |
ICP Emission Spectrometer App 20150276611 - Nakagawa; Yoshitomo | 2015-10-01 |
Composite focused ion beam device, process observation method using the same, and processing method Grant 8,274,063 - Kaito , et al. September 25, 2 | 2012-09-25 |
Composite Focused Ion Beam Device, Process Observation Method Using The Same,and Processing Method App 20100288924 - Kaito; Takashi ;   et al. | 2010-11-18 |
Focused ion beam apparatus Grant 7,755,065 - Nakagawa , et al. July 13, 2 | 2010-07-13 |
Focused Ion Beam Apparatus App 20080308741 - Nakagawa; Yoshitomo ;   et al. | 2008-12-18 |
ICP analyzer App 20020001540 - Nakagawa, Yoshitomo ;   et al. | 2002-01-03 |
Inductively coupled plasma mass spectrometer Grant 5,477,048 - Nakagawa , et al. December 19, 1 | 1995-12-19 |
Inductively coupled plasma mass spectrometry device Grant 5,334,834 - Ito , et al. August 2, 1 | 1994-08-02 |
Inductively coupled plasma mass spectrometry apparatus Grant 4,999,492 - Nakagawa March 12, 1 | 1991-03-12 |
Mask-repairing device Grant 4,930,439 - Sato , et al. June 5, 1 | 1990-06-05 |
Method of correcting a pattern film Grant 4,902,530 - Yasaka , et al. February 20, 1 | 1990-02-20 |
Process for forming pattern film Grant 4,874,632 - Nakagawa , et al. October 17, 1 | 1989-10-17 |
Method and apparatus for modifying patterned film Grant 4,874,460 - Nakagawa , et al. October 17, 1 | 1989-10-17 |
Apparatus for repairing a pattern film Grant 4,851,097 - Hattori , et al. July 25, 1 | 1989-07-25 |
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