Nakagawa; Chiaki
Patent Applications and Registrations
Patent applications and USPTO patent grants for Nakagawa; Chiaki.The latest application filed is for "exposure apparatus and device manufacturing method".
- Nakagawa; Chiaki - Kumagaya JP
- Nakagawa; Chiaki - Saitamaken JP
- Nakagawa; Chiaki - Saitama-ken JP
| Patent | Date |
|---|---|
| Exposure method and device manufacturing method, exposure apparatus, and program Grant 7,817,242 - Kawakubo , et al. October 19, 2 | 2010-10-19 |
| Exposure Apparatus and Device Manufacturing Method App 20080100811 - Nakagawa; Chiaki | 2008-05-01 |
| Exposure method and device manufacturing method, exposure apparatus, and program App 20070109524 - Kawakubo; Masaharu ; et al. | 2007-05-17 |
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