| Patent | Date |
|---|
Method for measuring overlay and measuring apparatus, scanning electron microscope, and GUI
Grant 10,783,625 - Harada , et al. Sept | 2020-09-22 |
Defect classification apparatus and defect classification method
Grant 10,203,851 - Minekawa , et al. Feb | 2019-02-12 |
Method For Measuring Overlay And Measuring Apparatus, Scanning Electron Microscope, And Gui
App 20180025482 - HARADA; Minoru ; et al. | 2018-01-25 |
Defect observation method and defect observation device
Grant 9,811,897 - Harada , et al. November 7, 2 | 2017-11-07 |
Method for measuring overlay and measuring apparatus, scanning electron microscope, and GUI
Grant 9,799,112 - Harada , et al. October 24, 2 | 2017-10-24 |
Charged-particle radiation apparatus
Grant 9,685,301 - Hirai , et al. June 20, 2 | 2017-06-20 |
Defect analysis assistance device, program executed by defect analysis assistance device, and defect analysis system
Grant 9,582,875 - Hirai , et al. February 28, 2 | 2017-02-28 |
Defect observation method and defect observation device
Grant 9,569,836 - Hirai , et al. February 14, 2 | 2017-02-14 |
Defect classification method, and defect classification system
Grant 9,401,015 - Minekawa , et al. July 26, 2 | 2016-07-26 |
Method and device for testing defect using SEM
Grant 9,390,490 - Takagi , et al. July 12, 2 | 2016-07-12 |
Method and apparatus for reviewing defect
Grant 9,342,879 - Minekawa , et al. May 17, 2 | 2016-05-17 |
Region-of-interest determination apparatus, observation tool or inspection tool, region-of-interest determination method, and observation method or inspection method using region-of-interest determination method
Grant 9,335,277 - Nakagaki , et al. May 10, 2 | 2016-05-10 |
Inspection method and device therefor
Grant 9,311,697 - Harada , et al. April 12, 2 | 2016-04-12 |
Defect Observation Method And Defect Observation Device
App 20150332445 - HARADA; Minoru ; et al. | 2015-11-19 |
Defect Observation Method and Defect Observation Device
App 20150302568 - HIRAI; Takehiro ; et al. | 2015-10-22 |
Charged-Particle Radiation Apparatus
App 20150279614 - Hirai; Takehiro ; et al. | 2015-10-01 |
Defect observation method and device using SEM
Grant 9,082,585 - Kotaki , et al. July 14, 2 | 2015-07-14 |
Charged particle beam apparatus
Grant 9,040,937 - Yamaguchi , et al. May 26, 2 | 2015-05-26 |
Defect Analysis Assistance Device, Program Executed By Defect Analysis Assistance Device, And Defect Analysis System
App 20150139531 - Hirai; Takehiro ; et al. | 2015-05-21 |
Charged Particle Beam Apparatus
App 20150060667 - Yamaguchi; Kohei ; et al. | 2015-03-05 |
Method For Measuring Overlay And Measuring Apparatus, Scanning Electron Microscope, And Gui
App 20140375793 - Harada; Minoru ; et al. | 2014-12-25 |
Gui, Classification Apparatus, Classification Method, Program, And Storage Medium Storing The Classification Program
App 20140331173 - Minekawa; Yohei ; et al. | 2014-11-06 |
Defect observation method and defect observation device
Grant 8,824,773 - Minekawa , et al. September 2, 2 | 2014-09-02 |
Method and Apparatus for Reviewing Defect
App 20140219546 - Minekawa; Yohei ; et al. | 2014-08-07 |
Region-of-interest Determination Apparatus, Observation Tool Or Inspection Tool, Region-of-interest Determination Method, And Observation Method Or Inspection Method Using Region-of-interest Determination Method
App 20140198975 - Nakagaki; Ryo ; et al. | 2014-07-17 |
Recipe Generation Apparatus, Inspection Support Apparatus, Inspection System, And Recording Media
App 20140177940 - Nakagaki; Ryo ; et al. | 2014-06-26 |
Method and apparatus for reviewing defects
Grant 8,731,275 - Harada , et al. May 20, 2 | 2014-05-20 |
Defect Classification Method, And Defect Classification System
App 20140072204 - Minekawa; Yohei ; et al. | 2014-03-13 |
Defect Review Method And Apparatus
App 20140037188 - Nakagaki; Ryo ; et al. | 2014-02-06 |
Defect observation method and defect observation apparatus
Grant 8,634,634 - Harada , et al. January 21, 2 | 2014-01-21 |
Method and apparatus for reviewing defects of semiconductor device
Grant 8,581,976 - Kurihara , et al. November 12, 2 | 2013-11-12 |
Image Classification Method And Image Classification Apparatus
App 20130294680 - Harada; Minoru ; et al. | 2013-11-07 |
Defect review method and apparatus
Grant 8,526,710 - Nakagaki , et al. September 3, 2 | 2013-09-03 |
Defect Classification System And Defect Classification Device And Imaging Device
App 20130222574 - Nakagaki; Ryo ; et al. | 2013-08-29 |
Defect Observation Method And Defect Observation Device
App 20130140457 - Minekawa; Yohei ; et al. | 2013-06-06 |
Defect classifier using classification recipe based on connection between rule-based and example-based classifiers
Grant 8,452,076 - Nakagaki , et al. May 28, 2 | 2013-05-28 |
Method And Apparatus For Reviewing Defects
App 20130114881 - HARADA; Minoru ; et al. | 2013-05-09 |
Inspection Method And Device Therefor
App 20130108147 - Harada; Minoru ; et al. | 2013-05-02 |
Inspecting method, inspecting system, and method for manufacturing electronic devices
Grant 8,428,336 - Ikeda , et al. April 23, 2 | 2013-04-23 |
Method And Device For Testing Defect Using Sem
App 20130070078 - Takagi; Yuji ; et al. | 2013-03-21 |
Method and apparatus for reviewing defects
Grant 8,355,559 - Harada , et al. January 15, 2 | 2013-01-15 |
Method For Defect Inspection And Apparatus For Defect Inspection
App 20120257041 - Nakagaki; Ryo ; et al. | 2012-10-11 |
Defect Classifier Using Classification Recipe Based On Connection Between Rule-based And Example-based Classifiers
App 20120128233 - NAKAGAKI; Ryo ; et al. | 2012-05-24 |
Defect classifier using classification recipe based on connection between rule-based and example-based classifiers
Grant 8,150,141 - Nakagaki , et al. April 3, 2 | 2012-04-03 |
Method and its apparatus for reviewing defects
Grant 8,121,397 - Harada , et al. February 21, 2 | 2012-02-21 |
Method and apparatus for reviewing defects
Grant 8,090,190 - Nakagaki , et al. January 3, 2 | 2012-01-03 |
Defect Observation Method And Defect Observation Apparatus
App 20110299760 - Harada; Minoru ; et al. | 2011-12-08 |
Defect Observation Method And Device Using Sem
App 20110285839 - Kotaki; Go ; et al. | 2011-11-24 |
Defect Classifier Using Classification Recipe Based On Connection Between Rule-based And Example-based Classifiers
App 20110268345 - NAKAGAKI; Ryo ; et al. | 2011-11-03 |
Defect Observation Device And Defect Observation Method
App 20110261190 - Nakagaki; Ryo ; et al. | 2011-10-27 |
Defect classifier using classification recipe based on connection between rule-based and example-based classifiers
Grant 7,991,217 - Nakagaki , et al. August 2, 2 | 2011-08-02 |
Method and Apparatus For Reviewing Defects of Semiconductor Device
App 20110102573 - KURIHARA; Masaki ; et al. | 2011-05-05 |
Method and system for observing a specimen using a scanning electron microscope
Grant 7,932,493 - Harada , et al. April 26, 2 | 2011-04-26 |
Method and apparatus for reviewing defects of semiconductor device
Grant 7,873,202 - Kurihara , et al. January 18, 2 | 2011-01-18 |
Scanning electron microscope and system for inspecting semiconductor device
Grant 7,834,317 - Nakagaki , et al. November 16, 2 | 2010-11-16 |
Method And Apparatus For Reviewing Defects
App 20100128970 - NAKAGAKI; Ryo ; et al. | 2010-05-27 |
Method and apparatus for reviewing defects
Grant 7,657,078 - Nakagaki , et al. February 2, 2 | 2010-02-02 |
Method And Apparatus For Reviewing Defects
App 20090268959 - Harada; Minoru ; et al. | 2009-10-29 |
Method And Its Apparatus For Reviewing Defects
App 20090252403 - Harada; Minoru ; et al. | 2009-10-08 |
SEM-type reviewing apparatus and a method for reviewing defects using the same
Grant 7,598,490 - Kurihara , et al. October 6, 2 | 2009-10-06 |
Defect review method and apparatus
App 20090136121 - Nakagaki; Ryo ; et al. | 2009-05-28 |
Method and system for observing a specimen using a scanning electron microscope
App 20090084953 - Harada; Minoru ; et al. | 2009-04-02 |
Method for controlling charged particle beam, and charged particle beam apparatus
Grant 7,511,272 - Kawada , et al. March 31, 2 | 2009-03-31 |
Method for measuring three dimensional shape of a fine pattern
Grant 7,483,560 - Shishido , et al. January 27, 2 | 2009-01-27 |
Sample dimension-measuring method and charged particle beam apparatus
Grant 7,476,856 - Watanabe , et al. January 13, 2 | 2009-01-13 |
Method and its apparatus for reviewing defects
App 20080298670 - Nakagaki; Ryo ; et al. | 2008-12-04 |
Defect Image Classifying Method and Apparatus and a Semiconductor Device Manufacturing Process Based on the Method and Apparatus
App 20080187212 - OBARA; Kenji ; et al. | 2008-08-07 |
Measuring method and its apparatus
Grant 7,408,155 - Oosaki , et al. August 5, 2 | 2008-08-05 |
Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system
Grant 7,399,964 - Shishido , et al. July 15, 2 | 2008-07-15 |
Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus
Grant 7,356,177 - Obara , et al. April 8, 2 | 2008-04-08 |
Sem-type Reviewing Apparatus And A Method For Reviewing Defects Using The Same
App 20080067371 - Kurihara; Masaki ; et al. | 2008-03-20 |
Method and apparatus for reviewing defects
App 20070201739 - Nakagaki; Ryo ; et al. | 2007-08-30 |
System and method for evaluating a semiconductor device pattern, method for controlling process of forming a semiconductor device pattern and method for monitoring a semiconductor device manufacturing process
Grant 7,216,311 - Tanaka , et al. May 8, 2 | 2007-05-08 |
Method for controlling charged particle beam, and charged particle beam apparatus
App 20070085020 - Kawada; Hiroki ; et al. | 2007-04-19 |
Method and apparatus for reviewing defects of semiconductor device
App 20070031026 - Kurihara; Masaki ; et al. | 2007-02-08 |
Scanning electron microscope and a method for evaluating accuracy of repeated measurement using the same
Grant 7,164,127 - Nakagaki , et al. January 16, 2 | 2007-01-16 |
Method for controlling charged particle beam, and charged particle beam apparatus
Grant 7,154,090 - Kawada , et al. December 26, 2 | 2006-12-26 |
Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus
App 20060274933 - Obara; Kenji ; et al. | 2006-12-07 |
Inspecting method, inspecting system, and method for manufacturing electronic devices
App 20060274932 - Ikeda; Yoko ; et al. | 2006-12-07 |
Method and apparatus for reviewing defects
App 20060215901 - Nakagaki; Ryo ; et al. | 2006-09-28 |
Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus
Grant 7,113,628 - Obara , et al. September 26, 2 | 2006-09-26 |
Inspecting method, inspecting system, and method for manufacturing electronic devices
Grant 7,068,834 - Ikeda , et al. June 27, 2 | 2006-06-27 |
Scanning electron microscope and system for inspecting semiconductor device
App 20060108525 - Nakagaki; Ryo ; et al. | 2006-05-25 |
Transmission electron microscope system and method of inspecting a specimen using the same
Grant 7,034,299 - Nakagaki , et al. April 25, 2 | 2006-04-25 |
Mesuring method and its apparatus
App 20060060774 - Oosaki; Mayuka ; et al. | 2006-03-23 |
Method for controlling charged particle beam, and charged particle beam apparatus
App 20050253067 - Kawada, Hiroki ; et al. | 2005-11-17 |
Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system
App 20050247860 - Shishido, Chie ; et al. | 2005-11-10 |
Scanning electron microscope and a method for evaluating accuracy of repeated measurement using the same
App 20050205780 - Nakagaki, Ryo ; et al. | 2005-09-22 |
Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device
Grant 6,913,861 - Shishido , et al. July 5, 2 | 2005-07-05 |
Method for measuring three dimensional shape of a fine pattern
App 20050100205 - Shishido, Chle ; et al. | 2005-05-12 |
Transmission electron microscope system and method of inspecting a specimen using the same
App 20050051725 - Nakagaki, Ryo ; et al. | 2005-03-10 |
Sample dimension-measuring method and charged particle beam apparatus
App 20050051721 - Watanabe, Kenji ; et al. | 2005-03-10 |
Method of setting etching parameters and system therefor
App 20050016682 - Nagatomo, Wataru ; et al. | 2005-01-27 |
System and method for evaluating a semiconductor device pattern, method for controlling process of forming a semiconductor device pattern and method for monitoring a semiconductor device manufacturing process
App 20040156223 - Tanaka, Maki ; et al. | 2004-08-12 |
Method and system for manufacturing a semiconductor device
App 20040147121 - Nakagaki, Ryo ; et al. | 2004-07-29 |
Image classification method, observation method, and apparatus thereof with different stage moving velocities
Grant 6,657,221 - Nakagaki , et al. December 2, 2 | 2003-12-02 |
Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device
App 20030219658 - Shishido, Chie ; et al. | 2003-11-27 |
Image classification method, obervation method, and apparatus thereof
App 20020171051 - Nakagaki, Ryo ; et al. | 2002-11-21 |
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