Patent | Date |
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Three Dimensional Microstructures With Selectively Removed Regions For Use In Gyroscopes And Other Devices App 20220090917 - NAJAFI; Khalil ;   et al. | 2022-03-24 |
Thermal control mold for making three-dimensional microstructures Grant 11,027,479 - Najafi , et al. June 8, 2 | 2021-06-08 |
Thermoelectric Micro-Module With High Leg Density For Energy Harvesting And Cooling Applications App 20210159381 - NAJAFI; Khalil ;   et al. | 2021-05-27 |
Vibrational energy harvester with amplifier having gear assembly Grant 10,985,633 - Shahosseini , et al. April 20, 2 | 2021-04-20 |
Gyroscope And Fabrication Process App 20200277215 - NAJAFI; Khalil ;   et al. | 2020-09-03 |
Three dimensional microstructures and fabrication process Grant 10,730,748 - Najafi , et al. | 2020-08-04 |
Electromagnetic energy transducer Grant 10,734,877 - Shahosseini , et al. | 2020-08-04 |
Three Dimensional Microstructures And Fabrication Process App 20200216311 - NAJAFI; Khalil ;   et al. | 2020-07-09 |
Assembly processes for three-dimensional microstructures Grant 10,612,925 - Najafi , et al. | 2020-04-07 |
Stacked balanced resonators Grant 10,598,491 - Najafi , et al. | 2020-03-24 |
Modular stacked variable-compression micropump and method of making same Grant 10,563,642 - Najafi , et al. Feb | 2020-02-18 |
Gyroscope and fabrication process Grant 10,532,943 - Najafi , et al. Ja | 2020-01-14 |
Capacitive-based transducer with high aspect ratio Grant 10,524,059 - Najafi , et al. Dec | 2019-12-31 |
Probe Array And Method Of Manufacture App 20190388678 - Najafi; Khalil ;   et al. | 2019-12-26 |
High aspect-ratio low noise multi-axis accelerometers Grant 10,495,663 - Najafi , et al. De | 2019-12-03 |
Environment-resistant module, micropackage and methods of manufacturing same Grant 10,266,392 - Najafi , et al. | 2019-04-23 |
Multi-axis piezoelectric transducer Grant 10,263,173 - Najafi , et al. | 2019-04-16 |
Full-wave charge pump with low-voltage startup Grant 10,250,235 - Najafi , et al. | 2019-04-02 |
Assembly Processes For Three-dimensional Microstructures App 20190094024 - NAJAFI; Khalil ;   et al. | 2019-03-28 |
Thermoelectric Micro-module With High Leg Density For Energy Harvesting And Cooling Applications App 20190058103 - NAJAFI; Khalil ;   et al. | 2019-02-21 |
Capacitive-based Transducer With High Aspect Ratio App 20180359570 - NAJAFI; Khalil ;   et al. | 2018-12-13 |
Stacked Balanced Resonators App 20180283866 - NAJAFI; Khalil ;   et al. | 2018-10-04 |
High Aspect-Ratio Low Noise Multi-Axis Accelerometers App 20180113146 - NAJAFI; Khalil ;   et al. | 2018-04-26 |
Thermal Control Mold For Making Three-Dimensional Microstructures App 20180079129 - NAJAFI; Khalil ;   et al. | 2018-03-22 |
Actuation and sensing platform for sensor calibration and vibration isolation Grant 9,874,459 - Najafi , et al. January 23, 2 | 2018-01-23 |
Modular Stacked Variable-Compression Micropump and Method of Making Same App 20170363076 - NAJAFI; Khalil ;   et al. | 2017-12-21 |
Three dimensional microstructures and fabrication process Grant 9,796,586 - Najafi , et al. October 24, 2 | 2017-10-24 |
Microsystem device and methods for fabricating the same Grant 9,778,039 - Najafi , et al. October 3, 2 | 2017-10-03 |
Gyroscope And Fabrication Process App 20170248422 - NAJAFI; Khalil ;   et al. | 2017-08-31 |
Full-Wave Charge Pump With Low-Voltage Startup App 20170155379 - NAJAFI; Khalil ;   et al. | 2017-06-01 |
Electromagnetic Energy Transducer App 20170126110 - SHAHOSSEINI; Iman ;   et al. | 2017-05-04 |
Mechanical Amplifier For Energy Harvester App 20170117775 - SHAHOSSEINI; Iman ;   et al. | 2017-04-27 |
Micro-hydraulic device Grant 9,502,995 - Najafi , et al. November 22, 2 | 2016-11-22 |
Gyroscope and method of fabricating a resonator for a gyroscope Grant 9,494,425 - Najafi , et al. November 15, 2 | 2016-11-15 |
Actuation And Sensing Platform For Sensor Calibration And Vibration Isolation App 20160245667 - NAJAFI; Khalil ;   et al. | 2016-08-25 |
Fluid flow sensor Grant 9,400,197 - Najafi , et al. July 26, 2 | 2016-07-26 |
Multi-Axis Piezoelectric Transducer App 20160211439 - Najafi; Khalil ;   et al. | 2016-07-21 |
Three Dimensional Microstructures And Fabrication Process App 20160194200 - NAJAFI; Khalil ;   et al. | 2016-07-07 |
Environment-resistant Module, Micropackage And Methods Of Manufacturing Same App 20160159641 - NAJAFI; Khalil ;   et al. | 2016-06-09 |
Probes having deployable sites and methods for making the same Grant 9,265,465 - Najafi , et al. February 23, 2 | 2016-02-23 |
Fluid Flow Sensor App 20150253169 - Najafi; Khalil ;   et al. | 2015-09-10 |
Three-dimensional Microelectromechanical Systems Structure App 20140283604 - Najafi; Khalil ;   et al. | 2014-09-25 |
Micro-hydraulic Device App 20140224656 - Najafi; Khalil ;   et al. | 2014-08-14 |
Increased frequency power generation using low-frequency ambient vibrations Grant 8,796,907 - Galchev , et al. August 5, 2 | 2014-08-05 |
Environment-resistant module, micropackage and methods of manufacturing same Grant 8,698,292 - Najafi , et al. April 15, 2 | 2014-04-15 |
Environment-resistant Module, Micropackage And Methods Of Manufacturing Same App 20130285171 - Najafi; Khalil ;   et al. | 2013-10-31 |
Environment-resistant module, micropackage and methods of manufacturing same Grant 8,476,737 - Najafi , et al. July 2, 2 | 2013-07-02 |
Gyroscope And Method Of Fabricating A Resonator For A Gyroscope App 20130160578 - Najafi; Khalil ;   et al. | 2013-06-27 |
Microsystem Device And Methods For Fabricating The Same App 20130105921 - Najafi; Khalil ;   et al. | 2013-05-02 |
Probes Having Deployable Sites And Methods For Making The Same App 20120310067 - Najafi; Khalil ;   et al. | 2012-12-06 |
Method of making a thin film device Grant 8,209,857 - Najafi , et al. July 3, 2 | 2012-07-03 |
Environment-resistant Module, Micropackage And Methods Of Manufacturing Same App 20120032346 - Najafi; Khalil ;   et al. | 2012-02-09 |
Environment-resistant module, micropackage and methods of manufacturing same Grant 8,049,326 - Najafi , et al. November 1, 2 | 2011-11-01 |
Increased Frequency Power Generation Using Low-frequency Ambient Vibrations App 20110140577 - Galchev; Tzeno ;   et al. | 2011-06-16 |
Demodulator, chip and method for digitally demodulating an FSK signal Grant 7,881,409 - Ghovanloo , et al. February 1, 2 | 2011-02-01 |
Thin-Film Device and Method of Fabricating The Same App 20110012478 - Najafi; Khalil ;   et al. | 2011-01-20 |
Method and micro power generator for generating electrical power from low frequency vibrational energy Grant 7,579,757 - Kulah , et al. August 25, 2 | 2009-08-25 |
Liquid-gap Electrostatic Hydraulic Micro Actuators App 20090115285 - Najafi; Khalil ;   et al. | 2009-05-07 |
Environment-Resistant Module, Micropackage And Methods Of Manufacturing Same App 20090085191 - Najafi; Khalil ;   et al. | 2009-04-02 |
Demodulator, Chip And Method For Digital Demodulating An Fsk Signal App 20080169872 - Ghovanloo; Maysam ;   et al. | 2008-07-17 |
Method and Micro Power Generator For Generating Electrical Power From Low Frequency Vibrational Energy App 20080136562 - Kulah; Haluk ;   et al. | 2008-06-12 |
Method of fabricating a package with substantially vertical feedthroughs for micromachined or MEMS devices Grant 7,098,117 - Najafi , et al. August 29, 2 | 2006-08-29 |
Low temperature method for forming a microcavity on a substrate and article having same Grant 7,029,829 - Stark , et al. April 18, 2 | 2006-04-18 |
Micropump assembly for a microgas chromatograph and the like Grant 7,008,193 - Najafi , et al. March 7, 2 | 2006-03-07 |
Method of making a thick microstructural oxide layer Grant 6,962,831 - Najafi , et al. November 8, 2 | 2005-11-08 |
Multi-substrate package and method for assembling same Grant 6,958,531 - Ucok , et al. October 25, 2 | 2005-10-25 |
Low-temperature patterned wafer bonding with photosensitive benzocyclobutene (BCB) and 3D MEMS (microelectromechanical systems) structure fabrication Grant 6,942,750 - Chou , et al. September 13, 2 | 2005-09-13 |
Micromachined capacitive lateral accelerometer device and monolithic, three-axis accelerometer having same Grant 6,938,484 - Najafi , et al. September 6, 2 | 2005-09-06 |
Method of joining an insulator element to a substrate Grant 6,939,778 - Harpster , et al. September 6, 2 | 2005-09-06 |
Multi-substrate Package And Method For Assembling Same App 20050121763 - Ucok, Asli B. ;   et al. | 2005-06-09 |
Shatter-resistant microprobes App 20050107742 - Ghovanloo, Maysam ;   et al. | 2005-05-19 |
Method of fabricating a device having a desired non-planar surface or profile and device produced thereby Grant 6,884,732 - Najafi , et al. April 26, 2 | 2005-04-26 |
Micromachined capacitive lateral accelerometer device and monolithic, three-axis accelerometer having same App 20040182155 - Najafi, Khalil ;   et al. | 2004-09-23 |
Manufacturing methods and vacuum or hermetically packaged micromachined or MEMS devices formed thereby having substantially vertical feedthroughs App 20040152229 - Najafi, Khalil ;   et al. | 2004-08-05 |
Single-side microelectromechanical capacitive accelerometer and method of making same Grant 6,718,605 - Yazdi , et al. April 13, 2 | 2004-04-13 |
Bonding methods and articles produced thereby App 20040029336 - Harpster, Timothy J. ;   et al. | 2004-02-12 |
Low temperature method for forming a microcavity on a substrate and article having same App 20040028849 - Stark, Brian H. ;   et al. | 2004-02-12 |
Micropump assembly for a microgas chromatograph and the like App 20030231967 - Najafi, Khalil ;   et al. | 2003-12-18 |
Method of making a thick microstructural oxide layer and device utilizing same App 20030224565 - Najafi, Khalil ;   et al. | 2003-12-04 |
Method of fabricating a device having a desired non-planar surface or profile and device produced thereby App 20030139014 - Najafi, Khalil ;   et al. | 2003-07-24 |
Low-temperature patterned wafer bonding with photosensitive benzocyclobutene (BCB) and 3D MEMS (microelectromechanical systems) structure fabrication App 20020195673 - Chou, Tsung-Kuan A. ;   et al. | 2002-12-26 |
Circuit encapsulation technique utilizing electroplating App 20020185712 - Stark, Brian ;   et al. | 2002-12-12 |
Microstructures Grant 6,436,853 - Lin , et al. August 20, 2 | 2002-08-20 |
Microelectromechanical capactive accelerometer and method of making same Grant 6,402,968 - Yazdi , et al. June 11, 2 | 2002-06-11 |
Single-side microelectromechanical capacitive accelerometer and method of making same App 20010042404 - Yazdi, Navid ;   et al. | 2001-11-22 |
Process for making microstructures and microstructures made thereby App 20010021570 - Lin, Liwei ;   et al. | 2001-09-13 |
Single-side microelectromechanical capacitive acclerometer and method of making same Grant 6,286,369 - Yazdi , et al. September 11, 2 | 2001-09-11 |
Process for making microstructures and microstructures made thereby Grant 6,232,150 - Lin , et al. May 15, 2 | 2001-05-15 |
Single-side microelectromechanical capacitive accelerometer and method of making same Grant 6,167,757 - Yazdi , et al. January 2, 2 | 2001-01-02 |
Microelectromechanical capacitive accelerometer and method of making same Grant 6,035,714 - Yazdi , et al. March 14, 2 | 2000-03-14 |
Single channel microstimulator Grant 5,314,458 - Najafi , et al. May 24, 1 | 1994-05-24 |
Thermopile infrared detector with semiconductor supporting rim Grant 5,100,479 - Wise , et al. March 31, 1 | 1992-03-31 |
Method of manufacturing thermopile infrared detector Grant 5,059,543 - Wise , et al. October 22, 1 | 1991-10-22 |