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Patent applications and USPTO patent grants for Naito; Michiya.The latest application filed is for "metal-containing onium salt compound, photodegradable base, resist composition, and method for manufacturing device using said r".
Patent | Date |
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Metal-containing onium salt compound, photodegradable base, resist composition, and method for manufacturing device using said resist composition Grant 11,347,147 - Naito , et al. May 31, 2 | 2022-05-31 |
Photosensitive compound, photoacid generator and resist composition containing the photosensitive compound, and method for manufacturing device using the resist composition Grant 11,048,166 - Naito , et al. June 29, 2 | 2021-06-29 |
Metal-containing Onium Salt Compound, Photodegradable Base, Resist Composition, And Method For Manufacturing Device Using Said R App 20190243243 - NAITO; Michiya ;   et al. | 2019-08-08 |
Photosensitive Compound, Photoacid Generator And Resist Composition Containing The Photosensitive Compound, And Method For Manuf App 20190243238 - NAITO; Michiya ;   et al. | 2019-08-08 |
Manufacturing method of polymer Grant 9,850,334 - Kawakami , et al. December 26, 2 | 2017-12-26 |
Manufacturing Method Of Polymer App 20170037169 - KAWAKAMI; Yuki ;   et al. | 2017-02-09 |
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