Patent | Date |
---|
Polymer, resist material and patterning processing Grant 7,157,207 - Funatsu , et al. January 2, 2 | 2007-01-02 |
Polymer, resist material and patterning processing App 20050089796 - Funatsu, Kenji ;   et al. | 2005-04-28 |
Resist composition and patterning process Grant 6,830,866 - Kobayashi , et al. December 14, 2 | 2004-12-14 |
Resist composition and patterning method Grant 6,818,148 - Watanabe , et al. November 16, 2 | 2004-11-16 |
High molecular weight silicone compounds, resist compositions, and patterning method Grant 6,730,453 - Nakashima , et al. May 4, 2 | 2004-05-04 |
Polymer, resist composition and patterning process Grant 6,703,183 - Nishi , et al. March 9, 2 | 2004-03-09 |
Resist composition and patterning process Grant 6,641,975 - Takeda , et al. November 4, 2 | 2003-11-04 |
Resist composition and patterning process Grant 6,605,408 - Nishi , et al. August 12, 2 | 2003-08-12 |
Polymer, resist composition and patterning process App 20030091929 - Nishi, Tsunehiro ;   et al. | 2003-05-15 |
Resist composition and patterning process App 20030013039 - Kobayashi, Tomohiro ;   et al. | 2003-01-16 |
Onium salts, photoacid generators for resist compositions, resist compositions, and patterning process Grant 6,440,634 - Ohsawa , et al. August 27, 2 | 2002-08-27 |
Onium salts, photoacid generators, resist compositions, and patterning process Grant 6,416,928 - Ohsawa , et al. July 9, 2 | 2002-07-09 |
Resist compositions and patterning process Grant 6,395,446 - Seki , et al. May 28, 2 | 2002-05-28 |
High molecular weight silicone compounds, resist compositions, and patterning method App 20020058205 - Nakashima, Mutsuo ;   et al. | 2002-05-16 |
Resist composition and patterning process App 20020039701 - Takeda, Takanobu ;   et al. | 2002-04-04 |
Resist compositions and patterning process Grant 6,338,931 - Maeda , et al. January 15, 2 | 2002-01-15 |
Resist composition and patterning process App 20020001772 - Nishi, Tsunehiro ;   et al. | 2002-01-03 |
Polymers and chemically amplified positive resist compositions Grant 6,156,477 - Motomi , et al. December 5, 2 | 2000-12-05 |
Chemically amplified positive resist composition, pattern forming method, and method for preparing polymer having a crosslinking group Grant 6,114,462 - Watanabe , et al. September 5, 2 | 2000-09-05 |
Polymeric compounds, chemically amplified positive type resist materials and process for pattern formation Grant 6,048,661 - Nishi , et al. April 11, 2 | 2000-04-11 |
Partially hydrogenated polymers and chemically amplified positive resist compositions Grant 6,033,828 - Shimada , et al. March 7, 2 | 2000-03-07 |
Di- and triphenyl monoterpene hydrocarbon derivatives, dissolution inhibitors, and chemically amplified positive resist compositions Grant 6,030,746 - Nagata , et al. February 29, 2 | 2000-02-29 |
High molecular weight silicone compound, chemically amplified positive resist composition and patterning method Grant 5,972,560 - Kaneko , et al. October 26, 1 | 1999-10-26 |
Chemically amplified positive resist composition, pattern forming method, and method for preparing polymer having a crosslinking group Grant 5,942,367 - Watanabe , et al. August 24, 1 | 1999-08-24 |
Chemically amplified positive resist composition Grant 5,882,844 - Tsuchiya , et al. March 16, 1 | 1999-03-16 |
Sulfonium salts and chemically amplified positive resist compositions Grant 5,880,169 - Osawa , et al. March 9, 1 | 1999-03-09 |
Bisphenol carboxylic acid tertiary ester derivatives and chemically amplified positive resist compositions Grant 5,856,561 - Nagata , et al. January 5, 1 | 1999-01-05 |
Chemically amplified positive resist composition Grant 5,849,461 - Hatakeyama , et al. December 15, 1 | 1998-12-15 |
Sulfonium salts and chemically amplified positive resist compositions Grant 5,847,218 - Ohsawa , et al. December 8, 1 | 1998-12-08 |
Chemically amplified positive resist composition Grant 5,750,309 - Hatakeyama , et al. May 12, 1 | 1998-05-12 |
Process for preparation of purified xanthan gum Grant 5,705,368 - Murofushi , et al. January 6, 1 | 1998-01-06 |
Process for the recovery and purification of xanthan gum Grant 5,679,556 - Homma , et al. October 21, 1 | 1997-10-21 |
Siloxane-containing pullulan and method for the preparation thereof Grant 5,583,244 - Uchida , et al. December 10, 1 | 1996-12-10 |
Modified xanthan gum and method for modifying xanthan gum Grant 5,416,206 - Nagura , et al. May 16, 1 | 1995-05-16 |
Sustained-release pheromone dispenser Grant 4,923,119 - Yamamoto , et al. May 8, 1 | 1990-05-08 |
Sustained-release dispenser of sex pheromone of insects Grant 4,834,745 - Ogawa , et al. May 30, 1 | 1989-05-30 |
Contact lens comprising triorganovinylsilane polymers Grant 4,761,436 - Kohno , et al. August 2, 1 | 1988-08-02 |
Method for concurrently emitting vapors of sex pheromones of different insects Grant 4,734,281 - Yamamoto , et al. March 29, 1 | 1988-03-29 |
Pervaporation method for separating liquids in mixture Grant 4,728,431 - Nagura , et al. March 1, 1 | 1988-03-01 |
Composite hollow fiber Grant 4,689,267 - Takamizawa , et al. August 25, 1 | 1987-08-25 |