NAGORNY; Vladimir
Patent Applications and Registrations
Patent applications and USPTO patent grants for NAGORNY; Vladimir.The latest application filed is for "film thickness uniformity improvement using edge ring and bias electrode geometry".
- NAGORNY; Vladimir - Tracy CA
- Nagorny; Vladimir - San Jose CA
| Patent | Date |
|---|---|
| Film Thickness Uniformity Improvement Using Edge Ring And Bias Electrode Geometry App 20220301920 - LO; Kin Pong ; et al. | 2022-09-22 |
| Addressable Plasma Delivery Methods And Devices App 20220262607 - Nagorny; Vladimir | 2022-08-18 |
| Image-based Digital Control Of Plasma Processing App 20220246409 - Nagorny; Vladimir | 2022-08-04 |
| Digital Control Of Plasma Processing App 20220246403 - Nagorny; Vladimir | 2022-08-04 |
| Plasma Processing With Independent Temperature Control App 20220223381 - Liu; Wei ; et al. | 2022-07-14 |
| Plasma Sources And Plasma Processing Apparatus Thereof App 20220223374 - NAGORNY; Vladimir ; et al. | 2022-07-14 |
| Film thickness uniformity improvement using edge ring and bias electrode geometry Grant 11,380,575 - Lo , et al. July 5, 2 | 2022-07-05 |
| Low Current High Ion Energy Plasma Control System App 20220108874 - Nagorny; Vladimir | 2022-04-07 |
| Film Thickness Uniformity Improvement Using Edge Ring And Bias Electrode Geometry App 20220028656 - LO; Kin Pong ; et al. | 2022-01-27 |
| Plasma Source For Semiconductor Processing App 20220028663 - Nagorny; Vladimir | 2022-01-27 |
| Plasma Strip Tool with Multiple Gas Injection App 20210398775 - Ma; Shawming ; et al. | 2021-12-23 |
| Plasma strip tool with uniformity control Grant 11,201,036 - Ma , et al. December 14, 2 | 2021-12-14 |
| Thin film treatment process Grant 10,971,357 - Liu , et al. April 6, 2 | 2021-04-06 |
| Plasma Processing Apparatus With Post Plasma Gas Injection App 20210005431 - Ma; Shawming ; et al. | 2021-01-07 |
| Plasma processing apparatus with post plasma gas injection Grant 10,790,119 - Ma , et al. September 29, 2 | 2020-09-29 |
| Thin Film Treatment Process App 20200111659 - LIU; Wei ; et al. | 2020-04-09 |
| Controlling Azimuthal Uniformity of Etch Process in Plasma Processing Chamber App 20190244825 - Nagorny; Vladimir | 2019-08-08 |
| Controlling azimuthal uniformity of etch process in plasma processing chamber Grant 10,297,457 - Nagorny | 2019-05-21 |
| Plasma Processing Apparatus App 20180358206 - Ma; Shawming ; et al. | 2018-12-13 |
| Plasma Processing Apparatus With Post Plasma Gas Injection App 20180358208 - Ma; Shawming ; et al. | 2018-12-13 |
| Plasma Strip Tool With Multiple Gas Injection Zones App 20180358204 - Ma; Shawming ; et al. | 2018-12-13 |
| Plasma Strip Tool With Uniformity Control App 20180358210 - Ma; Shawming ; et al. | 2018-12-13 |
| System and method for protection of vacuum seals in plasma processing systems Grant 10,049,858 - Nagorny , et al. August 14, 2 | 2018-08-14 |
| Separation Grid for Plasma Chamber App 20180053628 - Vaniapura; Vijay M. ; et al. | 2018-02-22 |
| Inductive Plasma Source App 20170372870 - Godyak; Valery A. ; et al. | 2017-12-28 |
| Inductively Coupled Plasma Source for Plasma Processing App 20170243721 - Nagorny; Vladimir ; et al. | 2017-08-24 |
| Variable Pattern Separation Grid for Plasma Chamber App 20170207077 - Nagorny; Vladimir ; et al. | 2017-07-20 |
| Inductively coupled plasma source for plasma processing Grant 9,653,264 - Nagorny , et al. May 16, 2 | 2017-05-16 |
| Controlling Azimuthal Uniformity of Etch Process in Plasma Processing Chamber App 20160276230 - Nagorny; Vladimir | 2016-09-22 |
| Method Of Addressing A Plasma Display Panel App 20160125795 - NAGORNY; VLADIMIR | 2016-05-05 |
| System and Method for Protection of Vacuum Seals in Plasma Processing Systems App 20160013025 - Nagorny; Vladimir ; et al. | 2016-01-14 |
| High efficiency plasma source Grant 9,214,319 - Nagorny , et al. December 15, 2 | 2015-12-15 |
| High Efficiency Plasma Source App 20140197136 - Nagorny; Vladimir ; et al. | 2014-07-17 |
| Inductive Plasma Source App 20120160806 - Godyak; Valery A. ; et al. | 2012-06-28 |
| Inductively Coupled Plasma Source For Plasma Processing App 20120152901 - Nagorny; Vladimir ; et al. | 2012-06-21 |
| Workpiece support with fluid zones for temperature control Grant 7,972,444 - Zucker , et al. July 5, 2 | 2011-07-05 |
| Workpiece Support With Fluid Zones For Temperature Control App 20090114158 - Zucker; Martin L. ; et al. | 2009-05-07 |
| Method Of Addressing A Plasma Display Panel App 20080018560 - Nagorny; Vladimir | 2008-01-24 |
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