NAGAYAMA; Tadashi

Patent Applications and Registrations

Patent applications and USPTO patent grants for NAGAYAMA; Tadashi.The latest application filed is for "exposure apparatus, exposure method, and method for producing device".

Company Profile

0.15.13

NAGAYAMA; Tadashi - Toshima-ku JP
NAGAYAMA; Tadashi - Tokyo JP
Nagayama, Tadashi - Toshimaku JP
Nagayama; Tadashi - Ota-ku JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Exposure Apparatus, Exposure Method, And Method For Producing Device App 20190155168 - YASUDA; Masahiko ; et al.	2019-05-23
Exposure apparatus, exposure method, and method for producing device Grant 10,209,623 - Yasuda , et al. Feb	2019-02-19
Surface Position Detection Apparatus, Exposure Apparatus, And Exposure Method App 20180188657 - HIDAKA; Yasuhiro ; et al.	2018-07-05
Surface position detection apparatus, exposure apparatus, and exposure method Grant 9,927,713 - Hidaka , et al. March 27, 2	2018-03-27
Surface Position Detection Apparatus, Exposure Apparatus, And Exposure Method App 20170075227 - HIDAKA; Yasuhiro ; et al.	2017-03-16
Surface position detection apparatus, exposure apparatus, and exposure method Grant 9,519,223 - Hidaka , et al. December 13, 2	2016-12-13
Exposure Apparatus, Exposure Method, And Method For Producing Device App 20160313650 - YASUDA; Masahiko ; et al.	2016-10-27
Exposure apparatus, exposure method, and method for producing device Grant 9,383,656 - Yasuda , et al. July 5, 2	2016-07-05
Surface Position Detection Apparatus, Exposure Apparatus, And Exposure Method App 20150248064 - HIDAKA; Yasuhiro ; et al.	2015-09-03
Exposure Apparatus, Exposure Method, And Method For Producing Device App 20150227058 - YASUDA; Masahiko ; et al.	2015-08-13
Surface position detection apparatus, exposure apparatus, and exposure method Grant 9,069,261 - Hidaka , et al. June 30, 2	2015-06-30
Exposure apparatus, exposure method, and method for producing device Grant 9,063,438 - Yasuda , et al. June 23, 2	2015-06-23
Exposure apparatus, exposure method, and method for producing device Grant 8,384,875 - Hidaka , et al. February 26, 2	2013-02-26
Surface Position Detection Apparatus, Exposure Apparatus, And Exposure Method App 20120162623 - Hidaka; Yasuhiro ; et al.	2012-06-28
Exposure Apparatus, Exposure Method, And Method For Producing Device App 20120120381 - YASUDA; Masahiko ; et al.	2012-05-17
Surface position detection apparatus, exposure apparatus, and exposure method Grant 8,149,382 - Hidaka , et al. April 3, 2	2012-04-03
Exposure apparatus, exposure method, and method for producing device Grant 8,130,361 - Yasuda , et al. March 6, 2	2012-03-06
Surface Position Detection Apparatus, Exposure Apparatus, and Exposure Method App 20100129739 - Hidaka; Yasuhiro ; et al.	2010-05-27
Exposure apparatus, exposure method, and method for producing device App 20100079743 - Hidaka; Yasuhiro ; et al.	2010-04-01
Exposure Method, Exposure Apparatus, And Method For Manufacturing Device App 20090123874 - NAGAYAMA; Tadashi	2009-05-14
Exposure apparatus, exposure method, and method for producing device App 20060187432 - Yasuda; Masahiko ; et al.	2006-08-24
Observation Apparatus And Method Of Manufacturing The Same, Exposure Apparatus, And Method Of Manufacturing Microdevice App 20040027549 - Nagayama, Tadashi	2004-02-12
Illumination optical system, alignment apparatus, and projection exposure apparatus using the same Grant 5,797,674 - Nagayama August 25, 1	1998-08-25
Inspection apparatus and method for optical system, exposure apparatus provided with the inspection apparatus, and alignment apparatus and optical system thereof applicable to the exposure apparatus Grant 5,754,299 - Sugaya , et al. May 19, 1	1998-05-19
Illumination optical system, alignment apparatus, and projection exposure apparatus using the same Grant 5,552,892 - Nagayama September 3, 1	1996-09-03

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