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Member For Plasma Processing Apparatus, Plasma Processing Apparatus With The Same And Method For Using Sintered Body App 20200317582 - IKEDA; Takashi ;   et al. | 2020-10-08 |
Member For Plasma Processing Apparatus, Plasma Processing Apparatus With The Same And Method For Using Sintered Body App 20200317583 - IKEDA; Takashi ;   et al. | 2020-10-08 |
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Thermal Spray Material And Thermal Spray Coated Article App 20190152863 - NAGAYAMA; Nobuyuki ;   et al. | 2019-05-23 |
Thermal spray material and thermal spray coated article Grant 10,227,263 - Nagayama , et al. | 2019-03-12 |
Thermal spray material, thermal spray coating and thermal spray coated article Grant 10,138,167 - Nagayama , et al. Nov | 2018-11-27 |
Thermal spray material, thermal spray coating and thermal spray coated article Grant 10,106,466 - Nagayama , et al. October 23, 2 | 2018-10-23 |
Thermal spray material, thermal spray coating and thermal spray coated article Grant 10,106,879 - Nagayama , et al. October 23, 2 | 2018-10-23 |
Plasma Processing Apparatus App 20180301313 - Nagayama; Nobuyuki | 2018-10-18 |
Focus Ring And Plasma Processing Apparatus App 20180240651 - NAGAYAMA; Nobuyuki ;   et al. | 2018-08-23 |
Plasma processing apparatus and temperature control method Grant 10,056,223 - Nagayama August 21, 2 | 2018-08-21 |
Thermal Spray Material And Thermal Spray Coated Article App 20180127318 - NAGAYAMA; Nobuyuki ;   et al. | 2018-05-10 |
Particle Collecting Apparatus, Particle Collecting Method, And Particle Collecting System App 20180095021 - KIKUCHI; Toshihiko ;   et al. | 2018-04-05 |
Electrode plate for plasma etching and plasma etching apparatus Grant 9,818,583 - Satoh , et al. November 14, 2 | 2017-11-14 |
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Thermal Spray Material, Thermal Spray Coating And Thermal Spray Coated Article App 20160326059 - NAGAYAMA; Nobuyuki ;   et al. | 2016-11-10 |
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Thermal Spray Material, Thermal Spray Coating And Thermal Spray Coated Article App 20160326623 - NAGAYAMA; Nobuyuki ;   et al. | 2016-11-10 |
Component For Plasma Processing Apparatus, And Manufacturing Method Therefor App 20160076129 - Nagayama; Nobuyuki ;   et al. | 2016-03-17 |
Electrode Plate For Plasma Etching And Plasma Etching Apparatus App 20150348762 - SATOH; Naoyuki ;   et al. | 2015-12-03 |
Electrode plate for plasma etching and plasma etching apparatus Grant 9,117,635 - Satoh , et al. August 25, 2 | 2015-08-25 |
Substrate Processing Apparatus App 20150200080 - KIKUCHI; Eiichiro ;   et al. | 2015-07-16 |
Focus Ring And Plasma Processing Apparatus App 20150114567 - NAGAYAMA; Nobuyuki ;   et al. | 2015-04-30 |
Plasma Processing Apparatus App 20150053348 - NAGAYAMA; Nobuyuki ;   et al. | 2015-02-26 |
Temperature control system and temperature control method for substrate mounting table Grant 8,950,469 - Sasaki , et al. February 10, 2 | 2015-02-10 |
Vacuum exhaust method and a substrate processing apparatus therefor Grant 8,945,313 - Matsui , et al. February 3, 2 | 2015-02-03 |
Plasma processing apparatus and method Grant 8,896,210 - Nishino , et al. November 25, 2 | 2014-11-25 |
Internal member of a plasma processing vessel Grant 8,877,002 - Mitsuhashi , et al. November 4, 2 | 2014-11-04 |
Plasma treatment container internal member, and plasma treatment apparatus having the plasma treatment container internal member Grant 8,739,732 - Nagayama , et al. June 3, 2 | 2014-06-03 |
Surface processing method Grant 8,715,782 - Satoh , et al. May 6, 2 | 2014-05-06 |
Plasma Processing Apparatus And Temperature Control Method App 20140008020 - Nagayama; Nobuyuki | 2014-01-09 |
Consumable Part For Use In A Plasma Processing Apparatus App 20130284375 - NAGAYAMA; Nobuyuki ;   et al. | 2013-10-31 |
Internal Member Of A Plasma Processing Vessel App 20130255881 - MITSUHASHI; Kouji ;   et al. | 2013-10-03 |
Plasma processing apparatus Grant 8,545,672 - Nagayama , et al. October 1, 2 | 2013-10-01 |
Method of reusing a consumable part for use in a plasma processing apparatus Grant 8,475,622 - Nagayama , et al. July 2, 2 | 2013-07-02 |
Plasma Processing Apparatus And Method App 20130162142 - NISHINO; Masaru ;   et al. | 2013-06-27 |
Internal member of a plasma processing vessel Grant 8,449,715 - Mitsuhashi , et al. May 28, 2 | 2013-05-28 |
Vacuum Exhaust Method And A Substrate Processing Apparatus Therefor App 20130092185 - Matsui; Hidefumi ;   et al. | 2013-04-18 |
Surface Processing Method App 20130040055 - Satoh; Naoyuki ;   et al. | 2013-02-14 |
Thermal spray powder, method for forming thermal spray coating, and plasma resistant member Grant 8,349,450 - Ibe , et al. January 8, 2 | 2013-01-08 |
Surface processing method Grant 8,318,034 - Satoh , et al. November 27, 2 | 2012-11-27 |
Method Of Reusing A Consumable Part For Use In A Plasma Processing Apparatus App 20120258258 - NAGAYAMA; Nobuyuki ;   et al. | 2012-10-11 |
Method of reusing a consumable part for use in a plasma processing apparatus Grant 8,221,579 - Nagayama , et al. July 17, 2 | 2012-07-17 |
Substrate Processing Apparatus And Substrate Processing Method App 20120160808 - KIKUCHI; Eiichiro ;   et al. | 2012-06-28 |
Plasma Processing Apparatus App 20120111500 - NAGAYAMA; Nobuyuki ;   et al. | 2012-05-10 |
Electrode Plate For Plasma Etching And Plasma Etching Apparatus App 20120073753 - SATOH; Naoyuki ;   et al. | 2012-03-29 |
Temperature Control System And Temperature Control Method For Substrate Mounting Table App 20110083837 - Sasaki; Yasuharu ;   et al. | 2011-04-14 |
In-chamber member, a cleaning method therefor and a plasma processing apparatus Grant 7,892,361 - Nagayama , et al. February 22, 2 | 2011-02-22 |
Surface Processing Method App 20110006037 - SATOH; Naoyuki ;   et al. | 2011-01-13 |
Method Of Reusing A Consumable Part For Use In A Plasma Processing Apparatus App 20100314356 - NAGAYAMA; Nobuyuki ;   et al. | 2010-12-16 |
Internal Member Of A Plasma Processing Vessel App 20100307687 - MITSUHASHI; Kouji ;   et al. | 2010-12-09 |
Internal member of a plasma processing vessel Grant 7,780,786 - Mitsuhashi , et al. August 24, 2 | 2010-08-24 |
Vacuum Exhaust Method And A Substrate Processing Apparatus Therefor App 20100104760 - MATSUI; Hidefumi ;   et al. | 2010-04-29 |
Electrostatic chuck Grant 7,646,581 - Sasaki , et al. January 12, 2 | 2010-01-12 |
Focus Ring And Plasma Processing Apparatus App 20090294064 - NAGAYAMA; Nobuyuki | 2009-12-03 |
Electrostatic Chuck Member App 20090080136 - Nagayama; Nobuyuki ;   et al. | 2009-03-26 |
Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism Grant 7,481,903 - Senzaki , et al. January 27, 2 | 2009-01-27 |
In-chamber member, a cleaning method therefor and a plasma processing apparatus App 20080196744 - NAGAYAMA; Nobuyuki ;   et al. | 2008-08-21 |
Method For Manufacturing Substrate Mounting Table App 20080145556 - NAGAYAMA; Nobuyuki ;   et al. | 2008-06-19 |
Thermal Spray Powder, Method For Forming Thermal Spray Coating, And Plasma Resistant Member App 20080115725 - IBE; Hiroyuki ;   et al. | 2008-05-22 |
Internal member for plasma-treating vessel and method of producing the same Grant 7,364,798 - Harada , et al. April 29, 2 | 2008-04-29 |
Substrate Stage And Plasma Processing Apparatus App 20080087382 - SUGIYAMA; Hideki ;   et al. | 2008-04-17 |
Internal member for plasma-treating vessel and method of producing the same App 20080070028 - Harada; Yoshio ;   et al. | 2008-03-20 |
Internal member for plasma-treating vessel and method of producing the same App 20080070051 - Harada; Yoshio ;   et al. | 2008-03-20 |
Internal member for plasma-treating vessel and method of producing the same App 20080066647 - Harada; Yoshio ;   et al. | 2008-03-20 |
Electrostatic Chuck App 20070217114 - Sasaki; Yasuharu ;   et al. | 2007-09-20 |
Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism App 20050150456 - Senzaki, Shigeru ;   et al. | 2005-07-14 |
Internal member for plasma-treating vessel and method of producing the same App 20050147852 - Harada, Yoshio ;   et al. | 2005-07-07 |
Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism Grant 6,899,786 - Senzaki , et al. May 31, 2 | 2005-05-31 |
Internal member for plasma-treating vessel and method of producing the same Grant 6,884,516 - Harada , et al. April 26, 2 | 2005-04-26 |
Internal member of a plasma processing vessel App 20040216667 - Mitsuhashi, Kouji ;   et al. | 2004-11-04 |
Method of cleaning a plasma processing apparatus App 20040216769 - Takase, Taira ;   et al. | 2004-11-04 |
Internal member for plasma-treating vessel and method of producing the same App 20040214026 - Harada, Yoshio ;   et al. | 2004-10-28 |
Cleaning fluid and cleaning method for component of semiconductor-treating apparatus Grant 6,805,135 - Hirota , et al. October 19, 2 | 2004-10-19 |
Method of processing quartz member for plasma processing device, quartz member for plasma processing device, and plasma processing device having quartz member for plasma processing device mounted thereon App 20040200804 - Sugiyama, Norikazu ;   et al. | 2004-10-14 |
Method of cleaning a plasma processing apparatus Grant 6,790,289 - Takase , et al. September 14, 2 | 2004-09-14 |
Plasma processing container internal member and production method thereof Grant 6,783,863 - Harada , et al. August 31, 2 | 2004-08-31 |
Coating agent, plasma-resistant component having coating film formed by the coating agent, plasma processing device provided with the plasma-resistant component App 20040163591 - Nagayama, Nobuyuki ;   et al. | 2004-08-26 |
Plasma treatment container internal member, and plasma treatment device having the plasma treatment container internal member App 20040144319 - Nagayama, Nobuyuki ;   et al. | 2004-07-29 |
Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism App 20040108068 - Senzaki, Shigeru ;   et al. | 2004-06-10 |
Method of cleaning a plasma processing apparatus App 20030172952 - Takase, Taira ;   et al. | 2003-09-18 |
Plasma processing container internal member and production method thereof App 20020177001 - Harada, Yoshio ;   et al. | 2002-11-28 |