loadpatents
name:-0.063500881195068
name:-0.038191080093384
name:-0.007796049118042
Nagayama; Nobuyuki Patent Filings

Nagayama; Nobuyuki

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nagayama; Nobuyuki.The latest application filed is for "etching processing apparatus, quartz member and plasma processing method".

Company Profile
8.40.54
  • Nagayama; Nobuyuki - Miyagi JP
  • Nagayama; Nobuyuki - Kurokawa-gun JP
  • Nagayama; Nobuyuki - Nirasaki JP
  • NAGAYAMA; Nobuyuki - Nirasaki City JP
  • Nagayama; Nobuyuki - Yamanashi N/A JP
  • Nagayama; Nobuyuki - Nirasaki-shi JP
  • Nagayama, Nobuyuki - Yamaneshi JP
  • Nagayama, Nobuyuki - Nirasaki-shi Yamanashi JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Member for plasma processing apparatus, plasma processing apparatus with the same and method for using sintered body
Grant 11,434,174 - Ikeda , et al. September 6, 2
2022-09-06
Etching Processing Apparatus, Quartz Member And Plasma Processing Method
App 20220020596 - KIKUCHI; Toshihiko ;   et al.
2022-01-20
Anodized Titanium Material And Method For Producing The Same
App 20210207283 - MURANAKA; Takehiko ;   et al.
2021-07-08
Member For Plasma Processing Apparatus, Plasma Processing Apparatus With The Same And Method For Using Sintered Body
App 20200317582 - IKEDA; Takashi ;   et al.
2020-10-08
Member For Plasma Processing Apparatus, Plasma Processing Apparatus With The Same And Method For Using Sintered Body
App 20200317583 - IKEDA; Takashi ;   et al.
2020-10-08
Thermal spray material and thermal spray coated article
Grant 10,766,822 - Nagayama , et al. Sep
2020-09-08
Particle collecting apparatus and particle collecting system
Grant 10,768,089 - Kikuchi , et al. Sep
2020-09-08
Plasma processing apparatus
Grant 10,622,196 - Nagayama , et al.
2020-04-14
Focus ring and plasma processing apparatus
Grant 10,566,175 - Nagayama , et al. Feb
2020-02-18
Thermal Spray Material And Thermal Spray Coated Article
App 20190152863 - NAGAYAMA; Nobuyuki ;   et al.
2019-05-23
Thermal spray material and thermal spray coated article
Grant 10,227,263 - Nagayama , et al.
2019-03-12
Thermal spray material, thermal spray coating and thermal spray coated article
Grant 10,138,167 - Nagayama , et al. Nov
2018-11-27
Thermal spray material, thermal spray coating and thermal spray coated article
Grant 10,106,466 - Nagayama , et al. October 23, 2
2018-10-23
Thermal spray material, thermal spray coating and thermal spray coated article
Grant 10,106,879 - Nagayama , et al. October 23, 2
2018-10-23
Plasma Processing Apparatus
App 20180301313 - Nagayama; Nobuyuki
2018-10-18
Focus Ring And Plasma Processing Apparatus
App 20180240651 - NAGAYAMA; Nobuyuki ;   et al.
2018-08-23
Plasma processing apparatus and temperature control method
Grant 10,056,223 - Nagayama August 21, 2
2018-08-21
Thermal Spray Material And Thermal Spray Coated Article
App 20180127318 - NAGAYAMA; Nobuyuki ;   et al.
2018-05-10
Particle Collecting Apparatus, Particle Collecting Method, And Particle Collecting System
App 20180095021 - KIKUCHI; Toshihiko ;   et al.
2018-04-05
Electrode plate for plasma etching and plasma etching apparatus
Grant 9,818,583 - Satoh , et al. November 14, 2
2017-11-14
Manufacturing Method For Component In Plasma Processing Apparatus
App 20170233860 - Nagayama; Nobuyuki ;   et al.
2017-08-17
Thermal Spray Material, Thermal Spray Coating And Thermal Spray Coated Article
App 20160326059 - NAGAYAMA; Nobuyuki ;   et al.
2016-11-10
Thermal Spray Material, Thermal Spray Coating And Thermal Spray Coated Article
App 20160326058 - NAGAYAMA; Nobuyuki ;   et al.
2016-11-10
Thermal Spray Material, Thermal Spray Coating And Thermal Spray Coated Article
App 20160326623 - NAGAYAMA; Nobuyuki ;   et al.
2016-11-10
Component For Plasma Processing Apparatus, And Manufacturing Method Therefor
App 20160076129 - Nagayama; Nobuyuki ;   et al.
2016-03-17
Electrode Plate For Plasma Etching And Plasma Etching Apparatus
App 20150348762 - SATOH; Naoyuki ;   et al.
2015-12-03
Electrode plate for plasma etching and plasma etching apparatus
Grant 9,117,635 - Satoh , et al. August 25, 2
2015-08-25
Substrate Processing Apparatus
App 20150200080 - KIKUCHI; Eiichiro ;   et al.
2015-07-16
Focus Ring And Plasma Processing Apparatus
App 20150114567 - NAGAYAMA; Nobuyuki ;   et al.
2015-04-30
Plasma Processing Apparatus
App 20150053348 - NAGAYAMA; Nobuyuki ;   et al.
2015-02-26
Temperature control system and temperature control method for substrate mounting table
Grant 8,950,469 - Sasaki , et al. February 10, 2
2015-02-10
Vacuum exhaust method and a substrate processing apparatus therefor
Grant 8,945,313 - Matsui , et al. February 3, 2
2015-02-03
Plasma processing apparatus and method
Grant 8,896,210 - Nishino , et al. November 25, 2
2014-11-25
Internal member of a plasma processing vessel
Grant 8,877,002 - Mitsuhashi , et al. November 4, 2
2014-11-04
Plasma treatment container internal member, and plasma treatment apparatus having the plasma treatment container internal member
Grant 8,739,732 - Nagayama , et al. June 3, 2
2014-06-03
Surface processing method
Grant 8,715,782 - Satoh , et al. May 6, 2
2014-05-06
Plasma Processing Apparatus And Temperature Control Method
App 20140008020 - Nagayama; Nobuyuki
2014-01-09
Consumable Part For Use In A Plasma Processing Apparatus
App 20130284375 - NAGAYAMA; Nobuyuki ;   et al.
2013-10-31
Internal Member Of A Plasma Processing Vessel
App 20130255881 - MITSUHASHI; Kouji ;   et al.
2013-10-03
Plasma processing apparatus
Grant 8,545,672 - Nagayama , et al. October 1, 2
2013-10-01
Method of reusing a consumable part for use in a plasma processing apparatus
Grant 8,475,622 - Nagayama , et al. July 2, 2
2013-07-02
Plasma Processing Apparatus And Method
App 20130162142 - NISHINO; Masaru ;   et al.
2013-06-27
Internal member of a plasma processing vessel
Grant 8,449,715 - Mitsuhashi , et al. May 28, 2
2013-05-28
Vacuum Exhaust Method And A Substrate Processing Apparatus Therefor
App 20130092185 - Matsui; Hidefumi ;   et al.
2013-04-18
Surface Processing Method
App 20130040055 - Satoh; Naoyuki ;   et al.
2013-02-14
Thermal spray powder, method for forming thermal spray coating, and plasma resistant member
Grant 8,349,450 - Ibe , et al. January 8, 2
2013-01-08
Surface processing method
Grant 8,318,034 - Satoh , et al. November 27, 2
2012-11-27
Method Of Reusing A Consumable Part For Use In A Plasma Processing Apparatus
App 20120258258 - NAGAYAMA; Nobuyuki ;   et al.
2012-10-11
Method of reusing a consumable part for use in a plasma processing apparatus
Grant 8,221,579 - Nagayama , et al. July 17, 2
2012-07-17
Substrate Processing Apparatus And Substrate Processing Method
App 20120160808 - KIKUCHI; Eiichiro ;   et al.
2012-06-28
Plasma Processing Apparatus
App 20120111500 - NAGAYAMA; Nobuyuki ;   et al.
2012-05-10
Electrode Plate For Plasma Etching And Plasma Etching Apparatus
App 20120073753 - SATOH; Naoyuki ;   et al.
2012-03-29
Temperature Control System And Temperature Control Method For Substrate Mounting Table
App 20110083837 - Sasaki; Yasuharu ;   et al.
2011-04-14
In-chamber member, a cleaning method therefor and a plasma processing apparatus
Grant 7,892,361 - Nagayama , et al. February 22, 2
2011-02-22
Surface Processing Method
App 20110006037 - SATOH; Naoyuki ;   et al.
2011-01-13
Method Of Reusing A Consumable Part For Use In A Plasma Processing Apparatus
App 20100314356 - NAGAYAMA; Nobuyuki ;   et al.
2010-12-16
Internal Member Of A Plasma Processing Vessel
App 20100307687 - MITSUHASHI; Kouji ;   et al.
2010-12-09
Internal member of a plasma processing vessel
Grant 7,780,786 - Mitsuhashi , et al. August 24, 2
2010-08-24
Vacuum Exhaust Method And A Substrate Processing Apparatus Therefor
App 20100104760 - MATSUI; Hidefumi ;   et al.
2010-04-29
Electrostatic chuck
Grant 7,646,581 - Sasaki , et al. January 12, 2
2010-01-12
Focus Ring And Plasma Processing Apparatus
App 20090294064 - NAGAYAMA; Nobuyuki
2009-12-03
Electrostatic Chuck Member
App 20090080136 - Nagayama; Nobuyuki ;   et al.
2009-03-26
Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism
Grant 7,481,903 - Senzaki , et al. January 27, 2
2009-01-27
In-chamber member, a cleaning method therefor and a plasma processing apparatus
App 20080196744 - NAGAYAMA; Nobuyuki ;   et al.
2008-08-21
Method For Manufacturing Substrate Mounting Table
App 20080145556 - NAGAYAMA; Nobuyuki ;   et al.
2008-06-19
Thermal Spray Powder, Method For Forming Thermal Spray Coating, And Plasma Resistant Member
App 20080115725 - IBE; Hiroyuki ;   et al.
2008-05-22
Internal member for plasma-treating vessel and method of producing the same
Grant 7,364,798 - Harada , et al. April 29, 2
2008-04-29
Substrate Stage And Plasma Processing Apparatus
App 20080087382 - SUGIYAMA; Hideki ;   et al.
2008-04-17
Internal member for plasma-treating vessel and method of producing the same
App 20080070028 - Harada; Yoshio ;   et al.
2008-03-20
Internal member for plasma-treating vessel and method of producing the same
App 20080070051 - Harada; Yoshio ;   et al.
2008-03-20
Internal member for plasma-treating vessel and method of producing the same
App 20080066647 - Harada; Yoshio ;   et al.
2008-03-20
Electrostatic Chuck
App 20070217114 - Sasaki; Yasuharu ;   et al.
2007-09-20
Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism
App 20050150456 - Senzaki, Shigeru ;   et al.
2005-07-14
Internal member for plasma-treating vessel and method of producing the same
App 20050147852 - Harada, Yoshio ;   et al.
2005-07-07
Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism
Grant 6,899,786 - Senzaki , et al. May 31, 2
2005-05-31
Internal member for plasma-treating vessel and method of producing the same
Grant 6,884,516 - Harada , et al. April 26, 2
2005-04-26
Internal member of a plasma processing vessel
App 20040216667 - Mitsuhashi, Kouji ;   et al.
2004-11-04
Method of cleaning a plasma processing apparatus
App 20040216769 - Takase, Taira ;   et al.
2004-11-04
Internal member for plasma-treating vessel and method of producing the same
App 20040214026 - Harada, Yoshio ;   et al.
2004-10-28
Cleaning fluid and cleaning method for component of semiconductor-treating apparatus
Grant 6,805,135 - Hirota , et al. October 19, 2
2004-10-19
Method of processing quartz member for plasma processing device, quartz member for plasma processing device, and plasma processing device having quartz member for plasma processing device mounted thereon
App 20040200804 - Sugiyama, Norikazu ;   et al.
2004-10-14
Method of cleaning a plasma processing apparatus
Grant 6,790,289 - Takase , et al. September 14, 2
2004-09-14
Plasma processing container internal member and production method thereof
Grant 6,783,863 - Harada , et al. August 31, 2
2004-08-31
Coating agent, plasma-resistant component having coating film formed by the coating agent, plasma processing device provided with the plasma-resistant component
App 20040163591 - Nagayama, Nobuyuki ;   et al.
2004-08-26
Plasma treatment container internal member, and plasma treatment device having the plasma treatment container internal member
App 20040144319 - Nagayama, Nobuyuki ;   et al.
2004-07-29
Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism
App 20040108068 - Senzaki, Shigeru ;   et al.
2004-06-10
Method of cleaning a plasma processing apparatus
App 20030172952 - Takase, Taira ;   et al.
2003-09-18
Plasma processing container internal member and production method thereof
App 20020177001 - Harada, Yoshio ;   et al.
2002-11-28

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