Nagaseki; Sumie

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nagaseki; Sumie.The latest application filed is for "vaporizing unit, film forming apparatus, film forming method, computer program and storage medium".

Company Profile

0.5.9

Nagaseki; Sumie - Nirasaki JP
Nagaseki; Sumie - Nirasaki City JP
Nagaseki; Sumie - Yamanashi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Vaporizing unit, film forming apparatus, film forming method, computer program and storage medium Grant 9,343,295 - Sawada , et al. May 17, 2	2016-05-17
Vaporizing Unit, Film Forming Apparatus, Film Forming Method, Computer Program And Storage Medium App 20140256157 - SAWADA; Ikuo ; et al.	2014-09-11
Semiconductor fabrication apparatus and temperature adjustment method Grant 8,818,545 - Matsuzaki , et al. August 26, 2	2014-08-26
Method of manufacturing semiconductor device, apparatus for manufacturing same, and storage medium Grant 8,293,662 - Nagaseki October 23, 2	2012-10-23
Cooling Unit, Processing Chamber, Part In The Processing Chamber, And Cooling Method App 20120204576 - MATSUZAKI; Kazuyoshi ; et al.	2012-08-16
Semiconductor device manufacturing method, semiconductor manufacturing apparatus and storage medium Grant 8,242,026 - Nagaseki August 14, 2	2012-08-14
Method Of Manufacturing Semiconductor Device, Apparatus For Manufacturing Same, And Storage Medium App 20120100727 - Nagaseki; Sumie	2012-04-26
Semiconductor Fabrication Apparatus And Temperature Adjustment Method App 20120016508 - Matsuzaki; Kazuyoshi ; et al.	2012-01-19
Plasma Etching Method And Plasma Etching Apparatus App 20110201208 - Kawakami; Masato ; et al.	2011-08-18
Plasma Measuring Method, Plasma Measuring Device And Storage Medium App 20100321029 - Ito; Toru ; et al.	2010-12-23
Vaporizing Unit, Film Forming Apparatus, Film Forming Method, Computer Program And Storage Medium App 20100297346 - Sawada; Ikuo ; et al.	2010-11-25
Plasma Processing Method And Apparatus App 20100267243 - Kawakami; Masato ; et al.	2010-10-21
Semiconductor Device Manufacturing Method, Semiconductor Manufacturing Apparatus And Storage Medium App 20100003807 - Nagaseki; Sumie	2010-01-07

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