NAGASEKI; Kazuya
Patent Applications and Registrations
Patent applications and USPTO patent grants for NAGASEKI; Kazuya.The latest application filed is for "plasma processing method and plasma processing apparatus".
Company Profile
17.59.77
- NAGASEKI; Kazuya - Kurokawa-gun JP
- Nagaseki; Kazuya - Miyagi JP
- Nagaseki; Kazuya - Taiwa-cho JP
- Nagaseki; Kazuya - Nirasaki N/A JP
- Nagaseki; Kazuya - Yamanashi-Ken N/A JP
- NAGASEKI; Kazuya - Yamanashi JP
- NAGASEKI; Kazuya - Nirasaki City JP
- NAGASEKI; Kazuya - Nirasaki-shi JP
- Nagaseki, Kazuya - Nakakoma-gun JP
Patent Activity
| Patent | Date |
|---|---|
| Plasma Processing Method And Plasma Processing Apparatus App 20220301825 - KUBOTA; Shinji ; et al. | 2022-09-22 |
| Plasma processing apparatus Grant 11,450,515 - Nagaseki , et al. September 20, 2 | 2022-09-20 |
| Upper electrode and plasma processing apparatus Grant 11,443,924 - Tamamushi , et al. September 13, 2 | 2022-09-13 |
| Apparatuses and methods for plasma processing Grant 11,393,662 - Chen , et al. July 19, 2 | 2022-07-19 |
| Plasma Processing Apparatus And System App 20220223427 - Tamamushi; Gen ; et al. | 2022-07-14 |
| Plasma processing method and plasma processing apparatus Grant 11,387,077 - Kubota , et al. July 12, 2 | 2022-07-12 |
| Etching method and plasma processing apparatus Grant 11,315,793 - Tamamushi , et al. April 26, 2 | 2022-04-26 |
| Exhaust device for processing apparatus provided with multiple blades Grant 11,315,770 - Nagaseki , et al. April 26, 2 | 2022-04-26 |
| Film Forming Apparatus And Method For Manufacturing Part Having Film Containing Silicon App 20220062943 - ISHII; Takayuki ; et al. | 2022-03-03 |
| Plasma Processing Method And Plasma Processing Apparatus App 20220028665 - Nagami; Koichi ; et al. | 2022-01-27 |
| Method of manufacturing electrostatic chuck and electrostsatic chuck Grant 11,227,786 - Taga , et al. January 18, 2 | 2022-01-18 |
| Stage And Substrate Processing Apparatus App 20210391153 - ISHII; Takayuki ; et al. | 2021-12-16 |
| Plasma Processing Method App 20210375592 - MOYAMA; Kazuki ; et al. | 2021-12-02 |
| Forming Method Of Component And Substrate Processing System App 20210366697 - SAITO; Michishige ; et al. | 2021-11-25 |
| Forming Method Of Component And Plasma Processing Apparatus App 20210366691 - Saito; Michishige ; et al. | 2021-11-25 |
| Plasma etching method and plasma etching apparatus Grant 11,170,979 - Nagami , et al. November 9, 2 | 2021-11-09 |
| Plasma processing apparatuses having a dielectric injector Grant 11,152,194 - Chen , et al. October 19, 2 | 2021-10-19 |
| Substrate Support Stage, Plasma Processing System, And Method Of Mounting Edge Ring App 20210319988 - MOYAMA; Kazuki ; et al. | 2021-10-14 |
| Exhaust Device, Processing Apparatus, And Exhausting Method App 20210296102 - NAGASEKI; Kazuya ; et al. | 2021-09-23 |
| Processing System And Part Replacement Method App 20210269258 - MOYAMA; Kazuki ; et al. | 2021-09-02 |
| Part Transporting Device And Processing System App 20210268670 - MOYAMA; Kazuki ; et al. | 2021-09-02 |
| Plasma processing system and plasma processing method Grant 11,107,663 - Moyama , et al. August 31, 2 | 2021-08-31 |
| Substrate processing method Grant 11,043,389 - Moyama , et al. June 22, 2 | 2021-06-22 |
| Plasma Processing Method And Plasma Processing Apparatus App 20210159049 - KUBOTA; Shinji ; et al. | 2021-05-27 |
| Member, Manufacturing Method Of Member And Substrate Processing Apparatus App 20210111005 - Ishii; Takayuki ; et al. | 2021-04-15 |
| Transfer Method And Transfer Apparatus For Substrate Processing System App 20210050240 - MOYAMA; Kazuki ; et al. | 2021-02-18 |
| Plasma Processing Apparatus App 20210013015 - NAGASEKI; Kazuya ; et al. | 2021-01-14 |
| Substrate processing method and substrate processing apparatus Grant 10,886,135 - Kubota , et al. January 5, 2 | 2021-01-05 |
| Substrate Processing Method App 20200373166 - MOYAMA; Kazuki ; et al. | 2020-11-26 |
| Apparatuses And Methods For Plasma Processing App 20200365369 - Chen; Zhiying ; et al. | 2020-11-19 |
| Apparatuses And Methods For Plasma Processing App 20200365372 - Chen; Zhiying ; et al. | 2020-11-19 |
| Etching Apparatus And Etching Method App 20200357658 - Nagami; Koichi ; et al. | 2020-11-12 |
| Plasma processing apparatus Grant 10,825,663 - Nagaseki , et al. November 3, 2 | 2020-11-03 |
| Substrate Processing Apparatus And Substrate Processing Method App 20200312623 - MOYAMA; Kazuki ; et al. | 2020-10-01 |
| Etching apparatus and etching method Grant 10,763,126 - Nagami , et al. Sep | 2020-09-01 |
| Upper Electrode And Plasma Processing Apparatus App 20200234930 - TAMAMUSHI; Gen ; et al. | 2020-07-23 |
| Plasma Processing Apparatus And Plasma Processing Method App 20200144028 - NAGAMI; Koichi ; et al. | 2020-05-07 |
| Etching Method And Plasma Processing Apparatus App 20200144031 - TAMAMUSHI; Gen ; et al. | 2020-05-07 |
| Plasma Etching Method And Plasma Etching Apparatus App 20200126770 - Nagami; Koichi ; et al. | 2020-04-23 |
| Plasma processing method and plasma processing apparatus Grant 10,553,407 - Nagami , et al. Fe | 2020-02-04 |
| Etching Apparatus And Etching Method App 20190333739 - NAGAMI; Koichi ; et al. | 2019-10-31 |
| Plasma Processing Method And Plasma Processing Apparatus App 20190333741 - NAGAMI; Koichi ; et al. | 2019-10-31 |
| Plasma Processing System And Plasma Processing Method App 20190252157 - MOYAMA; Kazuki ; et al. | 2019-08-15 |
| Exhaust Device, Processing Apparatus, And Exhausting Method App 20190172689 - NAGASEKI; Kazuya ; et al. | 2019-06-06 |
| Part For Semiconductor Manufacturing Apparatus And Semiconductor Manufacturing Apparatus App 20190164727 - SUGAWA; Naoki ; et al. | 2019-05-30 |
| Substrate Processing Method And Substrate Processing Apparatus App 20190148155 - KUBOTA; Shinji ; et al. | 2019-05-16 |
| Plasma Processing Apparatus App 20190122863 - Nagaseki; Kazuya ; et al. | 2019-04-25 |
| Plasma Processing Method And Plasma Processing Apparatus App 20190057845 - Nagami; Koichi ; et al. | 2019-02-21 |
| Method Of Manufacturing Electrostatic Chuck And Electrostsatic Chuck App 20190013230 - TAGA; Satoshi ; et al. | 2019-01-10 |
| Plasma Processing Apparatus App 20180174806 - NAGASEKI; Kazuya ; et al. | 2018-06-21 |
| Plasma etching method Grant 9,978,566 - Yokota , et al. May 22, 2 | 2018-05-22 |
| Plasma Etching Method App 20170103877 - YOKOTA; Akihiro ; et al. | 2017-04-13 |
| Substrate processing apparatus Grant 9,390,943 - Nagaseki , et al. July 12, 2 | 2016-07-12 |
| Etching Method Of Multilayer Film App 20150072534 - Himori; Shinji ; et al. | 2015-03-12 |
| Substrate processing apparatus, focus ring heating method, and substrate processing method Grant 8,941,037 - Hayashi , et al. January 27, 2 | 2015-01-27 |
| Etching method of multilayer film Grant 8,895,454 - Himori , et al. November 25, 2 | 2014-11-25 |
| Plasma etching unit Grant 8,840,753 - Honda , et al. September 23, 2 | 2014-09-23 |
| Substrate processing apparatus and method, and program and storage medium Grant 8,821,683 - Hirayama , et al. September 2, 2 | 2014-09-02 |
| Etching Method Of Multilayer Film App 20140206199 - Himori; Shinji ; et al. | 2014-07-24 |
| Consumable Part For Use In A Plasma Processing Apparatus App 20130284375 - NAGAYAMA; Nobuyuki ; et al. | 2013-10-31 |
| Substrate Processing Apparatus App 20130220547 - NAGASEKI; Kazuya ; et al. | 2013-08-29 |
| Method of reusing a consumable part for use in a plasma processing apparatus Grant 8,475,622 - Nagayama , et al. July 2, 2 | 2013-07-02 |
| Method Of Reusing A Consumable Part For Use In A Plasma Processing Apparatus App 20120258258 - NAGAYAMA; Nobuyuki ; et al. | 2012-10-11 |
| Method of reusing a consumable part for use in a plasma processing apparatus Grant 8,221,579 - Nagayama , et al. July 17, 2 | 2012-07-17 |
| Magnetic Field Generator For Magnetron Plasma App 20110232846 - MIYATA; Koji ; et al. | 2011-09-29 |
| Plasma Processing Apparatus, Electrode Plate For Plasma Processing Apparatus, And Electrode Plate Manufacturing Method App 20110162802 - OKUMURA; Katsuya ; et al. | 2011-07-07 |
| Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method Grant 7,922,862 - Okumura , et al. April 12, 2 | 2011-04-12 |
| Transfer mask for exposure and pattern exchanging method of the same Grant 7,862,959 - Okumura , et al. January 4, 2 | 2011-01-04 |
| Method Of Reusing A Consumable Part For Use In A Plasma Processing Apparatus App 20100314356 - NAGAYAMA; Nobuyuki ; et al. | 2010-12-16 |
| Etching gas, etching method and etching gas evaluation method Grant 7,794,616 - Honda , et al. September 14, 2 | 2010-09-14 |
| Capacitive coupling plasma processing apparatus Grant 7,767,055 - Himori , et al. August 3, 2 | 2010-08-03 |
| Plasma etching method Grant 7,749,914 - Honda , et al. July 6, 2 | 2010-07-06 |
| Plasma Etching Unit App 20100024983 - Honda; Masanobu ; et al. | 2010-02-04 |
| Substrate processing system, substrate processing method, and storage medium Grant 7,654,010 - Moriya , et al. February 2, 2 | 2010-02-02 |
| Manufacturing method for membrane member Grant 7,641,806 - Okumura , et al. January 5, 2 | 2010-01-05 |
| Plasma etching method and plasma etching unit Grant 7,625,494 - Honda , et al. December 1, 2 | 2009-12-01 |
| Processing apparatus and gas discharge suppressing member Grant 7,622,017 - Himori , et al. November 24, 2 | 2009-11-24 |
| Plasma Processing Apparatus, Electrode Plate For Plasma Processing Apparatus, And Electrode Plate Manufacturing Method App 20090285998 - Okumura; Katsuya ; et al. | 2009-11-19 |
| Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method Grant 7,585,386 - Okumura , et al. September 8, 2 | 2009-09-08 |
| Plasma processing method Grant 7,473,377 - Yamaguchi , et al. January 6, 2 | 2009-01-06 |
| Semiconductor device and method of manufacturing the same Grant 7,470,998 - Okumura , et al. December 30, 2 | 2008-12-30 |
| Temperature Control Device App 20080314564 - NAGASEKI; Kazuya ; et al. | 2008-12-25 |
| Substrate Processing Apparatus App 20080257494 - Hayashi; Daisuke ; et al. | 2008-10-23 |
| Method and device for plasma-etching organic material film Grant 7,419,613 - Honda , et al. September 2, 2 | 2008-09-02 |
| Substrate Processing Apparatus, Focus Ring Heating Method, And Substrate Processing Method App 20080149598 - HAYASHI; Daisuke ; et al. | 2008-06-26 |
| Plasma etching method Grant 7,344,652 - Nagaseki , et al. March 18, 2 | 2008-03-18 |
| Plasma processing device Grant 7,338,576 - Ono , et al. March 4, 2 | 2008-03-04 |
| Plasma processing apparatus, electrode unit, feeder member and radio frequency feeder rod App 20070284085 - Hayashi; Daisuke ; et al. | 2007-12-13 |
| Substrate Processing System, Substrate Processing Method, And Storage Medium App 20070193062 - MORIYA; Tsuyoshi ; et al. | 2007-08-23 |
| Plasma processing apparatus, electrode unit, feeder member and radio frequency feeder rod Grant 7,230,202 - Hayashi , et al. June 12, 2 | 2007-06-12 |
| Plasma etching method Grant 7,141,178 - Nagaseki , et al. November 28, 2 | 2006-11-28 |
| Plasma etching method App 20060255447 - Nagaseki; Kazuya ; et al. | 2006-11-16 |
| Substrate processing apparatus and method, and program and storage medium App 20060243389 - Hirayama; Yusuke ; et al. | 2006-11-02 |
| Method and device for plasma-etching organic material film App 20060213865 - Honda; Masanobu ; et al. | 2006-09-28 |
| Silicon etching method Grant 7,109,123 - Mimura , et al. September 19, 2 | 2006-09-19 |
| Semiconductor device and method of manufacturing the same Grant 7,084,005 - Okumura , et al. August 1, 2 | 2006-08-01 |
| Capacitive coupling plasma processing apparatus App 20060118044 - Himori; Shinji ; et al. | 2006-06-08 |
| Capacitive coupling plasma processing apparatus App 20060081337 - Himori; Shinji ; et al. | 2006-04-20 |
| High speed silicon etching method Grant 7,022,616 - Mimura , et al. April 4, 2 | 2006-04-04 |
| Surface treating device and surface treating method Grant 7,023,002 - Nagaseki , et al. April 4, 2 | 2006-04-04 |
| Etching gas, etching method and etching gas evaluation method App 20060027530 - Honda; Masanobu ; et al. | 2006-02-09 |
| Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method App 20050276928 - Okumura, Katsuya ; et al. | 2005-12-15 |
| Magnetron plasma-use magnetic field generation device App 20050211383 - Miyata, Koji ; et al. | 2005-09-29 |
| Transfer mask for exposure and pattern exchanging method of the same App 20050118516 - Okumura, Katsuya ; et al. | 2005-06-02 |
| Plasma processing method App 20050103748 - Yamaguchi, Tomoyo ; et al. | 2005-05-19 |
| Etching method and plasma etching apparatus App 20050103441 - Honda, Masanobu ; et al. | 2005-05-19 |
| Semiconductor device and method of manufacturing the same App 20050087853 - Okumura, Katsuya ; et al. | 2005-04-28 |
| Plasma etching method App 20050082255 - Nagaseki, Kazuya ; et al. | 2005-04-21 |
| Plasma etching method App 20050082256 - Honda, Masanobu ; et al. | 2005-04-21 |
| Plasma etching method and plasma etching unit App 20050039854 - Matsuyama, Shoichiro ; et al. | 2005-02-24 |
| Processing apparatus and gas discharge suppressing member App 20050011456 - Himori, Shinji ; et al. | 2005-01-20 |
| Surface treating device and surface treating method App 20040262540 - Nagaseki, Kazuya ; et al. | 2004-12-30 |
| Plasma processing apparatus App 20040261712 - Hayashi, Daisuke ; et al. | 2004-12-30 |
| Manufacturing method for membrane member App 20040251229 - Okumura, Katsuya ; et al. | 2004-12-16 |
| Plasma processing device App 20040238125 - Ono, Hiroo ; et al. | 2004-12-02 |
| Plasma etching method and plasma etching unit App 20040219797 - Honda, Masanobu ; et al. | 2004-11-04 |
| Plasma etching method Grant 6,793,832 - Saito , et al. September 21, 2 | 2004-09-21 |
| Silicon etching method App 20040097090 - Mimura, Takanori ; et al. | 2004-05-20 |
| High speed silicon etching method App 20040097079 - Mimura, Takanori ; et al. | 2004-05-20 |
| Plasma processing apparatus and processing method App 20030102087 - Ito, Youbun ; et al. | 2003-06-05 |
| Plasma treatment method and apparatus Grant 6,544,380 - Tomoyasu , et al. April 8, 2 | 2003-04-08 |
| Plasma treatment method and apparatus App 20020088547 - Tomoyasu, Masayuki ; et al. | 2002-07-11 |
| Method for controlling plasma processor Grant 6,365,060 - Nagaseki , et al. April 2, 2 | 2002-04-02 |
| Plasma treatment method and apparatus App 20010013504 - Imafuku, Kosuke ; et al. | 2001-08-16 |
| Plasma treatment method and apparatus Grant 6,264,788 - Tomoyasu , et al. July 24, 2 | 2001-07-24 |
| Plasma treatment method utilizing an amplitude-modulated high frequency power Grant 6,106,737 - Tomoyasu , et al. August 22, 2 | 2000-08-22 |
| Plasma processing apparatus Grant 6,074,518 - Imafuku , et al. June 13, 2 | 2000-06-13 |
| Plasma processing apparatus Grant 5,942,075 - Nagahata , et al. August 24, 1 | 1999-08-24 |
| Plasma processing apparatus Grant 5,919,332 - Koshiishi , et al. July 6, 1 | 1999-07-06 |
| Plasma treatment apparatus and method Grant 5,698,062 - Sakamoto , et al. December 16, 1 | 1997-12-16 |
| Method of forming a thin film Grant 5,514,425 - Ito , et al. May 7, 1 | 1996-05-07 |
| Plasma processing apparatus comprising electron supply chamber and high frequency electric field generation means Grant 5,368,676 - Nagaseki , et al. November 29, 1 | 1994-11-29 |
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