| Patent | Date |
|---|
Concentration Measurement Device
App 20220299432 - NAGASE; Masaaki ; et al. | 2022-09-22 |
Density Measurement Device
App 20220283081 - NAGASE; Masaaki ; et al. | 2022-09-08 |
Diaphragm Valve
App 20220268365 - HIRATA; Kaoru ; et al. | 2022-08-25 |
Liquid level meter, vaporizer equipped with the same, and liquid level detection method
Grant 11,402,250 - Hidaka , et al. August 2, 2 | 2022-08-02 |
Concentration measurement device
Grant 11,391,668 - Nagase , et al. July 19, 2 | 2022-07-19 |
Flow Rate Control Device
App 20220197316 - HIRATA; Kaoru ; et al. | 2022-06-23 |
Concentration Measurement Device
App 20220170849 - NAGASE; Masaaki ; et al. | 2022-06-02 |
Concentration Measurement Device
App 20220172969 - NAGASE; Masaaki ; et al. | 2022-06-02 |
Flow rate measuring method and flow rate measuring device
Grant 11,326,921 - Nagase , et al. May 10, 2 | 2022-05-10 |
Flow rate control device and abnormality detection method using flow rate control device
Grant 11,313,756 - Nagase , et al. April 26, 2 | 2022-04-26 |
Thruster control device and thruster control method
Grant 11,299,295 - Okumura , et al. April 12, 2 | 2022-04-12 |
Concentration Measurement Device
App 20220074851 - NAGASE; Masaaki ; et al. | 2022-03-10 |
Concentration Measurement Device
App 20220034794 - NAGASE; Masaaki ; et al. | 2022-02-03 |
Concentration Measurement Method
App 20220003662 - NAGASE; Masaaki ; et al. | 2022-01-06 |
Fluid sealing device and pressure detector calibration device
Grant 11,215,374 - Takimoto , et al. January 4, 2 | 2022-01-04 |
Concentration Measurement Device
App 20210396657 - NAGASE; Masaaki ; et al. | 2021-12-23 |
Flow Rate Control System And Flow Rate Measurement Method
App 20210310844 - NAGASE; Masaaki ; et al. | 2021-10-07 |
Concentration measurement device
Grant 10,976,240 - Deguchi , et al. April 13, 2 | 2021-04-13 |
Flow rate control device, method of calibrating flow rate of flow rate control device, flow rate measuring device, and method of measuring flow rate using flow rate measuring device
Grant 10,969,259 - Sawada , et al. April 6, 2 | 2021-04-06 |
Concentration detection method and pressure-type flow rate control device
Grant 10,962,513 - Nagase , et al. March 30, 2 | 2021-03-30 |
Pressure-type flow rate control device and flow rate self-diagnosis method using critical expansion condition
Grant 10,928,813 - Nagase , et al. February 23, 2 | 2021-02-23 |
Concentration measuring device
Grant 10,928,303 - Deguchi , et al. February 23, 2 | 2021-02-23 |
Gas supply device capable of measuring flow rate, flowmeter, and flow rate measuring method
Grant 10,895,484 - Sawada , et al. January 19, 2 | 2021-01-19 |
Pressure type flow rate control device, and flow rate calculating method and flow rate control method for same
Grant 10,884,435 - Nagase , et al. January 5, 2 | 2021-01-05 |
Method of determining flow rate of a gas in a substrate processing system
Grant 10,876,870 - Miyoshi , et al. December 29, 2 | 2020-12-29 |
Flow Rate Control Device And Abnormality Detection Method Using Flow Rate Control Device
App 20200232873 - NAGASE; Masaaki ; et al. | 2020-07-23 |
Fluid Control System and Flow Rate Measurement Method
App 20200159257 - YAMASHITA; Satoru ; et al. | 2020-05-21 |
Valve with built-in orifice, and pressure-type flow rate control device
Grant 10,648,572 - Sawada , et al. | 2020-05-12 |
Vaporization supply apparatus
Grant 10,646,844 - Hidaka , et al. | 2020-05-12 |
Liquid level indicator and liquid raw material vaporization feeder
Grant 10,604,840 - Hidaka , et al. | 2020-03-31 |
Liquid Level Meter, Vaporizer Equipped With The Same, And Liquid Level Detection Method
App 20200088561 - HIDAKA; Atsushi ; et al. | 2020-03-19 |
Concentration Detection Method And Pressure-type Flow Rate Control Device
App 20200018736 - NAGASE; Masaaki ; et al. | 2020-01-16 |
Flow Rate Measuring Method And Flow Rate Measuring Device
App 20200011720 - NAGASE; Masaaki ; et al. | 2020-01-09 |
Fluid Sealing Device And Pressure Detector Calibration Device
App 20190368757 - TAKIMOTO; Masahiko ; et al. | 2019-12-05 |
Optical gas concentration measuring method by forming a differential signal using lights with different absorbabilities to a raw material in a gas flow path using a time-sharing method
Grant 10,408,742 - Nagase , et al. Sept | 2019-09-10 |
Concentration Measuring Device
App 20190271636 - DEGUCHI; Yoshihiro ; et al. | 2019-09-05 |
Thruster Control Device And Thruster Control Method
App 20190263541 - OKUMURA; Yukihiro ; et al. | 2019-08-29 |
Inline concentration meter and concentration detection method
Grant 10,371,630 - Deguchi , et al. | 2019-08-06 |
Pressure Type Flow Rate Control Device, And Flow Rate Calculating Method And Flow Rate Control Method For Same
App 20190227577 - NAGASE; Masaaki ; et al. | 2019-07-25 |
Method Of Determining Flow Rate Of Gas
App 20190212176 - MIYOSHI; Risako ; et al. | 2019-07-11 |
Concentration measurement device
Grant 10,324,029 - Deguchi , et al. | 2019-06-18 |
Valve With Built-in Orifice, And Pressure-type Flow Rate Control Device
App 20190178389 - SAWADA; Yohei ; et al. | 2019-06-13 |
Flow Rate Control Device, Method Of Calibrating Flow Rate Of Flow Rate Control Device, Flow Rate Measuring Device, And Method Of Measuring Flow Rate Using Flow Rate Measuring Device
App 20190137309 - SAWADA; Yohei ; et al. | 2019-05-09 |
Pressure-type flow rate control device
Grant 10,261,522 - Nagase , et al. | 2019-04-16 |
Pressure-type Flow Rate Control Device And Flow Rate Self-diagnosis Method
App 20190094847 - NAGASE; Masaaki ; et al. | 2019-03-28 |
Inline concentration measurement device
Grant 10,222,323 - Deguchi , et al. | 2019-03-05 |
Gas Supply Device Capable Of Measuring Flow Rate, Flowmeter, And Flow Rate Measuring Method
App 20190017855 - SAWADA; Yohei ; et al. | 2019-01-17 |
Thrust control valve and flying object
Grant 10,138,844 - Hidaka , et al. Nov | 2018-11-27 |
Flow meter and flow control device provided therewith
Grant 10,073,469 - Nagase , et al. September 11, 2 | 2018-09-11 |
Concentration Measurement Device
App 20180217053 - DEGUCHI; Yoshihiro ; et al. | 2018-08-02 |
Concentration Measurement Device
App 20180217054 - DEGUCHI; Yoshihiro ; et al. | 2018-08-02 |
Raw material vaporization and supply apparatus
Grant 9,994,955 - Hidaka , et al. June 12, 2 | 2018-06-12 |
Fastening structure for brittle-fracturable panel, and method for fastening light transmission window panel comprising brittle-fracturable panel employing same
Grant 9,983,051 - Nagase , et al. May 29, 2 | 2018-05-29 |
Flow rate range variable type flow rate control apparatus
Grant 9,921,089 - Ohmi , et al. March 20, 2 | 2018-03-20 |
Vaporization Supply Apparatus
App 20180071702 - HIDAKA; Atsushi ; et al. | 2018-03-15 |
Flow Control System With Build-down System Flow Monitoring
App 20170364099 - Nagase; Masaaki ; et al. | 2017-12-21 |
Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said device
Grant 9,841,770 - Hirata , et al. December 12, 2 | 2017-12-12 |
Liquid Level Indicator And Liquid Raw Material Vaporization Feeder
App 20170327949 - Hidaka; Atsushi ; et al. | 2017-11-16 |
Optical Gas Concentration Measuring Method, And Method For Monitoring Gas Concentration By Said Method
App 20170315051 - Nagase; Masaaki ; et al. | 2017-11-02 |
Flow control device equipped with flow monitor
Grant 9,791,867 - Nagase , et al. October 17, 2 | 2017-10-17 |
Multi-hole orifice plate for flow control, and flow controller using the same
Grant 9,746,856 - Hirata , et al. August 29, 2 | 2017-08-29 |
Flow control system with build-down system flow monitoring
Grant 9,733,649 - Nagase , et al. August 15, 2 | 2017-08-15 |
Pressure-type Flow Rate Control Device
App 20170212531 - NAGASE; Masaaki ; et al. | 2017-07-27 |
Inline Concentration Measurement Device
App 20170199117 - DEGUCHI; Yoshihiro ; et al. | 2017-07-13 |
Raw material fluid density detector
Grant 9,651,467 - Deguchi , et al. May 16, 2 | 2017-05-16 |
Calibration method and flow rate measurement method for flow rate controller for gas supply device
Grant 9,638,560 - Nagase , et al. May 2, 2 | 2017-05-02 |
Raw material vaporizing and supplying apparatus equipped with raw material concentration
Grant 9,631,777 - Nagase , et al. April 25, 2 | 2017-04-25 |
Pressure type flow rate control device
Grant 9,574,917 - Hidaka , et al. February 21, 2 | 2017-02-21 |
Raw material gas supply apparatus for semiconductor manufacturing equipment
Grant 9,556,518 - Nagase , et al. January 31, 2 | 2017-01-31 |
Pressure-type Flow Control Device And Method For Preventing Overshooting At Start Of Flow Control Performed By Said Device
App 20160327963 - HIRATA; Kaoru ; et al. | 2016-11-10 |
Flow Control Device Equipped With Flow Monitor
App 20160282880 - NAGASE; Masaaki ; et al. | 2016-09-29 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20160274595 - Ohmi; Tadahiro ; et al. | 2016-09-22 |
Flow Meter And Flow Control Device Provided Therewith
App 20160239026 - NAGASE; Masaaki ; et al. | 2016-08-18 |
Thrust Control Valve And Flying Object
App 20160208743 - HIDAKA; Shozo ; et al. | 2016-07-21 |
Flow rate range variable type flow rate control apparatus
Grant 9,383,758 - Ohmi , et al. July 5, 2 | 2016-07-05 |
Inline Concentration Meter And Concentration Detection Method
App 20160169800 - Deguchi; Yoshihiro ; et al. | 2016-06-16 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20160109886 - Ohmi; Tadahiro ; et al. | 2016-04-21 |
Fastening Structure For Brittle-fracturable Panel, And Method For Fastening Light Transmission Window Panel Comprising Brittle-fracturable Panel Employing Same
App 20160084700 - NAGASE; Masaaki ; et al. | 2016-03-24 |
Multi-hole Orifice Plate For Flow Control, And Flow Controller Using The Same
App 20160070271 - HIRATA; Kaoru ; et al. | 2016-03-10 |
Raw Material Fluid Density Detector
App 20160061704 - DEGUCHI; Yoshihiro ; et al. | 2016-03-03 |
Mixed gas supply device
Grant 9,233,347 - Nagase , et al. January 12, 2 | 2016-01-12 |
Gasket-integrated Ceramic Orifice Plate
App 20150362105 - NAGASE; Masaaki ; et al. | 2015-12-17 |
Raw Material Vaporization And Supply Apparatus
App 20150322567 - Hidaka; Atsushi ; et al. | 2015-11-12 |
Flow rate measurement device and flow rate measurement method for flow rate controller for gas supply device
Grant 9,163,969 - Sawada , et al. October 20, 2 | 2015-10-20 |
Piezoelectrically driven valve and piezoelectrically driven flow rate control device
Grant 9,163,743 - Hidaka , et al. October 20, 2 | 2015-10-20 |
Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employed
Grant 9,133,951 - Ohmi , et al. September 15, 2 | 2015-09-15 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20150160662 - Ohmi; Tadahiro ; et al. | 2015-06-11 |
Flow Control System With Build-down System Flow Monitoring
App 20150136248 - Nagase; Masaaki ; et al. | 2015-05-21 |
Flow rate range variable type flow rate control apparatus
Grant 9,010,369 - Ohmi , et al. April 21, 2 | 2015-04-21 |
Gas supply apparatus equipped with vaporizer
Grant 8,931,506 - Nagata , et al. January 13, 2 | 2015-01-13 |
Raw Material Vaporizing And Supplying Apparatus Equipped With Raw Material Concentration
App 20140299206 - Nagase; Masaaki ; et al. | 2014-10-09 |
Raw Material Vaporizing And Supplying Apparatus
App 20140216339 - Nagase; Masaaki ; et al. | 2014-08-07 |
Raw Material Gas Supply Apparatus For Semiconductor Manufacturing Equipment
App 20140190581 - Nagase; Masaaki ; et al. | 2014-07-10 |
Vaporizer
Grant 8,724,974 - Ohmi , et al. May 13, 2 | 2014-05-13 |
Raw Material Vaporizing And Supplying Apparatus
App 20140124064 - Hidaka; Atsushi ; et al. | 2014-05-08 |
Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used
Grant 8,714,188 - Ohmi , et al. May 6, 2 | 2014-05-06 |
Flow Rate Measurement Device And Flow Rate Measurement Method For Flow Rate Controller For Gas Supply Device
App 20140013838 - Sawada; Yohei ; et al. | 2014-01-16 |
Method for detecting malfunction of valve on the downstream side of throttle mechanism of pressure type flow control apparatus
Grant 8,606,412 - Nagase , et al. December 10, 2 | 2013-12-10 |
Gas supply system for semiconductor manufacturing facilities
Grant 8,601,976 - Nishino , et al. December 10, 2 | 2013-12-10 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20130220451 - Ohmi; Tadahiro ; et al. | 2013-08-29 |
Calibration Method And Flow Rate Measurement Method For Flow Rate Controller For Gas Supply Device
App 20130186471 - Nagase; Masaaki ; et al. | 2013-07-25 |
Flow rate range variable type flow rate control apparatus
Grant 8,418,714 - Ohmi , et al. April 16, 2 | 2013-04-16 |
Vaporizer
App 20130084059 - Ohmi; Tadahiro ; et al. | 2013-04-04 |
Mixed Gas Supply Apparatus
App 20130025718 - Nagase; Masaaki ; et al. | 2013-01-31 |
Method For Water Hammerless Opening Of Fluid Passage, And Method For Supplying Chemical Solutions And Device For Water Hammerless Opening For Which The Method Is Used
App 20130000737 - OHMI; Tadahiro ; et al. | 2013-01-03 |
Pressure Type Flow Rate Control Device
App 20120298220 - HIDAKA; Atsushi ; et al. | 2012-11-29 |
Piezoelectrically Driven Valve and Piezoelectrically Driven Flow Rate Control Device
App 20120273061 - Hidaka; Atsushi ; et al. | 2012-11-01 |
Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used
Grant 8,047,225 - Ohmi , et al. November 1, 2 | 2011-11-01 |
Evaporation supply apparatus for raw material and automatic pressure regulating device used therewith
Grant 8,047,510 - Hirata , et al. November 1, 2 | 2011-11-01 |
Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method
Grant 8,020,574 - Ohmi , et al. September 20, 2 | 2011-09-20 |
Discontinuous Switching Fluid Flow Rate Control Method Using Pressure Type Flow Rate Control Device
App 20110120566 - OHMI; Tadahiro ; et al. | 2011-05-26 |
Method for detecting abnormality in fluid supply line using fluid control apparatus with pressure sensor
Grant 7,945,414 - Nagase , et al. May 17, 2 | 2011-05-17 |
Gas Supply Apparatus Equipped With Vaporizer
App 20110100483 - Nagata; Atsushi ; et al. | 2011-05-05 |
Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method
Grant 7,926,509 - Ohmi , et al. April 19, 2 | 2011-04-19 |
Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used
Grant 7,849,869 - Ohmi , et al. December 14, 2 | 2010-12-14 |
Internal pressure controller of chamber and internal pressure subject-to-control type chamber
Grant 7,798,167 - Ohmi , et al. September 21, 2 | 2010-09-21 |
Gas Supply System For Semiconductor Manufactruing Facilities
App 20100192854 - Nishino; Kouji ; et al. | 2010-08-05 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20100139775 - Ohmi; Tadahiro ; et al. | 2010-06-10 |
Evaporation Supply Apparatus For Raw Material And Automatic Pressure Regulating Device Used Therewith
App 20100012026 - Hirata; Kaoru ; et al. | 2010-01-21 |
Method For Detecting Abnormality In Fluid Supply Line Using Fluid Control Apparatus With Pressure Sensor
App 20090326719 - Nagase; Masaaki ; et al. | 2009-12-31 |
Method For Detecting Malfunction Of Valve On The Downstream Side Of Throttle Mechanism Of Pressure Type Flow Control Apparatus
App 20090292399 - Nagase; Masaaki ; et al. | 2009-11-26 |
Method For Water Hammerless Opening Of Fluid Passage, And Method For Supplying Chemical Solutions And Device For Water Hammerless Opening For Which The Method Is Used
App 20090255587 - OHMI; Tadahiro ; et al. | 2009-10-15 |
Gasket Type Orifice And Pressure Type Flow Rate Control Apparatus For Which The Orifice Is Employed
App 20090171507 - Ohmi; Tadahiro ; et al. | 2009-07-02 |
Method for Water Hammerless Opening of Fluid Passage,and Method for Supplying Chemical Solutions and Device for Water Hammerless Opening for Which the Method is Used
App 20080257415 - Ohmi; Tadahiro ; et al. | 2008-10-23 |
Method For Closing Fluid Passage, And Water Hammerless Valve Device And Water Hammerless Closing Device Used In The Method
App 20080035877 - OHMI; Tadahiro ; et al. | 2008-02-14 |
Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method
Grant 7,278,437 - Ohmi , et al. October 9, 2 | 2007-10-09 |
Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method
Grant 7,219,533 - Ohmi , et al. May 22, 2 | 2007-05-22 |
Method For Closing Fluid Passage, And Water Hammerless Valve Device And Water Hammerless Closing Device Used In The Method
App 20070068577 - OHMI; Tadahiro ; et al. | 2007-03-29 |
Internal Pressure Controller Of Chamber And Internal Pressure Subject -to- Control Type Chamber
App 20060207595 - OHMI; Tadahiro ; et al. | 2006-09-21 |
Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method
Grant 7,080,658 - Ohmi , et al. July 25, 2 | 2006-07-25 |
Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method
App 20060076060 - Ohmi; Tadahiro ; et al. | 2006-04-13 |
Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method
App 20050257603 - Ohmi, Tadahiro ; et al. | 2005-11-24 |
Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method
App 20050241697 - Ohmi, Tadahiro ; et al. | 2005-11-03 |
Pharmaceutical preparations for external use containing non-steroidal anti-inflammatory and analgesic agents
Grant 6,635,674 - Kaneko , et al. October 21, 2 | 2003-10-21 |
Satellite signal receiving apparatus
Grant 5,206,954 - Inoue , et al. April 27, 1 | 1993-04-27 |
Cosmetic composition for removing make-up
Grant 5,179,128 - Lyle , et al. January 12, 1 | 1993-01-12 |
System for thermally recording data by partially overlapping successive data segment periods
Grant 4,355,319 - Takeuchi , et al. October 19, 1 | 1982-10-19 |
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