NAGAMI; Shuzo
Patent Applications and Registrations
Patent applications and USPTO patent grants for NAGAMI; Shuzo.The latest application filed is for "substrate processing apparatus and substrate processing method".
- NAGAMI; Shuzo - Kyoto JP
| Patent | Date |
|---|---|
| Substrate Processing Apparatus And Substrate Processing Method App 20080210261 - NAGAMI; Shuzo ; et al. | 2008-09-04 |
| Substrate cleaning and drying apparatus Grant 7,415,985 - Nagami August 26, 2 | 2008-08-26 |
| Substrate treating apparatus App 20060137726 - Sano; Kenichi ; et al. | 2006-06-29 |
| Substrate treating apparatus and method App 20060130880 - Nagami; Shuzo | 2006-06-22 |
| Substrate processing apparatus and substrate processing method App 20050274401 - Nagami, Shuzo ; et al. | 2005-12-15 |
| Substrate treating method and apparatus App 20050236018 - Nagami, Shuzo | 2005-10-27 |
| Substrate treating method and apparatus Grant 6,941,956 - Osawa , et al. September 13, 2 | 2005-09-13 |
| Method of removing metal ion and apparatus for treating substrate Grant 6,902,677 - Nagami June 7, 2 | 2005-06-07 |
| Substrate cleaning and drying apparatus App 20050056307 - Nagami, Shuzo | 2005-03-17 |
| Substrate treating apparatus and substrate treating method App 20040112410 - Araki, Hiroyuki ; et al. | 2004-06-17 |
| Substrate processing apparatus and substrate processing method App 20040060505 - Nagami, Shuzo ; et al. | 2004-04-01 |
| Method of removing metal ion and apparatus for treating substrate App 20040055967 - Nagami, Shuzo | 2004-03-25 |
| Substrate treating method and apparatus App 20030176078 - Osawa, Atsushi ; et al. | 2003-09-18 |
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