Patent | Date |
---|
Electron Microscope And Beam Irradiation Method App 20200411278 - NAGAI; Takamitsu | 2020-12-31 |
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 9,368,314 - Nakasuji , et al. June 14, 2 | 2016-06-14 |
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140319346 - Nakasuji; Mamoru ;   et al. | 2014-10-30 |
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,803,103 - Nakasuji , et al. August 12, 2 | 2014-08-12 |
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140034831 - Nakasuji; Mamoru ;   et al. | 2014-02-06 |
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,368,031 - Nakasuji , et al. February 5, 2 | 2013-02-05 |
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20120032079 - Nakasuji; Mamoru ;   et al. | 2012-02-09 |
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,053,726 - Nakasuji , et al. November 8, 2 | 2011-11-08 |
Semiconductor substrate, substrate inspection method, semiconductor device manufacturing method, and inspection apparatus Grant 7,973,281 - Hayashi , et al. July 5, 2 | 2011-07-05 |
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device Grant 7,847,250 - Nagahama , et al. December 7, 2 | 2010-12-07 |
Semiconductor substrate, substrate inspection method, semiconductor device manufacturing method, and inspection apparatus App 20090272901 - Hayashi; Hiroyuki ;   et al. | 2009-11-05 |
Semiconductor substrate, substrate inspection method, semiconductor device manufacturing method, and inspection apparatus Grant 7,573,066 - Hayashi , et al. August 11, 2 | 2009-08-11 |
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 7,569,838 - Watanabe , et al. August 4, 2 | 2009-08-04 |
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device App 20090072139 - Nagahama; Ichirota ;   et al. | 2009-03-19 |
Inspection system by charged particle beam and method of manufacturing devices using the system App 20090032708 - Nakasuji; Mamoru ;   et al. | 2009-02-05 |
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device Grant 7,462,829 - Nagahama , et al. December 9, 2 | 2008-12-09 |
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,411,191 - Nakasuji , et al. August 12, 2 | 2008-08-12 |
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20080173814 - Watanabe; Kenji ;   et al. | 2008-07-24 |
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 7,351,969 - Watanabe , et al. April 1, 2 | 2008-04-01 |
Semiconductor substrate, substrate inspection method, semiconductor device manufacturing method, and inspection apparatus App 20080011947 - Hayashi; Hiroyuki ;   et al. | 2008-01-17 |
Method and apparatus for determining defect detection sensitivity data, control method of defect detection apparatus, and method and apparatus for detecting defect of semiconductor devices Grant 7,302,091 - Hamaguchi , et al. November 27, 2 | 2007-11-27 |
Inspection system by charged particle beam and method of manufacturing devices using the same App 20070235644 - Nakasuji; Mamoru ;   et al. | 2007-10-11 |
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device App 20070187600 - Nagahama; Ichirota ;   et al. | 2007-08-16 |
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,241,993 - Nakasuji , et al. July 10, 2 | 2007-07-10 |
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device Grant 7,211,796 - Nagahama , et al. May 1, 2 | 2007-05-01 |
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20060118719 - Watanabe; Kenji ;   et al. | 2006-06-08 |
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 6,992,290 - Watanabe , et al. January 31, 2 | 2006-01-31 |
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device App 20050029451 - Nagahama, Ichirota ;   et al. | 2005-02-10 |
Method and apparatus for determining defect detection sensitivity data, control method of defect detection apparatus, and method and apparatus for detecting defect of semiconductor devices App 20040151362 - Hamaguchi, Akira ;   et al. | 2004-08-05 |
Substrate inspecting system using electron beam and substrate inspecting method using electron beam Grant 6,563,114 - Nagahama , et al. May 13, 2 | 2003-05-13 |
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20020088940 - Watanabe, Kenji ;   et al. | 2002-07-11 |
Inspection system by charged particle beam and method of manufacturing devices using the system App 20020028399 - Nakasuji, Mamoru ;   et al. | 2002-03-07 |
Inspection method and apparatus using electron beam Grant 6,265,719 - Yamazaki , et al. July 24, 2 | 2001-07-24 |
Electron beam inspection method and apparatus Grant 6,259,094 - Nagai , et al. July 10, 2 | 2001-07-10 |
Electrostatic lens and method for producing the same Grant 5,444,256 - Nagai , et al. August 22, 1 | 1995-08-22 |