loadpatents
Patent applications and USPTO patent grants for Nagai; Shinji.The latest application filed is for "tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method".
Patent | Date |
---|---|
Extreme ultraviolet light generation apparatus and electronic device manufacturing method Grant 11,272,608 - Ueda , et al. March 8, 2 | 2022-03-08 |
Tin Trap Device, Extreme Ultraviolet Light Generation Apparatus, And Electronic Device Manufacturing Method App 20210364928 - NIIMI; Gota ;   et al. | 2021-11-25 |
Extreme Ultraviolet Light Generation Apparatus And Electronic Device Manufacturing Method App 20210235571 - UEDA; Atsushi ;   et al. | 2021-07-29 |
Extreme ultraviolet light generation device and electronic device manufacturing method Grant 11,042,102 - Nagai , et al. June 22, 2 | 2021-06-22 |
Continuous Casting Method, Cast Slab, And Continuous Casting Apparatus App 20200406341 - NAGAI; Shinji ;   et al. | 2020-12-31 |
Extreme ultraviolet light generation apparatus Grant 10,820,400 - Tomuro , et al. October 27, 2 | 2020-10-27 |
Extreme Ultraviolet Light Generation Device And Electronic Device Manufacturing Method App 20200301285 - NAGAI; Shinji ;   et al. | 2020-09-24 |
Extreme ultraviolet light generation apparatus Grant 10,764,986 - Nagai , et al. Sep | 2020-09-01 |
Extreme Ultraviolet Light Generation Apparatus App 20200077501 - TOMURO; Hiroaki ;   et al. | 2020-03-05 |
Continuous-cast slab, method and apparatus of manufacturing the same, and method and apparatus of manufacturing thick steel plate Grant 10,532,386 - Mizoguchi , et al. Ja | 2020-01-14 |
Extreme ultraviolet light generation apparatus Grant 10,314,152 - Nagai , et al. | 2019-06-04 |
Extreme ultraviolet light generating device Grant 10,268,119 - Nagai , et al. | 2019-04-23 |
Extreme ultraviolet light generation device Grant 10,136,510 - Nagai , et al. November 20, 2 | 2018-11-20 |
Extreme Ultraviolet Light Generating Device App 20180224748 - NAGAI; Shinji ;   et al. | 2018-08-09 |
Liquid Cooling Device And Beverage Forming Device App 20180206671 - KODAMA; Masaaki ;   et al. | 2018-07-26 |
Extreme ultraviolet light generation apparatus and method of designing the same Grant 10,001,706 - Ueda , et al. June 19, 2 | 2018-06-19 |
Stirring Element And Stirring Device App 20180140128 - KODAMA; Masaaki ;   et al. | 2018-05-24 |
Extreme ultraviolet light generation device Grant 9,872,372 - Ueda , et al. January 16, 2 | 2018-01-16 |
Continuous-cast Slab, Method And Apparatus Of Manufacturing The Same, And Method And Apparatus Of Manufacturing Thick Steel Plate App 20180009015 - MIZOGUCHI; Toshiaki ;   et al. | 2018-01-11 |
Extreme Ultraviolet Light Generation Apparatus And Method Of Designing The Same App 20170315446 - UEDA; Atsushi ;   et al. | 2017-11-02 |
Extreme Ultraviolet Light Generation Device App 20170238407 - NAGAI; Shinji ;   et al. | 2017-08-17 |
Extreme Ultraviolet Light Generation Device App 20170094767 - UEDA; Atsushi ;   et al. | 2017-03-30 |
Extreme Ultraviolet Light Generation Apparatus App 20170064800 - NAGAI; Shinji ;   et al. | 2017-03-02 |
Drug For Treatment Of Tinnitus Patients App 20170049717 - HIRAHARA; Yoshifumi ;   et al. | 2017-02-23 |
Drug For Treatment Of Tinnitus Patients App 20170049718 - DOI; Katsumi ;   et al. | 2017-02-23 |
Extreme Ultraviolet Light Generation Apparatus App 20170055336 - NAGAI; Shinji ;   et al. | 2017-02-23 |
Extreme ultraviolet light generation apparatus Grant 9,510,433 - Nagai , et al. November 29, 2 | 2016-11-29 |
Extreme Ultraviolet Light Generation System And Extreme Ultraviolet Light Generation Apparatus App 20150296604 - NAGAI; Shinji ;   et al. | 2015-10-15 |
Extreme Ultraviolet Light Generation Apparatus App 20150008345 - NAGAI; Shinji ;   et al. | 2015-01-08 |
Chamber apparatus and extreme ultraviolet light generation system Grant 8,901,522 - Ueno , et al. December 2, 2 | 2014-12-02 |
Polarization purity control device and gas laser apparatus provided with the same Grant 8,902,948 - Nagai , et al. December 2, 2 | 2014-12-02 |
Extreme ultraviolet light source apparatus Grant 8,901,524 - Asayama , et al. December 2, 2 | 2014-12-02 |
Polarization purity control device and gas laser apparatus provided with the same Grant 8,891,574 - Nagai , et al. November 18, 2 | 2014-11-18 |
Chamber apparatus and extreme ultraviolet light generation system Grant 8,884,257 - Nagai , et al. November 11, 2 | 2014-11-11 |
Extreme ultraviolet light generation apparatus Grant 8,872,142 - Nagai , et al. October 28, 2 | 2014-10-28 |
Gas discharge chamber Grant 8,855,167 - Nagai , et al. October 7, 2 | 2014-10-07 |
Extreme ultraviolet light source apparatus Grant 8,841,641 - Kakizaki , et al. September 23, 2 | 2014-09-23 |
Chamber apparatus Grant 8,748,853 - Nagai , et al. June 10, 2 | 2014-06-10 |
Polarization Purity Control Device And Gas Laser Apparatus Provided With The Same App 20140050239 - NAGAI; Shinji ;   et al. | 2014-02-20 |
Extreme ultraviolet light generation apparatus Grant 8,629,417 - Nagai , et al. January 14, 2 | 2014-01-14 |
Extreme Ultraviolet Light Source Apparatus App 20140008554 - ASAYAMA; Takeshi ;   et al. | 2014-01-09 |
Extreme ultraviolet light generation system Grant 8,624,208 - Nagai , et al. January 7, 2 | 2014-01-07 |
Gas Discharge Chamber App 20130322483 - NAGAI; Shinji ;   et al. | 2013-12-05 |
Cleaning Method For Euv Light Generation Apparatus App 20130319466 - MIZOGUCHI; Hakaru ;   et al. | 2013-12-05 |
Extreme ultraviolet light source apparatus Grant 8,586,954 - Asayama , et al. November 19, 2 | 2013-11-19 |
Extreme ultraviolet light source apparatus Grant 8,569,723 - Nagai , et al. October 29, 2 | 2013-10-29 |
Extreme ultraviolet light source apparatus Grant 8,558,202 - Yanagida , et al. October 15, 2 | 2013-10-15 |
Extreme Ultraviolet Light Source Apparatus App 20130256567 - KAKIZAKI; Kouji ;   et al. | 2013-10-03 |
Extreme ultraviolet light source apparatus Grant 8,530,870 - Kakizaki , et al. September 10, 2 | 2013-09-10 |
Extreme ultraviolet light source apparatus Grant 8,530,869 - Nagai , et al. September 10, 2 | 2013-09-10 |
Excimer Laser Device App 20130223468 - NAGAI; Shinji ;   et al. | 2013-08-29 |
Extreme ultraviolet light source apparatus Grant 8,513,630 - Ueno , et al. August 20, 2 | 2013-08-20 |
Extreme ultraviolet light source apparatus Grant 8,507,883 - Endo , et al. August 13, 2 | 2013-08-13 |
Gas discharge chamber Grant 8,503,499 - Nagai , et al. August 6, 2 | 2013-08-06 |
Extreme Ultraviolet Light Generation Apparatus App 20130161540 - NAGAI; Shinji ;   et al. | 2013-06-27 |
Substrate Inspection Jig And Substrate Inspection Method App 20130154681 - Miyanishi; Keishi ;   et al. | 2013-06-20 |
Extreme Ultraviolet Light Generation Apparatus, Target Collection Device, And Target Collection Method App 20130134326 - Yabu; Takayuki ;   et al. | 2013-05-30 |
Chamber Apparatus And Extreme Ultraviolet Light Generation System App 20130126761 - NAGAI; Shinji ;   et al. | 2013-05-23 |
Extreme ultraviolet light source apparatus Grant 8,436,328 - Yanagida , et al. May 7, 2 | 2013-05-07 |
Extreme ultraviolet light source apparatus Grant 8,399,867 - Endo , et al. March 19, 2 | 2013-03-19 |
Extreme Ultraviolet Light Generation Apparatus App 20120267553 - NAGAI; Shinji ;   et al. | 2012-10-25 |
Chamber Apparatus App 20120248343 - NAGAI; Shinji ;   et al. | 2012-10-04 |
Extreme Ultraviolet Light Generation Apparatus App 20120223257 - NAGAI; Shinji ;   et al. | 2012-09-06 |
Extreme ultraviolet light generation apparatus Grant 8,242,474 - Nagai , et al. August 14, 2 | 2012-08-14 |
Extreme Ultraviolet Light Source Apparatus App 20120176036 - ASAYAMA; Takeshi ;   et al. | 2012-07-12 |
Polarization Purity Control Device And Gas Laser Apparatus Provided With The Same App 20120177072 - NAGAI; Shinji ;   et al. | 2012-07-12 |
Extreme Ultraviolet Light Source Apparatus App 20120119116 - KAKIZAKI; Kouji ;   et al. | 2012-05-17 |
Polarization purity control device and gas laser apparatus provided with the same Grant 8,165,181 - Nagai , et al. April 24, 2 | 2012-04-24 |
Extreme Ultraviolet Light Source Apparatus App 20120091893 - YANAGIDA; Tatsuya ;   et al. | 2012-04-19 |
Extreme ultraviolet light source apparatus Grant 8,158,959 - Asayama , et al. April 17, 2 | 2012-04-17 |
Extreme ultraviolet light source apparatus Grant 8,067,756 - Ueno , et al. November 29, 2 | 2011-11-29 |
Chamber Apparatus And Extreme Ultraviolet Light Generation System App 20110284775 - Ueno; Yoshifumi ;   et al. | 2011-11-24 |
Extreme Ultraviolet Light Source Apparatus App 20110266467 - NAGAI; Shinji ;   et al. | 2011-11-03 |
Extreme Ultraviolet Light Source Apparatus App 20110266468 - NAGAI; Shinji ;   et al. | 2011-11-03 |
Chamber Apparatus App 20110253913 - NAGAI; Shinji ;   et al. | 2011-10-20 |
Mass Spectrometer And Mass Spectrometry Method App 20110248157 - Sugiyama; Masuyuki ;   et al. | 2011-10-13 |
Extreme Ultraviolet Light Generation System App 20110226745 - Nagai; Shinji ;   et al. | 2011-09-22 |
Extreme Ultraviolet Light Generation Apparatus App 20110204249 - NAGAI; Shinji ;   et al. | 2011-08-25 |
Extreme ultraviolet light source apparatus Grant 8,003,963 - Nagai , et al. August 23, 2 | 2011-08-23 |
Extreme ultraviolet light source apparatus Grant 7,999,241 - Nagai , et al. August 16, 2 | 2011-08-16 |
Ion trap mass spectrometry method Grant 7,989,764 - Yasuda , et al. August 2, 2 | 2011-08-02 |
Excimer Laser Device App 20110164647 - NAGAI; Shinji ;   et al. | 2011-07-07 |
Gas Discharge Chamber App 20110158281 - NAGAI; Shinji ;   et al. | 2011-06-30 |
Optical element for gas laser and gas laser apparatus using the same Grant 7,965,756 - Wakabayashi , et al. June 21, 2 | 2011-06-21 |
Narrow-spectrum laser device Grant 7,903,700 - Nagai , et al. March 8, 2 | 2011-03-08 |
Extreme Ultraviolet Light Source Apparatus App 20100243922 - Asayama; Takeshi ;   et al. | 2010-09-30 |
Extreme Ultraviolet Light Source Apparatus App 20100213395 - UENO; Yoshifumi ;   et al. | 2010-08-26 |
Extreme Ultraviolet Light Source Apparatus App 20100181503 - Yanagida; Tatsuya ;   et al. | 2010-07-22 |
Extreme Ultraviolet Light Source Apparatus App 20100140513 - Nagai; Shinji ;   et al. | 2010-06-10 |
Polarization Purity Control Device And Gas Laser Apparatus Provided With The Same App 20100128747 - NAGAI; Shinji ;   et al. | 2010-05-27 |
Extreme Ultraviolet Light Source Apparatus App 20100108918 - Nagai; Shinji ;   et al. | 2010-05-06 |
Extreme Ultraviolet Light Source Apparatus App 20100090132 - ENDO; Akira ;   et al. | 2010-04-15 |
Extreme Ultraviolet Light Source Apparatus App 20100078579 - Endo; Akira ;   et al. | 2010-04-01 |
Optical Element For Gas Laser And Gas Laser Apparatus Using The Same App 20100054297 - WAKABAYASHI; Osamu ;   et al. | 2010-03-04 |
Mass Spectrometer And Mass Spectrometry Method App 20090179148 - Yasuda; Hiroyuki ;   et al. | 2009-07-16 |
Narrow-Spectrum Laser Device App 20080285602 - Nagai; Shinji ;   et al. | 2008-11-20 |
Mass spectroscope and method of calibrating the same Grant 7,381,948 - Nagai , et al. June 3, 2 | 2008-06-03 |
Laser device for exposure device App 20080095209 - Wakabayashi; Osamu ;   et al. | 2008-04-24 |
Ion trap mass spectrometry method App 20080054173 - Yasuda; Hiroyuki ;   et al. | 2008-03-06 |
Excimer laser device App 20080037609 - NAGAI; Shinji ;   et al. | 2008-02-14 |
Mass spectroscope and method of calibrating the same App 20070069123 - Nagai; Shinji ;   et al. | 2007-03-29 |
Throttle control in internal combustion engine for noise reduction Grant 7,191,757 - Takeuchi , et al. March 20, 2 | 2007-03-20 |
Ion trap/time-of-flight mass analyzing apparatus and mass analyzing method Grant 7,186,973 - Terui , et al. March 6, 2 | 2007-03-06 |
Mass spectroscope and method of calibrating the same Grant 7,115,862 - Nagai , et al. October 3, 2 | 2006-10-03 |
Apparatus for mass spectrometry on an ion-trap method Grant 7,075,069 - Yoshinari , et al. July 11, 2 | 2006-07-11 |
Throttle control in internal combustion engine for noise reduction App 20060130810 - Takeuchi; Nobutaka ;   et al. | 2006-06-22 |
Ion trap/time-of-flight mass analyzing apparatus and mass analyzing method App 20050279926 - Terui, Yasushi ;   et al. | 2005-12-22 |
Mass spectroscope and method of calibrating the same App 20050139763 - Nagai, Shinji ;   et al. | 2005-06-30 |
Ultra-narrow band flourine laser apparatus Grant 6,839,373 - Takehisa , et al. January 4, 2 | 2005-01-04 |
Word-line deficiency detection method for semiconductor memory device Grant 6,839,293 - Kawamoto , et al. January 4, 2 | 2005-01-04 |
Ion trap mass spectrometer and spectrometry Grant 6,683,303 - Yoshinari , et al. January 27, 2 | 2004-01-27 |
Apparatus for mass spectrometry on an ion-trap method App 20030205667 - Yoshinari, Kiyomi ;   et al. | 2003-11-06 |
Vacuum ultraviolet laser wavelength measuring apparatus Grant 6,636,297 - Wakabayashi , et al. October 21, 2 | 2003-10-21 |
Apparatus for mass spectrometry on an ion-trap method Grant 6,633,033 - Yoshinari , et al. October 14, 2 | 2003-10-14 |
Wavelength detection device for line-narrowed laser apparatus and ultra line-narrowed fluorine laser apparatus Grant 6,628,682 - Takehisa , et al. September 30, 2 | 2003-09-30 |
Word-line deficiency detection method for semiconductor memory device App 20030058717 - Kawamoto, Satoru ;   et al. | 2003-03-27 |
Ion trap mass spectrometer and spectrometry App 20020162958 - Yoshinari, Kiyomi ;   et al. | 2002-11-07 |
Vacuum ultraviolet laser wavelength measuring apparatus App 20020159064 - Wakabayashi, Osamu ;   et al. | 2002-10-31 |
Apparatus for mass spectrometry on an ion-trap method App 20020008199 - Yoshinari, Kiyomi ;   et al. | 2002-01-24 |
Word-line deficiency detection method for semiconductor memory device App 20010009525 - Kawamoto, Satoru ;   et al. | 2001-07-26 |
Mass spectrometric analysis method and apparatus using the method App 20010007349 - Nagai, Shinji | 2001-07-12 |
Wavelength detector Grant 6,243,163 - Wakabayashi , et al. June 5, 2 | 2001-06-05 |
Charging apparatus for controlling supplement of electric current to a rechargeable battery Grant 5,675,235 - Nagai October 7, 1 | 1997-10-07 |
Indole derivatives and anti-ulcer compositions thereof Grant 5,252,580 - Takahashi , et al. October 12, 1 | 1993-10-12 |
Battery pack including measuring and indicating Grant 5,216,371 - Nagai June 1, 1 | 1993-06-01 |
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