loadpatents
name:-0.0083069801330566
name:-0.0038471221923828
name:-0.00043296813964844
Nagai; Mikio Patent Filings

Nagai; Mikio

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nagai; Mikio.The latest application filed is for "passive capacitively-coupled electrostatic (cce) probe method for detecting plasma instabilities in a plasma processing chamber".

Company Profile
0.5.7
  • Nagai; Mikio - Fremont CA
  • Nagai; Mikio - Komaki JP
  • Nagai; Mikio - Aichi-ken JP
  • Nagai; Mikio - Aichi JP
  • Nagai; Mikio - Tokyo JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Passive capacitively-coupled electrostatic (CCE) probe method for detecting plasma instabilities in a plasma processing chamber
Grant 9,153,421 - Booth , et al. October 6, 2
2015-10-06
Passive Capacitively-coupled Electrostatic (cce) Probe Method For Detecting Plasma Instabilities In A Plasma Processing Chamber
App 20120316834 - Booth; Jean-Paul ;   et al.
2012-12-13
Passive capacitively-coupled electrostatic (CCE) probe arrangement for detecting plasma instabilities in a plasma processing chamber
Grant 8,179,152 - Booth , et al. May 15, 2
2012-05-15
Radical generating method, etching method and apparatus for use in these methods
Grant 7,875,199 - Goto , et al. January 25, 2
2011-01-25
Passive Capacitively-coupled Electrostatic (cce) Probe Arrangement For Detecting Plasma Instabilities In A Plasma Processing Chamber
App 20100033195 - Booth; Jean-Paul ;   et al.
2010-02-11
Tuning Via Facet With Minimal Rie Lag
App 20090068767 - Sirard; Stephen ;   et al.
2009-03-12
Plasma Generator
App 20080029030 - Goto; Toshio ;   et al.
2008-02-07
Radical generating method, etching method and apparatus for use in these methods
App 20070131651 - Goto; Toshio ;   et al.
2007-06-14
Printer
Grant 6,431,771 - Nagai , et al. August 13, 2
2002-08-13
Stapler and stapler positioning member
App 20020020731 - Nagai, Mikio
2002-02-21
Printer
App 20010010771 - Nagai, Mikio ;   et al.
2001-08-02

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