Nagahama; Ichirota

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nagahama; Ichirota.The latest application filed is for "inspection system by charged particle beam and method of manufacturing devices using the system".

Company Profile

0.31.29

Nagahama; Ichirota - Yokohama JP
Nagahama; Ichirota - Yokohama-shi JP
Nagahama; Ichirota - Kanagawa JP
Nagahama; Ichirota - Koga N/A JP
NAGAHAMA; Ichirota - Koga-Shi JP
Nagahama; Ichirota - Tokyo JP
Nagahama; Ichirota - Ibaraki JP
Nagahama; Ichirota - Ibaraki-ken JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 9,368,314 - Nakasuji , et al. June 14, 2	2016-06-14
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140319346 - Nakasuji; Mamoru ; et al.	2014-10-30
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,803,103 - Nakasuji , et al. August 12, 2	2014-08-12
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140034831 - Nakasuji; Mamoru ; et al.	2014-02-06
Pattern inspection method and pattern inspection apparatus Grant 8,611,638 - Nagahama December 17, 2	2013-12-17
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,368,031 - Nakasuji , et al. February 5, 2	2013-02-05
Mapping-projection-type electron beam apparatus for inspecting sample by using electrons emitted from the sample Grant 8,124,933 - Watanabe , et al. February 28, 2	2012-02-28
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20120032079 - Nakasuji; Mamoru ; et al.	2012-02-09
Pattern Inspection Method And Pattern Inspection Apparatus App 20120026316 - NAGAHAMA; Ichirota	2012-02-02
Electron beam apparatus Grant 8,067,732 - Nakasuji , et al. November 29, 2	2011-11-29
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,053,726 - Nakasuji , et al. November 8, 2	2011-11-08
Projection electron beam apparatus and defect inspection system using the apparatus Grant 8,035,082 - Yamazaki , et al. October 11, 2	2011-10-11
Electron beam apparatus and an aberration correction optical apparatus Grant 7,863,580 - Hatakeyama , et al. January 4, 2	2011-01-04
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device Grant 7,847,250 - Nagahama , et al. December 7, 2	2010-12-07
Substrate inspection apparatus, substrate inspection method and semiconductor device manufacturing method Grant 7,838,831 - Nagahama November 23, 2	2010-11-23
Projection Electron Beam Apparatus And Defect Inspection System Using The Apparatus App 20100096550 - YAMAZAKI; Yuichiro ; et al.	2010-04-22
Mask pattern inspection method, exposure condition verification method, and manufacturing method of semiconductor device Grant 7,674,570 - Nagahama , et al. March 9, 2	2010-03-09
Mapping-projection-type Electron Beam Apparatus For Inspecting Sample By Using Electrons Emitted From The Sample App 20100019149 - WATANABE; Kenji ; et al.	2010-01-28
Pattern Inspection Apparatus, Pattern Inspection Method And Computer Readable Recording Medium App 20100021046 - Nagahama; Ichirota	2010-01-28
Substrate inspection method, method of manufacturing semiconductor device, and substrate inspection apparatus Grant 7,645,988 - Nagahama , et al. January 12, 2	2010-01-12
Mapping-projection-type electron beam apparatus for inspecting sample by using electrons reflected from the sample Grant 7,592,586 - Watanabe , et al. September 22, 2	2009-09-22
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 7,569,838 - Watanabe , et al. August 4, 2	2009-08-04
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device App 20090072139 - Nagahama; Ichirota ; et al.	2009-03-19
Inspection system by charged particle beam and method of manufacturing devices using the system App 20090032708 - Nakasuji; Mamoru ; et al.	2009-02-05
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device Grant 7,462,829 - Nagahama , et al. December 9, 2	2008-12-09
Detecting apparatus and device manufacturing method Grant 7,449,691 - Hatakeyama , et al. November 11, 2	2008-11-11
Substrate Inspection Apparatus, Substrate Inspection Method and Semiconductor Device Manufacturing Method App 20080231856 - NAGAHAMA; Ichirota	2008-09-25
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,411,191 - Nakasuji , et al. August 12, 2	2008-08-12
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20080173814 - Watanabe; Kenji ; et al.	2008-07-24
Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus Grant 7,352,195 - Watanabe , et al. April 1, 2	2008-04-01
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 7,351,969 - Watanabe , et al. April 1, 2	2008-04-01
Defect inspection method, defect inspection apparatus, and semiconductor device manufacturing method App 20080013824 - Yamaguchi; Shinji ; et al.	2008-01-17
Inspection system by charged particle beam and method of manufacturing devices using the same App 20070235644 - Nakasuji; Mamoru ; et al.	2007-10-11
Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus App 20070200569 - Watanabe; Kenji ; et al.	2007-08-30
Substrate inspection apparatus, substrate inspection method and semiconductor device manufacturing method App 20070194232 - Nagahama; Ichirota ; et al.	2007-08-23
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device App 20070187600 - Nagahama; Ichirota ; et al.	2007-08-16
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,241,993 - Nakasuji , et al. July 10, 2	2007-07-10
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device Grant 7,211,796 - Nagahama , et al. May 1, 2	2007-05-01
Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus Grant 7,212,017 - Watanabe , et al. May 1, 2	2007-05-01
Mask pattern inspection method, exposure condition verification method, and manufacturing method of semiconductor device App 20070009811 - Nagahama; Ichirota ; et al.	2007-01-11
Defect inspection apparatus, program, and manufacturing method of semiconductor device Grant 7,148,479 - Onishi , et al. December 12, 2	2006-12-12
Mapping-projection-type electron beam apparatus for inspecting sample by using electrons reflected from the sample App 20060237646 - Watanabe; Kenji ; et al.	2006-10-26
Detecting apparatus and device manufacturing method App 20060219909 - Hatakeyama; Masahiro ; et al.	2006-10-05
Electron beam apparatus and device manufacturing method using same Grant 7,098,457 - Nagahama , et al. August 29, 2	2006-08-29
Detecting apparatus and device manufacturing method Grant 7,075,072 - Hatakeyama , et al. July 11, 2	2006-07-11
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20060118719 - Watanabe; Kenji ; et al.	2006-06-08
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 6,992,290 - Watanabe , et al. January 31, 2	2006-01-31
Substrate inspection method, method of manufacturing semiconductor device, and substrate inspection apparatus App 20050263701 - Nagahama, Ichirota ; et al.	2005-12-01
Defect inspection apparatus, program, and manufacturing method of semiconductor device App 20050230618 - Onishi, Atsushi ; et al.	2005-10-20
Electron beam apparatus and device manufacturing method using same App 20050205783 - Nagahama, Ichirota ; et al.	2005-09-22
Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus App 20050199807 - Watanabe, Kenji ; et al.	2005-09-15
Electron beam apparatus and device manufacturing method using same Grant 6,909,092 - Nagahama , et al. June 21, 2	2005-06-21
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device App 20050029451 - Nagahama, Ichirota ; et al.	2005-02-10
Electron beam apparatus and device manufacturing method using same App 20030213893 - Nagahama, Ichirota ; et al.	2003-11-20
Substrate inspecting system using electron beam and substrate inspecting method using electron beam Grant 6,563,114 - Nagahama , et al. May 13, 2	2003-05-13
Detecting apparatus and device manufacturing method App 20030047682 - Hatakeyama, Masahiro ; et al.	2003-03-13
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20020088940 - Watanabe, Kenji ; et al.	2002-07-11
Inspection system by charged particle beam and method of manufacturing devices using the system App 20020028399 - Nakasuji, Mamoru ; et al.	2002-03-07

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