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Fluorine-containing monomer, fluorine-containing polymer, pattern forming composition using same, and pattern forming method of same Grant 11,281,102 - Kaneko , et al. March 22, 2 | 2022-03-22 |
Substrate, Selective Film Deposition Method, Deposition Film Oforganic Matter, And Organic Matter App 20220081575 - SHINMEN; Masutaka ;   et al. | 2022-03-17 |
Method for Purifying Polymerizable Fluoromonomer by Distillation App 20210317065 - MIYAZAWA; Satoru ;   et al. | 2021-10-14 |
Fluorine-Containing Monomer, Fluorine-Containing Polymer, Pattern Forming Composition Using Same, and Pattern Forming Method of App 20200089116 - KANEKO; Yuzuru ;   et al. | 2020-03-19 |
Method for producing .alpha.,.alpha.-difluoroacetaldehyde Grant 10,351,502 - Inazu , et al. July 16, 2 | 2019-07-16 |
Method for Producing Alpha, Alpha-Difluoroacetaldehyde App 20190031587 - INAZU; Asami ;   et al. | 2019-01-31 |
Method for improving preservation stability of 2,2-difluoroacetaldehyde Grant 9,845,278 - Takeda , et al. December 19, 2 | 2017-12-19 |
Method for Improving Preservation Stability of 2,2-Difluoroacetoaldehyde App 20170197899 - TAKEDA; Masaaki ;   et al. | 2017-07-13 |
Methods for producing fluorine-containing hydroxyaldehyde, fluorine-containing propanediol, and fluorine-containing alcohol monomer Grant 9,604,891 - Oomuro , et al. March 28, 2 | 2017-03-28 |
Method of stabilizing fluorine-containing acid amplifier Grant 9,274,420 - Akiba , et al. March 1, 2 | 2016-03-01 |
Methods for Producing Fluorine-Containing Hydroxyaldehyde, Fluorine-Containing Propanediol, and Fluorine-Containing Alcohol Monomer App 20150361026 - OOMURO; Hitoshi ;   et al. | 2015-12-17 |
Stabilized Acid Amplifiers App 20140093823 - BRAINARD; Robert L. ;   et al. | 2014-04-03 |
Method of Stabilizing Fluorine-Containing Acid Amplifier App 20140065541 - AKIBA; Shinya ;   et al. | 2014-03-06 |
Process for producing monomer for fluorinated resist Grant 8,524,941 - Akiba , et al. September 3, 2 | 2013-09-03 |
Process for producing .alpha.-substituted norbornanyl acrylates Grant 8,466,310 - Matsuura , et al. June 18, 2 | 2013-06-18 |
Process for Producing Monomer for Fluorinated Resist App 20120004444 - Akiba; Shinya ;   et al. | 2012-01-05 |
Process for Producing Fluoroalkylsulfonylaminoethyl Alpha-Substituted-Acrylate App 20110237824 - Ishimaru; Takehisa ;   et al. | 2011-09-29 |
Process for Producing Alpha-Substituted Norbornanyl Acrylates App 20110137073 - Matsuura; Makoto ;   et al. | 2011-06-09 |
Process for producing fluorine-containing alkylsulfonylaminoethyl .alpha.-substituted acrylate Grant 7,598,413 - Komata , et al. October 6, 2 | 2009-10-06 |
Process for Producing Fluorine-Containing Alkylsulfonylaminoethyl Alpha-Substituted Acrylate App 20090069595 - KOMATA; Takeo ;   et al. | 2009-03-12 |
Process for producing fluorine-containing alkylsulfonylaminoethyl .alpha.-substituted acrylate Grant 7,115,771 - Komata , et al. October 3, 2 | 2006-10-03 |
Process for producing fluorine-containing alkylsulfonylaminoethyl a-substitued acrylate App 20050240052 - Komata, Takeo ;   et al. | 2005-10-27 |
Process for producing 1,1,3,3-tetrachloro-1,3-difluoroacetone App 20020010372 - Nadano, Ryo ;   et al. | 2002-01-24 |
Process for producing 1,1,1-trifluoroacetone Grant 6,340,776 - Goto , et al. January 22, 2 | 2002-01-22 |
Process for producing 1,1,1,-trifluoroacetone App 20010037041 - Goto, Yoshihiko ;   et al. | 2001-11-01 |