Patent | Date |
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Depositing ruthenium layers in interconnect metallization Grant 10,731,250 - Kim , et al. | 2020-08-04 |
Manganese barrier and adhesion layers for cobalt Grant 10,438,847 - Lai , et al. O | 2019-10-08 |
Selective deposition of WCN barrier/adhesion layer for interconnect Grant 10,283,404 - Na , et al. | 2019-05-07 |
Methods and apparatus for forming smooth and conformal cobalt film by atomic layer deposition Grant 10,242,879 - Na , et al. | 2019-03-26 |
Systems and methods for forming low resistivity metal contacts and interconnects by reducing and removing metallic oxide Grant 10,229,826 - Tarafdar , et al. | 2019-03-12 |
Depositing Ruthenium Layers In Interconnect Metallization App 20180347041 - Kim; Do Young ;   et al. | 2018-12-06 |
Methods And Apparatus For Forming Smooth And Conformal Cobalt Film By Atomic Layer Deposition App 20180308701 - Na; Jeong-Seok ;   et al. | 2018-10-25 |
Selective Deposition Of Wcn Barrier/adhesion Layer For Interconnect App 20180286746 - Na; Jeong-Seok ;   et al. | 2018-10-04 |
Systems And Methods For Forming Low Resistivity Metal Contacts And Interconnects By Reducing And Removing Metallic Oxide App 20180114694 - Tarafdar; Raihan ;   et al. | 2018-04-26 |
Manganese Barrier And Adhesion Layers For Cobalt App 20170330797 - Lai; Chiukin Steven ;   et al. | 2017-11-16 |
Method for void-free cobalt gap fill Grant 9,748,137 - Lai , et al. August 29, 2 | 2017-08-29 |
Method for void-free cobalt gap fill Grant 9,349,637 - Na , et al. May 24, 2 | 2016-05-24 |
Method For Void-free Cobalt Gap Fill App 20160056077 - Lai; Chiukin Steven ;   et al. | 2016-02-25 |
Method For Void-free Cobalt Gap Fill App 20160056074 - Na; Jeong-Seok ;   et al. | 2016-02-25 |
Systems and methods for remote plasma atomic layer deposition Grant 9,255,326 - Na , et al. February 9, 2 | 2016-02-09 |
Systems And Methods For Remote Plasma Atomic Layer Deposition App 20140272185 - Na; Jeong-Seok ;   et al. | 2014-09-18 |
Ion-induced atomic layer deposition of tantalum Grant 8,747,964 - Park , et al. June 10, 2 | 2014-06-10 |
Ion-induced Atomic Layer Deposition Of Tantalum App 20120115325 - PARK; Kie Jin ;   et al. | 2012-05-10 |
Vertical GaN light emitting diode and method for manufacturing the same Grant 7,112,456 - Park , et al. September 26, 2 | 2006-09-26 |
White light emitting diode and method for manufacturing the same Grant 7,091,055 - Hahm , et al. August 15, 2 | 2006-08-15 |
Vertical GaN light emitting diode and method for manufacturing the same App 20050214965 - Park, Young Ho ;   et al. | 2005-09-29 |
Vertical GaN light emitting diode and method for manufacturing the same App 20050173692 - Park, Young Ho ;   et al. | 2005-08-11 |
White light emitting diode and method for manufacturing the same App 20050161683 - Hahm, Hun Joo ;   et al. | 2005-07-28 |
White light emitting diode and method for manufacturing the same Grant 6,914,262 - Hahm , et al. July 5, 2 | 2005-07-05 |
Method for manufacturing gallium nitride (GaN) based single crystalline substrate that include separating from a growth substrate Grant 6,902,989 - Na , et al. June 7, 2 | 2005-06-07 |
White light emitting diode and method for manufacturing the same App 20040262617 - Hahm, Hun Joo ;   et al. | 2004-12-30 |
Method for manufacturing gallium nitride (GaN) based single crystalline substrate App 20040253796 - Na, Jeong Seok ;   et al. | 2004-12-16 |
Method For Manufacturing Vertical Gan Light Emitting Diodes App 20040248377 - Yoo, Seung Jin ;   et al. | 2004-12-09 |
Method for manufacturing vertical GaN light emitting diodes Grant 6,818,531 - Yoo , et al. November 16, 2 | 2004-11-16 |