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Patent applications and USPTO patent grants for Na; Heungyeol.The latest application filed is for "system for transferring substrate and method for transferring substrate using the same".
Patent | Date |
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Substrate treatment device providing improved detachment mechanism between substrate and stage and substrate treatment method performed using the same Grant 10,840,123 - Na November 17, 2 | 2020-11-17 |
System For Transferring Substrate And Method For Transferring Substrate Using The Same App 20200176295 - NA; Heungyeol ;   et al. | 2020-06-04 |
Substrate Treatment Device Providing Improved Detachment Mechanism Between Substrate And Stage And Substrate Treatment Method Performed Using The Same App 20180261493 - NA; HEUNGYEOL | 2018-09-13 |
Thin film deposition apparatus Grant 9,410,237 - Na , et al. August 9, 2 | 2016-08-09 |
Method of manufacturing a mask Grant 8,927,180 - Prushinskiy , et al. January 6, 2 | 2015-01-06 |
Thin Film Deposition Apparatus App 20140299060 - NA; HeungYeol ;   et al. | 2014-10-09 |
Method of Manufacturing a Mask App 20130071775 - Prushinskiy; Valeriy ;   et al. | 2013-03-21 |
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