Na; Donghyeon
Patent Applications and Registrations
Patent applications and USPTO patent grants for Na; Donghyeon.The latest application filed is for "apparatus and method fabricating semiconductor device".
- Na; Donghyeon - Hwaseong-si KR
| Patent | Date |
|---|---|
| Electrostatic chuck and plasma processing apparatus including the same Grant 11,367,597 - Lee , et al. June 21, 2 | 2022-06-21 |
| Apparatus And Method Fabricating Semiconductor Device App 20220165552 - KIM; NAM KYUN ; et al. | 2022-05-26 |
| Plasma control apparatus and plasma processing system including the same Grant 11,282,679 - Na , et al. March 22, 2 | 2022-03-22 |
| Plasma Etching Method And Semiconductor Device Fabrication Method Including The Same App 20210104382 - KIM; Yonghee ; et al. | 2021-04-08 |
| Plasma Control Apparatus And Plasma Processing System Including The Same App 20200373126 - NA; Donghyeon ; et al. | 2020-11-26 |
| Electrostatic Chuck And Plasma Processing Apparatus Including The Same App 20200013595 - LEE; Yongwoo ; et al. | 2020-01-09 |
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