Patent | Date |
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Textile Patterning For Subtractively-patterned Self-aligned Interconnects, Plugs, And Vias App 20220157619 - LIN; Kevin ;   et al. | 2022-05-19 |
Textile patterning for subtractively-patterned self-aligned interconnects, plugs, and vias Grant 11,276,581 - Lin , et al. March 15, 2 | 2022-03-15 |
Textile Patterning For Subtractively-patterned Self-aligned Interconnects, Plugs, And Vias App 20190287813 - LIN; Kevin ;   et al. | 2019-09-19 |
Textile patterning for subtractively-patterned self-aligned interconnects, plugs, and vias Grant 10,366,903 - Lin , et al. July 30, 2 | 2019-07-30 |
Via self alignment and shorting improvement with airgap integration capacitance benefit Grant 10,147,639 - Singh , et al. De | 2018-12-04 |
Method and structure to contact tight pitch conductive layers with guided vias using alternating hardmasks and encapsulating etchstop liner scheme Grant 10,032,643 - Chawla , et al. July 24, 2 | 2018-07-24 |
Textile Patterning For Subtractively-patterned Self-aligned Interconnects, Plugs, And Vias App 20180158694 - LIN; Kevin ;   et al. | 2018-06-07 |
Techniques for forming interconnects in porous dielectric materials Grant 9,887,161 - Jezewski , et al. February 6, 2 | 2018-02-06 |
Via Self Alignment And Shorting Improvement With Airgap Integration Capacitance Benefit App 20170250104 - SINGH; Kanwal Jit ;   et al. | 2017-08-31 |
Self-aligned via and plug patterning with photobuckets for back end of line (BEOL) interconnects Grant 9,553,018 - Bristol , et al. January 24, 2 | 2017-01-24 |
Diagonal hardmasks for improved overlay in fabricating back end of line (BEOL) interconnects Grant 9,548,269 - Myers , et al. January 17, 2 | 2017-01-17 |
Techniques For Forming Interconnects In Porous Dielectric Materials App 20160343665 - JEZEWSKI; CHRISTOPHER J. ;   et al. | 2016-11-24 |
Techniques for forming interconnects in porous dielectric materials Grant 9,406,615 - Jezewski , et al. August 2, 2 | 2016-08-02 |
Self-aligned via patterning with multi-colored photobuckets for back end of line (BEOL) interconnects Grant 9,406,512 - Bristol , et al. August 2, 2 | 2016-08-02 |
Methods for forming interconnect layers having tight pitch interconnect structures Grant 9,379,010 - Jezewski , et al. June 28, 2 | 2016-06-28 |
Diagonal Hardmasks For Improved Overlay In Fabricating Back End Of Line (beol) Interconnects App 20160126184 - Myers; Alan M. ;   et al. | 2016-05-05 |
Self-aligned Via And Plug Patterning With Photobuckets For Back End Of Line (beol) Interconnects App 20160104642 - Bristol; Robert L. ;   et al. | 2016-04-14 |
Self-aligned via and plug patterning with photobuckets for back end of line (BEOL) interconnects Grant 9,236,342 - Bristol , et al. January 12, 2 | 2016-01-12 |
Diagonal hardmasks for improved overlay in fabricating back end of line (BEOL) interconnects Grant 9,209,077 - Myers , et al. December 8, 2 | 2015-12-08 |
Self-aligned Via Patterning With Multi-colored Photobuckets For Back End Of Line (beol) Interconnects App 20150255284 - Bristol; Robert L. ;   et al. | 2015-09-10 |
Methods For Forming Interconnect Layers Having Tight Pitch Interconnect Structures App 20150214094 - Jezewski; Christopher J. ;   et al. | 2015-07-30 |
Techniques For Forming Interconnects In Porous Dielectric Materials App 20150179578 - Jezewski; Christopher J. ;   et al. | 2015-06-25 |
Diagonal Hardmasks For Improved Overlay In Fabricating Back End Of Line (beol) Interconnects App 20150179513 - Myers; Alan M. ;   et al. | 2015-06-25 |
Self-aligned Via Patterning With Multi-colored Photobuckets For Back End Of Line (beol) Interconnects App 20150171009 - Bristol; Robert L. ;   et al. | 2015-06-18 |
Self-aligned Via And Plug Patterning With Photobuckets For Back End Of Line (beol) Interconnects App 20150171010 - Bristol; Robert L. ;   et al. | 2015-06-18 |
Self-aligned via patterning with multi-colored photobuckets for back end of line (BEOL) interconnects Grant 9,041,217 - Bristol , et al. May 26, 2 | 2015-05-26 |
Integrated re-combiner for electroosmotic pumps using porous frits Grant 7,723,208 - Kim , et al. May 25, 2 | 2010-05-25 |
Method of forming a stack of heat generating integrated circuit chips with intervening cooling integrated circuit chips Grant 7,696,015 - Kim , et al. April 13, 2 | 2010-04-13 |
Methods of forming channels on an integrated circuit die and die cooling systems including such channels Grant 7,663,230 - Ramanathan , et al. February 16, 2 | 2010-02-16 |
Orientation independent electroosmotic pump Grant 7,645,368 - Myers , et al. January 12, 2 | 2010-01-12 |
Using external radiators with electroosmotic pumps for cooling integrated circuits Grant 7,576,432 - Kim , et al. August 18, 2 | 2009-08-18 |
Identification and characterization of a novel alpha-amylase from maize endosperm App 20090197323 - James; Martha G. ;   et al. | 2009-08-06 |
Apparatus and method integrating an electro-osmotic pump and microchannel assembly into a die package Grant 7,569,426 - Myers , et al. August 4, 2 | 2009-08-04 |
Micropin heat exchanger Grant 7,498,672 - Myers , et al. March 3, 2 | 2009-03-03 |
Identification and characterization of a novel alpha-amylase from maize endosperm Grant 7,495,152 - James , et al. February 24, 2 | 2009-02-24 |
Methods of forming channels on an integrated circuit die and die cooling systems including such channels App 20080185714 - Ramanathan; Shriram ;   et al. | 2008-08-07 |
Method for manufacturing porous silicon Grant 7,396,479 - Ravi , et al. July 8, 2 | 2008-07-08 |
Identification and characterization of a novel alpha-amylase from maize endosperm App 20080134363 - James; Martha G. ;   et al. | 2008-06-05 |
Methods of forming channels on an integrated circuit die and die cooling systems including such channels Grant 7,358,201 - Ramanathan , et al. April 15, 2 | 2008-04-15 |
Apparatus and method integrating an electro-osmotic pump and microchannel assembly into a die package Grant 7,355,277 - Myers , et al. April 8, 2 | 2008-04-08 |
Packaged electroosmotic pumps using porous frits for cooling integrated circuits App 20070278668 - Kim; Sarah E. ;   et al. | 2007-12-06 |
Integrated Circuit Coolant Microchannel With Compliant Cover App 20070230116 - Myers; Alan M. ;   et al. | 2007-10-04 |
Packaged electroosmotic pumps using porous frits for cooling integrated circuits Grant 7,274,106 - Kim , et al. September 25, 2 | 2007-09-25 |
Identification and characterization of a novel alpha-amylase from maize endosperm Grant 7,270,988 - James , et al. September 18, 2 | 2007-09-18 |
Apparatus And Method Integrating An Electro-osmotic Pump And Microchannel Assembly Into A Die Package App 20070190695 - Myers; Alan M. ;   et al. | 2007-08-16 |
Integrated circuit coolant microchannel with compliant cover Grant 7,243,705 - Myers , et al. July 17, 2 | 2007-07-17 |
Controlling electrolytically generated gas bubbles in in-plane electroosmotic pumps App 20070009366 - Myers; Alan M. ;   et al. | 2007-01-11 |
Orientation independent electroosmotic pump App 20060254913 - Myers; Alan M. ;   et al. | 2006-11-16 |
Electroosmotic pumps using porous frits for cooling integrated circuit stacks App 20060226541 - Kim; Sarah E. ;   et al. | 2006-10-12 |
Self-aligned electrodes contained within the trenches of an electroosmotic pump Grant 7,105,382 - Myers , et al. September 12, 2 | 2006-09-12 |
Integrated circuit coolant microchannel with compliant cover App 20060196646 - Myers; Alan M. ;   et al. | 2006-09-07 |
Electroosmotic pumps using porous frits for cooling integrated circuit stacks Grant 7,084,495 - Kim , et al. August 1, 2 | 2006-08-01 |
Using external radiators with electroosmotic pumps for cooling integrated circuits App 20060055030 - Kim; Sarah E. ;   et al. | 2006-03-16 |
Isolation of SU1, a starch debranching enzyme, the product of the maize gene sugary1 Grant 6,995,300 - Myers , et al. February 7, 2 | 2006-02-07 |
Using external radiators with electroosmotic pumps for cooling integrated circuits Grant 6,992,381 - Kim , et al. January 31, 2 | 2006-01-31 |
Methods of forming channels on an integrated circuit die and die cooling systems including such channels App 20050215058 - Ramanathan, Shriram ;   et al. | 2005-09-29 |
Isolation Of Su1, A Starch Debranching Enzyme, The Product Of The Maize Gene Sugary1 App 20050204425 - Myers, Alan M. ;   et al. | 2005-09-15 |
Methods of forming channels on an integrated circuit die and die cooling systems including such channels Grant 6,919,231 - Ramanathan , et al. July 19, 2 | 2005-07-19 |
Apparatus and method integrating an electro-osmotic pump and microchannel assembly into a die package App 20050139996 - Myers, Alan M. ;   et al. | 2005-06-30 |
Identification and characterization of a novel alpha-amylase from maize endosperm App 20050138688 - James, Martha G. ;   et al. | 2005-06-23 |
Self-aligned electrodes contained within the trenches of an electroosmotic pump App 20050112816 - Myers, Alan M. ;   et al. | 2005-05-26 |
Micropin heat exchanger App 20050104200 - Myers, Alan M. ;   et al. | 2005-05-19 |
Using external radiators with electroosmotic pumps for cooling integrated circuits App 20050093138 - Kim, Sarah E. ;   et al. | 2005-05-05 |
Electroosmotic pumps using porous frits for cooling integrated circuit stacks App 20050085018 - Kim, Sarah E. ;   et al. | 2005-04-21 |
Integrated re-combiner for electroosmotic pumps using porous frits App 20050074953 - Kim, Sarah E. ;   et al. | 2005-04-07 |
Packaged electroosmotic pumps using porous frits for cooling integrated circuits App 20050062150 - Kim, Sarah E. ;   et al. | 2005-03-24 |
dull1 coding for a novel starch synthase and uses thereof App 20040049810 - Myers, Alan M. ;   et al. | 2004-03-11 |
Dull1 coding for a starch synthase and uses thereof Grant 6,639,125 - Myers , et al. October 28, 2 | 2003-10-28 |
Method for making a sub 100 nanometer semiconductor device using conventional lithography steps Grant 6,596,646 - Andideh , et al. July 22, 2 | 2003-07-22 |
Method for making a sub 100 nanometer semiconductor device using conventional lithography steps App 20030022517 - Andideh, Ebrahim ;   et al. | 2003-01-30 |
Sidewall spacers and methods of making same App 20020127763 - Arafa, Mohamed ;   et al. | 2002-09-12 |
Pattern-sensitive deposition for damascene processing Grant 6,406,995 - Hussein , et al. June 18, 2 | 2002-06-18 |
Via hole profile and method of fabrication Grant 5,874,358 - Myers , et al. February 23, 1 | 1999-02-23 |
Anchored via connection Grant 5,619,071 - Myers , et al. April 8, 1 | 1997-04-08 |
Via hole profile and method of fabrication Grant 5,470,790 - Myers , et al. November 28, 1 | 1995-11-28 |