Patent | Date |
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Single Crystal Silicon Having Improved Gate Oxide Integrity App 20090022930 - Falster; Robert J. ;   et al. | 2009-01-22 |
Process for forming low defect density, ideal oxygen precipitating silicon Grant 7,442,253 - Falster , et al. October 28, 2 | 2008-10-28 |
Process for preparing single crystal silicon having improved gate oxide integrity Grant 7,431,765 - Falster , et al. October 7, 2 | 2008-10-07 |
Process For Forming Low Defect Density, Ideal Oxygen Precipitating Silicon App 20070224783 - Falster; Robert J. ;   et al. | 2007-09-27 |
Low defect density, ideal oxygen precipitating silicon Grant 7,229,693 - Falster , et al. June 12, 2 | 2007-06-12 |
Single crystal silicon having improved gate oxide integrity Grant 6,986,925 - Falster , et al. January 17, 2 | 2006-01-17 |
Vacancy-dominated, defect-free silicon App 20050238905 - Falster, Robert J. ;   et al. | 2005-10-27 |
Low defect density, ideal oxygen precipitating silicon App 20050170610 - Falster, Robert J. ;   et al. | 2005-08-04 |
Process for preparing single crystal silicon having improved gate oxide integrity App 20050160967 - Falster, Robert J. ;   et al. | 2005-07-28 |
Process for producing low defect density, ideal oxygen precipitating silicon Grant 6,896,728 - Falster , et al. May 24, 2 | 2005-05-24 |
Vacancy, dominsated, defect-free silicon Grant 6,840,997 - Falster , et al. January 11, 2 | 2005-01-11 |
Process for producing low defect density silicon App 20040089224 - Falster, Robert J. ;   et al. | 2004-05-13 |
Method for controlling growth of a silicon crystal to minimize growth rate and diameter deviations Grant 6,726,764 - Mutti , et al. April 27, 2 | 2004-04-27 |
Process for producing low defect density, ideal oxygen precipitating silicon App 20040025782 - Falster, Robert J. ;   et al. | 2004-02-12 |
Process for growing a silicon crystal segment substantially free from agglomerated intrinsic point defects which allows for variability in the process conditions Grant 6,652,646 - Falster , et al. November 25, 2 | 2003-11-25 |
Process for suppressing the nucleation and/or growth of interstitial type defects by controlling the cooling rate through nucleation App 20030196587 - McCallum, Kirk D. ;   et al. | 2003-10-23 |
Low defect density epitaxial wafer and a process for the preparation thereof Grant 6,632,278 - Falster , et al. October 14, 2 | 2003-10-14 |
Process for preparing defect free silicon crystals which allows for variability in process conditions App 20030116081 - Falster, Robert J. ;   et al. | 2003-06-26 |
Vacancy, dominated, defect-free silicon App 20030051657 - Falster, Robert J. ;   et al. | 2003-03-20 |
Low Defect Density Epitaxial Wafer And A Process For The Preparation Thereof App 20020170485 - Falster, Robert J. ;   et al. | 2002-11-21 |
Process for preparing single crystal silicon having improved gate oxide integrity App 20020121238 - Falster, Robert J. ;   et al. | 2002-09-05 |
Vacancy, dominsated, defect-free silicon App 20020078880 - Falster, Robert J. ;   et al. | 2002-06-27 |
Method for controlling growth of a silicon crystal to minimize growth rate and diameter deviations App 20020043206 - Mutti, Paolo ;   et al. | 2002-04-18 |
Process for preparing defect free silicon crystals which allows for variability in process conditions App 20010027743 - Falster, Robert J. ;   et al. | 2001-10-11 |
Low defect density, self-interstitial dominated silicon App 20010025597 - Falster, Robert J. ;   et al. | 2001-10-04 |
Low defect density, ideal oxygen precipitating silicon Grant 6,190,631 - Falster , et al. February 20, 2 | 2001-02-20 |